141-400-57-probestationaccessoriescatalog - 第147页
PN 141-400 www.formfactor.com S ummit • 131 Revision 57, February, 2023 Probe Station A ccessories • 203 m m ( 8 in) Y axis mov ement ra nge (±102 mm [4 in] from center of travel) • 76 m m (3 in) linear manual Z lift Com…
PN 141-400 www.formfactor.com Summit • 130
Revision 57, February, 2023 Probe Station Accessories
Summit
Optical Bridge Mounts and Transports
115-416 — Low Power Optics Boom Stand
Features
• Microscope boom stand for low power
microscopes/optic
• Includes illuminator mounting tray
• Provides for a wide range of
movement
• Ena bles movement of the
microscope fully out of the probing
area
• Fits Summi t 11000/12000 systems
• Use s standard bonder arm mounts
• Not compatible with eVue, Mitutoyo, Seiwa, or A-Zoom
microscopes
Compatibility
• Summit
131-923 — Motorized Theta Upgrade Kit (with 80 Pin
Interconnect)
Features
• Kit supp orts automatic wafer
alignment and productivity tools in
probe station control software
packages
• Installation must be ordered with kit
(p/n SRV- STATION-UP)
• Must be us ed with PC48 OR PC38, not compatible with PCI motor
card
Specifications
• Travel ± 5.5°
• Res olution 0.65 μm (0.03 mil s)*
• Repeatability ± 2 μm (0.08 mils)*
• Accuracy ± 2 µm (0.08 mils)* standard moves, ± 3 μm (0.12 mils)*
large moves
* Measured at ed ge of 200 mm (8 in) chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 80-pin motor controller
• Motor driver and complete accessories
Compatibility
• Summit 12000
131-924 — Motorized Theta Upgra de Kit for Summit
12000 Stations (with 68 Pin Interconnect)
Features
• Kit supports automatic wafer
alignment and productivity tools in
probe station control software
packages
• Installation must be ordered with kit
(p/n SRV-STATION-UP)
Specifications
• Travel ± 5.5°
• Resolution 0.65 µm (0.03 mils)*
• Repeatability ± 2 μm (0.08 mils)*
• Accuracy ± 2 μm (0.08 mils)* standard moves, ± 3 µm (0.12 mils)*
large moves
*Measured at edge of 200 mm (8 in) chuck
Kit Contents
• New motorized Theta/Z-stage assembly
• Interconnect board electronics for 68-pin motor controller
• Motor driver and complete accessories
Compatibility
• Summit 12000
158-073 — Large Area Optics Bridge Mount
Features
• Larger area 152 x 203 mm (6 x 8
in) XY movement range
• Linear Z lift
• Manual lead s crew driven XY
movement
• Compatible with most common
microscopes used on probing
systems
• A microscope mounting plate
matching the selected
microscope and microscope transport is required
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope m odels offer optional
programmability for this feature.
Specifications
• 152 mm (6 in) X axis movement range (±76 mm [3 in] from center
of travel)
25.4 cm
(10.0 in)
19.7 c
m
(7.75 in)
3.6 cm
(1.4 in)
PN 141-400 www.formfactor.com Summit • 131
Revision 57, February, 2023 Probe Station Accessories
• 203 mm (8 in) Y axis movement ra nge (±102 mm [4 in] from center
of travel)
• 76 mm (3 in) linear manual Z lift
Compatibility
• Summit
162-160 — High Stability Optics Bridge M ount (Manual
2x2)
Features
• High stability 51 x 51 mm (2 x 2 in)
XY microscope transport
• Easy coaxial manual XY drive
controls
• Pne umatic vertical z-lift (102 mm
[4 in] of travel)
• Sup ports laser and very small
structure work
• A microscope mounting plate
matching the selected microscope
and microscope transport is
required
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope models offer optional
programmability for this feature.
Specifications
• 51 mm ( 2 in) X axis movement range (±25 mm [1 in] from center of
travel)
• 51 mm (2 in) Y axis movement range (±25 mm [1 in] from center of
travel)
Compatibility
• Summit
162-165 — High Stability Optics Bridge Mount
(Motorized 2x2)
Features
• Programmable high stability 51 x
51 mm (2 x 2 in) XY microscope
transport
• Pneumatic vertical z-lift (102 mm [4
in] of travel)
• Motorized XY control with rotary
encoders for precision positioning
• Knobs for manual control provided
• Supports laser and very small
structure work
• ECA-53 drive card included
• An ECX-56 equipped system is required
• Fine Z range/focus control is managed using the microscope focus
mechanism. Select microscope m odels offer optional
programmability for this feature.
Specifications
• 51 mm (2 in) X axis movement range (±25 mm [1 in] from center of
travel)
• 51 mm ( 2 in) Y axis movement range (±25 mm [1 in] from center of
travel)
• Encoder resolution is 0.4 µm (0.02 mils)
Compatibility
• Summit 12000
PN 141-400 www.formfactor.com Summit • 132
Revision 57, February, 2023 Probe Station Accessories
Connection Panels (Coax, Triax, Pin jack, Banana Vacuum)
105-626 — Triax Connection Panel, Side Mount
Features
• Optional Triax connection panel for
convenient cable management
• Des igned to mount to the side of the
Summit series platen
• 8 Triax (3-lug) feed through connectors
(female)
• Pan el connections support single triax cables and Keysight dual
triax SMU cable assemblies. For Keysight Quadrax SMU
connections, p lease contact the factory.
Kit Contents
• Pan el with triax feed-throughs mounted
• Mounting hardware
• Cables are not included
Compatibility
• Summit
106-171 — Triax Connection Panel, Large Area Optical
Bridge/Boom Stand Config
Features
• Connection/
vacuum
panel
• 6 vacuum
ports with
on/off
toggle switches
• Sup ports triax, BNC, pin-to-banana style connects
• Triax connections support single triax cables and Keysight dual
triax SMU cable assemblies. Contact the factory for Keysight
quadrax SMU connections.
Specifications
• 12 Triax (3-lug) feed through connectors (f)
• 2 BNC (2-lug) feed through connectors (f)
• 4 BNC to pin jack feed through connections
• Sho rting bar to set the plane float or grounding setting
• Six 1/8 in barb output vacuum manifold for vacuum base positioner
support
Compatibility
• Summit
118-640 — Triax Connection Panel, High Stability Bridge
Config, S300
Features
• Set of Triax connection panels
for convenient cable
management
• Designed to mount to the high
stability optical bridge mount
• Panel connections su pport
single triax cables and Keysight
dual triax SMU cable
assemblies. Contact the factory
for Keysight quadrax SMU connections.
Specifications
• 16 total Triax (3-lug) feed through connectors (female), 8 on each
side
• Ground straps f or each panel
Compatibility
• S300
134-710 — Triax Connection Panel, High Stability Bridge
Config, Summit
Features
• Set of Triax connection panels
for convenient cable
management
• Designed to mount to the high
stability optical bridge mount
• Panel connections su pport
single triax cables and Keysight
dual triax SMU cable
assemblies. For Keysight quadrax SMU connections, please
contact the factory.
Specifications
• 10 Triax (3-lug) feed through connectors (female)
• 4 BNC connectors
• 2 banana connectors
• Ground strap on each side
Compatibility
• Summit