5OM-1610-002_w - 第78页
5OM-1610 2-1 Sensor and Load Layout 091 1-001 Layout under the Base S144 Y939 Y0938 Y939 Y0938 M66 Y0938 Y939 Y0938 Y939 Front View Symbol Name Symbol Name M66 V acuum Pump Y0638 V acuum/Collective Disposal Change-Over Y…
5OM-1610
0911-001 2-B
5OM-1610
2-1
Sensor and Load Layout
0911-001
Layout under the Base
S144
Y939
Y0938
Y939
Y0938
M66
Y0938
Y939
Y0938
Y939
Front View
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 V
acuum/Collective Disposal Change-Over Y0938 V
acuum/Collective Disposal Change-Over
Y0639 High-Speed/Multi-Functional Head Change-Over Y0939 High-Speed/Multi-Functional Head Change-Over
S1
41 Air Pressure Drop Detection
5OM-1610
2-2
Sensor and Load Layout
1011-002
Panel Layout
S101F S103F
S102F
H102F S105F
Symbol Name Symbol Name
S101F POWER ON PB (Front)
S102F START (Front)
H102F START (Front) LED
S103F STOP (Front)
S105F Emergency Stop Operation Switch (Front)