141-400-57-probestationaccessoriescatalog - 第23页

PN 141-400 www.formfactor.com Cryogenic and Vacuum • 7 Revision 57, February, 2023 Probe Station A ccessories Cryoge nic a n d V acuum Mis cel la neo us Cry og en ic an d V ac uum S ys t em Ac ces so r ie s 498 27 — LN 2…

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PN 141-400 www.formfactor.com CM300xi • 6
Revision 57, February, 2023 Probe Station Accessories
TEST EQUIPMENT INTERFACES
144987 — Test Equipment Interface, Pico Probe (up to
2)
Features
• To connect up to 2 active pico
probes to the MicroAlign
Advanced
• Includes 1 panel with 2
feedthroughs with integrated
cable strain relief
Compatibility
• CM300xi, PA300 MicroAlign, PM300PS
145044 — Test Equipment Interface, PH510 (up to 3)
Features
• Feedthrough plate for control
lines of up to 3 PH510 for use
in a MicroAlign system with
Top Chambers
• Not used control lines are
covered by a blank plate
Compatibility
• CM300xi, PA300 MicroAlign, PM300PS
PN 141-400 www.formfactor.com Cryogenic and Vacuum • 7
Revision 57, February, 2023 Probe Station Accessories
Cryogenic a nd Vacuum
Miscellaneous Cryogenic and Vacuum System Accessories
49827 — LN
2
Transport Dewar, 120l
Features
• Tank h ead with safety valve, fill level
gauge, central ball valve with 12 mm
(0.5 in) quick lock fitting
• Fill le vel gauge
• Internal pressure build-up system
Specifications
• Transfer tube DN10/1.5m
• Maximum positive operating pressure:
1.5 bar
Compatibility
• Cryogenic systems only
49906 — HF Precision Cable, PC-2.4 50GHz/0.8m with
Right Angle Plug Male/Male
Features
• Flexible
• Male-right angle male
• Cable le ngth: 0.8 m (32 in)
Compatibility
• PMC200, PMV200, PLV50
51113 — LHe Transport Dewar 120l
Features
• Specified for transportation of liquid
helium (LHe) on public roads
• Made of stainless steel
• Connection flange DN 50 KF
• With casters, safety v alve, vibration
damper and pressure gauge
• Head with safety ne ck tube, central ball
cock and 12 mm (0.5 in) quick lock fitting
• Two side-gated ball valves for p ressure
relief and bypass valve
Specifications
• Maximum overpressure 1.2 bar gauge
pressure
Compatibility
• Cryogenic systems only
PN 141-400 www.formfactor.com Cryogenic and Vacuum • 8
Revision 57, February, 2023 Probe Station Accessories
PMC200 Wafer Carriers
128027 — Wafer Carrier, 200 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tand ard 200 mm (8 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spr ing (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
130474 — Wafer Carrier, 150 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tand ard 150 mm (6 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring shaped leaf spr ing (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for best
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
130476 — Wafer Carrier, 100 mm, PMC200
Features
• For mounting, fixing and handling of
SEMI s tandard 100 mm (4 in) wafers
with FormFactor cryogenic probe
stations
• Mounting outside vacuum chamber
recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a ring s haped leaf spring (top-side wafer contact only at the
edge)
• Contact plate made of nickel/gold coated OFHC copper for be st
heat contact between wafer and chuck
• Includes holder for 2 RF calibration substrates
Compatibility
• PMC200
133758 — Substrate Holder, 4K, PMC200
Features
• For mounting, fixing and handling of
small substrates, maximum size 25 x 25
mm (1 x 1 in), with F ormFactor
cryogenic probe stations. Size and
shape of the substrate needs to be
specified with the order.
• Includes additional cold shield for achieving lowest sample
temperature
• Mounting outside vacuum chamber recommended
• Patented mechanical wafer clamping: mechanical clamping from
top by a clamping mask (top-side substrate contact only at the edge)
• Contact plate made of nickel/gold coated OFHC copper for be st
heat contact between wafer and chuck
Compatibility
• PMC200