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PN 141-400 www.formfactor.com Microscopes • 46 Revision 57, February, 2023 Probe Station A ccessories eV ue Pr o P ac ka ge Upg r ad e Kit 131 -9 64 — Pr o Pa ck ag e Upgr ade Kit f or eV ue gen er at io n I, II an d III…
PN 141-400 www.formfactor.com Microscopes • 45
Revision 57, February, 2023 Probe Station Accessories
– cTUVus certified and CE
– Compatible with TopHa t for perfect shielding
– Compatible with high-voltage measurements
• Extended lifetime
– 24/7 operating, increased MTBF
– No internal maint enance required
• Intelligent collision detection system
– Protects the measurement setup
– Prevents involuntary mechanical contact between lens and
probes
– Stops all system motion a nd warns of unobserved contact
Specifications
• 3 optical paths
• 4 mm fine focus Z drive range
• 0.2 µm (0.008 mils) Z drive resolution
• Auto focus
• Multi view with three screens
• 45.5 fps video fra me rates (1024 x 768)
• 13.1 fps video fra me rates (2048 x 1536)
• 0.5 - 20.0X zoom range
Kit Contents
• Integrated LED Illumination sy stem
• USB remote control box
• Digital video PC interface card
• Video processing software
• Probe station software integration module
• Windows 10 - High performance computer
• Latest Velox probe station control software
• 24 inch LCD monitor
• 2 inch Heavy duty focus block
Compatibility
• Manual probe stations a nd package/board test systems
Requirements
• Velox probe station control software
PN 141-400 www.formfactor.com Microscopes • 46
Revision 57, February, 2023 Probe Station Accessories
eVue Pro Package Upgrade Kit
131-964 — Pro Package Upgrade Kit for eVue generation
I, II and III
Upgrades the basic eVue (generation I, II and III) to include all the
features of the PRO features of the PRO.
Features
• High Performance Pro Pa ckage upgrade for eVue Digital Imaging
Systems
• Valid for basic 10X and 40X systems
Specifications
• Multi-Z (optical Z-contact system, autofocus)
• Multi-Cam (wafer-probe navigation, pi cture-in picture)
• Multi-View (hi-res video, probe card alignment, multi-needle views)
Kit Contents
• Pricing includes on-site installation
Compatibility
• eVue I, eVue II, eVue III
183-923 — Pro Package Upgrade Kit for eVue IV
Upgrades the basic eVue IV to include a ll the features of the PRO
features of the PRO.
Features
• High Performance Pro Pa ckage upgrade for eVue digital Imaging
Systems
• Valid for basic 10X and 40X systems
Specifications
• Multi-Z (optical Z-contact system, autofocus)
• Multi-Cam (wafer-probe navigation, pi cture-in picture)
• Multi-View (hi-res video, probe card alignment, multi-needle views)
Kit Contents
• Pricing includes on-site installation
Compatibility
• eVue IV
PN 141-400 www.formfactor.com Microscopes • 47
Revision 57, February, 2023 Probe Station Accessories
SlimVue
157-459 — SlimVue Microscope
Features
• Unique slim scope design for minimum
scope footprint
• Ergonomic design
• Rec ommended for mmW applications
• High resolution a nd robust optical d esign
• Easy op eration
• Maintenance free adjustable coaxial LED
illumination
• Focus block included
• Quick lens exchange mech anism
• Sup ports Mitutoyo MPlan Apo or compatible objective lenses (not
included)
Specifications
• Zoom ratio: 3.3x
• Zooming type: Manual rotation with detent
• 10x eyepiece magnification
• 100x-330x magnification with 10x objective lens
• Interpupillary Distance: 55mm~75mm
• Working Distance: Depends on u sed o bjective lens
• Image Formation: Erect Image
• Illumination: Built-in White LED
• Illumination type: Coaxial
• Compatible with Mitutoyo MPlan or similar objective lenses
• Trinocular ph oto tube with standard camera c-mount (switchable)
for up to 13 mm (0 .5 in) CCD cameras
• Optical path change-over: Manual Ty pe 100?0/0?100
• Focus unit range: ±25mm (1 in)(4mm [0.2 in]/100µm per turn o f
coarse/fine focus knob)
• Power adapter 100V-240 V AC 1.6 A with IEC 60320-1-C14
connector
• Approx 5.5 kg (12 lb)
Kit Contents
• SlimVue Microscope body
• 10x wide field eyepieces
• 50mm (2 in) heavy duty manual focus block
• 2 objective adapters (no objective lens)
• Power supply and light control unit
Compatibility
• MPS150, PM8, PM300, PA200, PA300, Summit 11000/12000,
PA200 BlueRay, SUMMIT200
Seiwa 888
VMSS-888L — Seiwa Microscope for IR Lasers with
Manual Focus and Accessory Kit
Features
• Seiwa PS-888L Series Super Scope for
355-1064nm laser cutters
• Cos t effective and robust optical design
• High resolution a t high magnification
• Eye piece viewing
• Selectable wavelength ra nges through
tube lens turret
• Coaxial illumination
Specifications
• Zoom 1X wavelength range 355-532 nm
• Zoom 1X wavelength range 532-1064 nm
• Zoom 2X wavelength range 486-656 nm (laser cannot b e used on
in this position)
• Brightfield Kohler illumination with field and aperture stop
• Color filter and polarizer/analyzer slots
• Weight: ~ 6.8 kg (15 lb)
• Dimensions (HxWxD): ~ 460 x 192 x 360 mm (18.1 x 7.5 x 14.2 in)
Kit Contents
• Microscope body with 1X-2X zoom
• 4 objective manual turret
• Eyepieces: 10X wide field
• Objectives: 2.5X, 10X, 2 0X long working distance
• IR/1064nm - Green/532nm compatible (M Plan APO)
• 2 in heavy duty manual focus bloc k
• F3000 LED light sour ce