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PN 141-400 www.formfactor.com Probe Mounts/Holders and Pro bes • 1 14 Revision 57, February, 2023 Probe Station A ccessories P R OB ES , PM 5 P OW ER S YS TEMS 142 69 3 — P r ob e 10 kV D ANGER T o use this pr obe safely…

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PN 141-400 www.formfactor.com Probe Mounts/Holders and Probes • 113
Revision 57, February, 2023 Probe Station Accessories
RF PROBE ARMS, PA200 BLUERAY
142139 — Probe Arm, RPP305-S East, Right,
2 Positioners, BlueRay
Features
• For positioning the probe on the right side of
DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
142140 — Probe Arm, RPP305-S West,
Left, 2 Positioners, BlueRay
Features
• For positioning the probe on the left side of
DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
142143 — Probe Arm, RPP305-S East-West,
4 Positioners, BlueRay
Features
• For positioning the probe on the left or
right side of DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
142148 — Probe Arm, RPP305-S North-South,
4 Positioners, BlueRay
Features
• For positioning the probe at the front or rear of
DUT
• With integrated probe planarization
Compatibility
• RPP305-B-S, RPP305-M-S
PROBE ARM, OPTICAL FIBER
145533 — Probe Arm, Optical Fiber 125 µm, DPP2xx
Features
• Allows placement of glass fiber over the wafer
• Mount to DPP2xx
• Fiber tip visible in microscope image
• Front part of arm can be horizontally rotated
• Other fiber adaptations on request
Specifications
• Ferrule diameter 250 µm (9.8 mils) for 125 µm (4.9 mils) fiber cores
and jacket
• Fiber angle vertical adjustable 80°-90°
Compatibility
• DPP2xx (and former PH110)
PROBE ARMS, PM5 POWER SYSTEMS
145303 — Probe Holder Short
Features
• Stainless steel design for high rigidity
and minimum thermal drift
• To connect any individual probe to a
RPP210 positioner for use with PM5
Power system
Compatibility
• PM5 Power
144777 — Probe Arm, RPP210-S, East-West
Features
• For use with HF probes o r wedges
• Positions the probe at the left or right side
of DU T
• Horizontal probe mounting plate can be
levelled
• For use with HF platen and MicroAlign
• For use with RPP210-S (and former
PH110) positioners
Compatibility
• All PM/PA stations with RF platen, CM300 and PA300 MicroAlign,
RPP210-S (and former PH110)
PN 141-400 www.formfactor.com Probe Mounts/Holders and Probes • 114
Revision 57, February, 2023 Probe Station Accessories
PROBES, PM5 POWER SYSTEMS
142693 — Probe 10 kV
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curt ain or approved sa fety interlocks. Failure to
employ these safety measures can result in serious injury or death.
Features
• Highly isolated needle clamp for
standard single tips
• Stainless steel design for h igh rigidity
and minimum thermal drift
• For use with temperature chucks up to
300°C (572°F)
• Requires arm holder for RPP210
Specifications
• 1.2 m (4 ft) coax cable with 10 kV plug
• Operating voltage up to 10 kV
Compatibility
• PM5 Power
145297 — Probe HV Triax / 3 kV
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curt ain or approved sa fety interlocks. Failure to
employ these safety measures can result in serious injury or death.
Features
• Highly isolated needle clamp for
standard single tips like PTT needles
• For use with temperature chucks up to
300°C (572°F)
• Stainless steel design for h igh rigidity
and minimum thermal drift
• Requires arm holder for RPP210
Specifications
• 1.2 m (4 ft) coax cable with HV triax plug
• Operating voltage up to 3 kV with lowest leakage
Compatibility
• PM5 Power
145298 — Probe HV Coax / 3 kV
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curtain or approved safe ty interlocks. Failure to
employ these safety measures can result in serious injury o r death.
Features
• Highly isolated needle clamp for standard
single tips
• Stainless steel design for high rigidity and
minimum thermal drift
• For use with temperature chucks up to
300°C (572°F)
• Requires arm holder for RPP210
Specifications
• 0.75 m (2.5 ft) coax cable with SHV plug
• Operating voltage up to 3 kV
Compatibility
• PM5 Power
145300 — Probe HV Triax / Kelvin / 3 kV
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curtain or approved safe ty interlocks. Failure to
employ these safety measures can result in serious injury o r death.
Features
• For triaxial I/V and Kelvin
measurements
• Highly isolated needle clamp for
standard single tips
• Stainless steel design for high rigidity
and minimum thermal drift
• For use with temperature chucks up to 300°C (572°F)
• Connector sockets for CommonRing cables
• Requires arm holder for RPP210
Specifications
• 2 x 1.2 m (4 ft) 50 Ohm triaxial c able with HV Triax plug
• Operating voltage up to 3 kV
Compatibility
• PM5 Power
PN 141-400 www.formfactor.com Probe Mounts/Holders and Probes • 115
Revision 57, February, 2023 Probe Station Accessories
145301 — Probe HV Coax / Kelvin / 3 kV
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curt ain or approved sa fety interlocks. Failure to
employ these safety measures can result in serious injury or death.
Features
• For coaxial I/V-, Kelvin- and C/V te sts
• Highly isolated needle clamp for
standard single tips
• Stainless steel design for h igh rigidity
and minimum thermal drift
• For use with temperature chucks up to
300°C (572°F)
• Connector sockets for CommonRing cables
• Requires arm holder for RPP210
Specifications
• 2 x 1.2 m (4 ft) 50 Ohm coaxial cable with SHV plug
• Operating voltage up to 3 kV
Compatibility
• PM5 Power
145302 — Probe Coax / Kelvin
Features
• For coaxial I/V-, Kelvin- and C/V te sts
• Highly isolated needle clamp for single
tips (inner conductor of both cables
already connected inside chassis)
• Stainless steel design for h igh rigidity
and minimum thermal drift
• For use with temperature chucks up to 300°C (572°F)
• Connector sockets for CommonRing cables
• Requires arm holder for RPP210
Specifications
• 2 x 1.2 m (4 ft) 50 Ohm coaxial cable with BNC connector
Compatibility
• PM5 Power
146083 — Sigma for B1505A/SE
DANGER
To use this probe safely, your station must be configured with a
Tesla specific light curtain or approved safe ty interlocks. Failure to
employ these safety measures can result in serious injury o r death.
Features
SIGMA Integration of Keysight B1505A
Parameter System into the
ShieldEnclosure/POWER, including:
• On-wafer integration of Keysight
B1505A Parameter Analyzer System for
high voltage measurements up to 3 kV
and for high current measurements up
to 20 A pulsed
• Optimal integration by EMI and light
shielded environment
• Dedicated probe a rm set of 11
probe arms (triax, coax, Kelvin/triax,
Kelvin/coax) for measuring with
highest accuracy of:
– Lateral and vertical devices
– IV like device break down /I leak
– CV like Cds and Cgd
• All appropriate feedthroughs,
internal system wiring,
measurement adapter and supports
to accommodate Keysight
protection adapters and HV-bias-T
according to the Application
Overview for B1505A by Keysight
• Keysight-verified configuration and
probe accessories
• Also requires:
– 3 DPP2xx-M positioners wit h
MAG base
– Standard probe needles s uitable
for desired voltage/ current range
Compatibility
• PM5 Power System