141-400-57-probestationaccessoriescatalog - 第145页
PN 141-400 www.formfactor.com Probe Mounts/Holders and Pro bes • 1 29 Revision 57, February, 2023 Probe Station A ccessories DCP -150 K- 50 — DC Coa x ial Pro be, Kel vi n, 50 µm Pit ch, 5.0 µm Tip (Packages of 4 availab…
PN 141-400 www.formfactor.com Probe Mounts/Holders and Probes • 128
Revision 57, February, 2023 Probe Station Accessories
DCP-150R — DC Coaxial Probe, Single Line, 5.0 µm,
Replaceable Tip
(Packages of 4 available by ordering DCP-150R-4)
Features
• High-quality construction with low-noise
electrical performance
• Ultra-low, fA and fF measurements
from -65° to +150°C (-149º to +302ºF)
• Fully guarded measurements to fA and
fF levels
• Great fo r modeling and characterization work
• Dual Precision SSMC 50 ohm connections allow for Kelvin
configuration to the probe body
• Individual connectors for force sense connections
• Integrally designed as part o f FormFactor’s complete
measurement solution
• Configurable for triax usage
• Replaceable coax probe tips (Not included)
Specifications
• Breakdown voltage: >500 V
• Isolation resistance: > 1 x 10
13
ohms
• Frequency response (3 dB): 150 MHz
• Temperature range: -65° to +150°C (-149º to + 302ºF)
• Characteristic impedance: 50 ohms
• Tip material: Tungsten
• Bod y material: Gold plated
• Connector type: SSMC
• 5 µm (0.2 mils) radius probe tip
Compatibility
• CM300xi, PA/PM, MicroAlign, Elite 300, Summit, S300, M150,
Alessi
• See Replaceable Probe Tips on page 13 for compatible
replacement probes
DCP-150K-25 — DC Coaxial Probe, Kelvin, 25 µm Pitch,
5.0 µm Tip Radius
(Packages of 4 available by ordering DCP-150K-25-4)
Features
• True Kelvin Probe, two 5 µm (0.2 mils)
radius tips separated by 25 µm (0.98
mils)
• High-quality construction wi th low-noise
electrical performance
• Ultra-low, fA and fF measurements from
-65° to +150°C (-149º to +302ºF)
• Fully guarded measurements to fA and fF levels
• Great for modeling and characterization work
• Dual Precision SSMC 50 ohm connections, one for each tip
• Individual c onnectors for each tip
• Integrally designed as part of FormFactor’s complete
measurement solution
• Configurable for triax usage
Specifications
• Breakdown voltage: >500 V
• Isolation resistance: > 1 x 10
13
ohms
• Frequency response (3 dB): 150 MHz
• Temperature range: -65° to +150°C (-149º to +302ºF)
• Characteristic impedance: 50 ohms
• Probe Tip s eparation: 25 Microns
• Tip material: Tungsten
• Body material: Gold plated
• Connector type: SSMC
• 5 µm (0.2 mils) radius probe tip
Compatibility
• CM300xi, PA/PM, MicroAlign, Elite 300, Summit, S300, M150,
Alessi
PN 141-400 www.formfactor.com Probe Mounts/Holders and Probes • 129
Revision 57, February, 2023 Probe Station Accessories
DCP-150K-50 — DC Coaxial Probe, Kelvin, 50 µm Pitch,
5.0 µm Tip
(Packages of 4 available by ordering DCP-150K-50-4)
Features
• True Kelvin Probe, t wo 5 µm (0.2 mils)
radius tips separated by 50 µm (2.0 mils)
• High-quality construction with low-noise
electrical performance
• Ultra-low, fA and fF measurements from
-65° to +150°C (-149º to +3 02ºF)
• Fully guarded measurements to fA and fF levels
• Great fo r Modeling and Characterization work
• Dual Precision SSMC 50 ohm connections, one for each tip
• Individual connectors for each tip
• Integrally designed as part o f FormFactor’s complete
measurement solution
• Configurable for triax usage
Specifications
• Breakdown voltage: >500 V
• Isolation resistance: > 1 x 10
13
ohms
• Frequency response (3 dB): 150 MHz
• Temperature range: -65° to +150°C (-149º to + 302ºF)
