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PN 141-400 www.formfactor.com Microscopes • 38 Revision 57, February, 2023 Probe Station A ccessories – Pr events involuntary mechanical damage between lens and probes – St ops all system motion a n d war ns of unobserve…

PN 141-400 www.formfactor.com Microscopes • 37
Revision 57, February, 2023 Probe Station Accessories
Microscopes
eVue IV
181-123 — eVue IV Digital Imaging System, 10X, Remote
Focus, Pro Package, for CM300 (no focus block, for
motorized transport)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z drive can work in the same range as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHa t for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No internal maint enance required
• Intelligent collision detection system
– Protects the measurement setup
– Prevents involuntary mechanical contact between lens and
probes
– Stops all system motion a nd warns of unobserved contact
Specifications
• 2 optical paths
• 4 mm fine focus Z drive range
• 0.2 µm (0.008 mils) Z drive resolution
• Auto focus
• Multi view with two screens
• 45.5 fps video fra me rates (1024 x 768)
• 13.1 fps video fra me rates (2048 x 1536)
• 0.5 - 5.0X zoom range
Kit Contents
• Integrated LED illumination system
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
Compatibility
• CM300xi
Requirements
• Velox probe station control software
• Velox 2.4 or later
181-124 — eVue IV Digital Imaging System, 10X, Remote
Focus, for CM300 (no focus block, for motorized
transport)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z dr ive can work in the same r ange as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHat for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No i nternal maintenance r equired
• Intelligent collision detection system
– Protects the measurement setup
NOTE
This catalog shows a wide range of microscope solutions and the general compatibility for a
platform. To determine compatibility for a specific configuration, re fer to the station configuration
guide.
i

PN 141-400 www.formfactor.com Microscopes • 38
Revision 57, February, 2023 Probe Station Accessories
– Prevents involuntary mechanical damage between lens and
probes
– Stops all system motion a nd warns of unobserved contact
Specifications
• 2 optical paths
• 0.2 µm (0.008 mils) Z drive resolution
• 45.5 fps video fra me rates (1024 x 768)
• 0.5 - 5.0X zoom range
• 4 mm fine focus range
Kit Contents
• Integrated LED Illumination sy stem
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
Compatibility
• CM300xi
Requirements
• Velox probe station control software
• Velox 2.4 or later
181-133 — eVue IV Digital Imaging System, 40X, Remote
Focus, Pro Package, for CM300 (no focus block, for
motorized transport)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z drive can work in the same range as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHa t for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No internal maint enance required
• Intelligent collision detection system
– Protects the measurement setup
– Prevents involuntary mechanical contact between lens and
probes
– Stops all system motion and warns of unobserved contact
Specifications
• 3 optical paths
• 4 mm fine focus Z drive range
• 0.2 µm (0.008 mils) Z drive resolution
• Auto focus
• Multi view with three screens
• 45.5 fps video f rame rates (1024 x 768)
• 13.1 fps video f rame rates (2048 x 1536)
• 0.5 - 20.0X zoom range
Kit Contents
• Integrated LED Illumination system
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
Compatibility
• CM300xi
Requirements
• Velox probe station control software
• Velox 2.4 or later
181-134 — eVue IV Digital Imaging System, 40X, Remote
Focus, for CM300 (no focus block, for motorized
transport)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z dr ive can work in the same r ange as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHat for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No i nternal maintenance r equired
• Intelligent collision detection system
– Protects the measurement setup

PN 141-400 www.formfactor.com Microscopes • 39
Revision 57, February, 2023 Probe Station Accessories
– Prevents involuntary mechanical contact between lens and
probes
– Stops all system motion a nd warns of unobserved contact
Specifications
• 3 optical paths
• 0.2 µm (0.008 mils) Z drive resolution
• 45.5 fps video fra me rates (1024 x 768)
• 0.5 - 20.0X zoom range
Kit Contents
• Integrated LED Illumination sy stem
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
Compatibility
• CM300xi
Requirements
• Velox probe station control software
• Velox 2.4 or later
181-121 — eVue IV Digital Imaging System, 10X, Remote
Focus, for Elite 300 (no focus block)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z drive can work in the same range as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHa t for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No internal maint enance required
• Intelligent collision detection system
– Protects the measurement setup
– Prevents involuntary mechanical contact between lens and
probes
– Stops all system motion and warns of unobserved contact
Specifications
• 2 optical paths
• 0.2 µm (0.008 mils) Z drive resolution
• 45.5 fps video f rame rates (1024 x 768)
• 0.5 - 5.0X zoom range
Kit Contents
• Integrated LED Illumination system
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
Compatibility
• Elite 300, T300
Requirements
• Velox Probe station control software
• Velox 2.4 or later
181-131 — eVue IV Digital Imaging System, 40X, Remote
Focus, for Elite 300 (no focus block)
Features
• Multi lens design
– Quick and easy probe tip navigation
– Maximizes field-of-view
– High magnification
• Longer focus range
– Z dr ive can work in the same r ange as the
chuck
– Shadow-free view of the corresponding
features
• Intelligent objective lens mount
– Automatically configure and optimize performance
– Easy lens exchange
• Advanced design
– cTUVus certified and CE
– Compatible with TopHat for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No i nternal maintenance r equired
• Intelligent collision detection system
– Protects the measurement setup
– Preven ts involuntary mechanical contact between lens and
probes
– Stops all system motion and warns of unobserved contact
Specifications
• 3 optical paths