5OM-1610-002_w - 第63页

5OM-1610 1-10 Pneumatic and Mounting Diagrams 101 1-002-(0320C) High Speed Head Unit (Pneumatic Diagram) 1 3 2 4 6 5 From Main Body Robot Cable Nozzle1 Nozzle2 Nozzle3 No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q…

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5OM-1610
1-9
Pneumatic and Mounting Diagrams
1011-001
5OM-1610
1-10
Pneumatic and Mounting Diagrams
1011-002-(0320C)
High Speed Head Unit (Pneumatic Diagram)
1
3
2
4
6
5
From Main Body
Robot Cable
Nozzle1 Nozzle2 Nozzle3
No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty
1 Tube
φ
4 1
2 Tube
φ
8 1
3 Solenoid Valve 1
4 Rotary Joint 1
5 Solenoid Valve 15
6 Filter 15
5OM-1610
1-11
Pneumatic and Mounting Diagrams
1011-002-(0320C)
High Speed Head Unit (Mounting Diagram)
3
5
4
6
No. Name Q’ty No. Name Q’ty No. Name Q’ty No. Name Q’ty
3 Solenoid Valve 1
4 Rotary Joint 1
5 Solenoid Valve 15
6 Filter 15