• Characteristic impedance: 50 ohms
• Probe Tip separation: 50 Microns
• Tip material: Tungsten
• Bod y material: Gold plated
• Connector type: SSMC
• 5 µm (0.2 mils) radius probe tip
Compatibility
• CM300xi, PA/PM, MicroAlign, Elite 300, Summit, S300, M150,
Alessi
DCP-HTR — High Performance DC Probe Holder
Features
• High-quality construction with low-noise
electrical performance
• Fully guarded measurements to fA and
fF levels
• Great f or modeling and characterization
work
• Configurable for triax usage
• Full temperature range coverage
• Dual Precision SSMC 50 connection allow for Kelvin configuration
to the probe body
• Individual c onnectors for force sense connections
• Replaceable microstrip probe tips (Not included)
Specifications
• Frequency range: dc - 100 MHz
• 500 V breakdown voltage, isolation resistance 1E13 ohms
• Temperature range -65° to +300°C (-149º to +572ºF)
• Leakage noise: ± 10fA@-65 to +200°C, ± 2 0fA@200 to 300°C
• Does not inc lude replaceable tip
Compatibility
• CM300xi, PA/PM, MicroAlign, Elite 300, Summit, S300, M150,
Alessi
• See Replaceable Probe Tips on page 13 for compatible
replacement probes
PN 141-400 www.formfactor.com Summit • 130
Revision 57, February, 2023 Probe Station Accessories
Summit
Optical Bridge Mounts and Transports
115-416 — Low Power Optics Boom Stand
Features
• Microscope boom stand for low power
microscopes/optic
• Includes illuminator mounting tray
• Provides for a wide range of
movement
• Ena bles movement of the
microscope fully out of the probing
area
• Fits Summi t 11000/12000 systems
• Use s standard bonder arm mounts
• Not compatible with eVue, Mitutoyo, Seiwa, or A-Zoom
microscopes
Compatibility
• Summit
131-923 — Motorized Theta Upgrade Kit (with 80 Pin
Interconnect)
Features
• Kit supp orts automatic wafer
alignment and productivity tools in
probe station control software
packages
• Installation must be ordered with kit
(p/n SRV- STATION-UP)
• Must be us ed with PC48 OR PC38, not compatible with PCI motor
card
Specifications
• Travel ± 5.5°
• Res olution 0.65 μm (0.03 mil s)*
• Repeatability ± 2 μm (0.08 mils)*
• Accuracy ± 2 µm (0.08 mils)* standard moves, ± 3 μm (0.12 mils)*
large moves
* Measured at ed ge of 200 mm (8 in) chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 80-pin motor controller
• Motor driver and complete accessories
Compatibility
• Summit 12000
131-924 — Motorized Theta Upgra de Kit for Summit
12000 Stations (with 68 Pin Interconnect)
Features
• Kit supports automatic wafer
alignment and productivity tools in
probe station control software
packages
• Installation must be ordered with kit
(p/n SRV-STATION-UP)
Specifications
• Travel ± 5.5°
• Resolution 0.65 µm (0.03 mils)*
• Repeatability ± 2 μm (0.08 mils)*
• Accuracy ± 2 μm (0.08 mils)* standard moves, ± 3 µm (0.12 mils)*
large moves
*Measured at edge of 200 mm (8 in) chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 68-pin motor controller
• Motor driver and complete accessories
Compatibility
• Summit 12000
158-073 — Large Area Optics Bridge Mount
Features
• Larger area 152 x 203 mm (6 x 8
in) XY movement range
• Linear Z lift
• Manual lead s crew driven XY
movement
• Compatible with most common
microscopes used on probing
systems
• A microscope mounting plate
matching the selected
microscope and microscope transport is required
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope m odels offer optional
programmability for this feature.
Specifications
• 152 mm (6 in) X axis movement range (±76 mm [3 in] from center
of travel)
25.4 cm
(10.0 in)
19.7 c
m
(7.75 in)
3.6 cm
(1.4 in)