141-400-57-probestationaccessoriescatalog - 第80页

PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 64 Revision 57, February, 2023 Probe Station A ccessories P osi tioner s a nd P ositioner Accessories DC P osi tion er s E N TR Y L EVEL DP P10 5-M…

PN 141-400 www.formfactor.com PA200 • 63

Revision 57, February, 2023 Probe Station Accessories

135080 — Ad aptation Integrating Sphere 4 in Manual

Features

• Integrating sphere holder for

PA200 BlueRay DS

• Manual sphere adjustment

• Mount for integrating sphere 10 2

mm (4 in) LabSphere (sphere not

part of this item)

• Other spheres can be adapted on request

• Cannot be combined with automatic loader

Specifications

• Move men t Range X/Y: 2 5 mm ( 1 in)

• Move men t Range Z: 10 mm (0.4 in)

Compatibility

• PA200 Bl ueRay

136687 — Measuring Instrument Shelf for BlueRay

Features

• Two planes for measurement

equipment

Specifications

• Dimensions (W x D): 350 x 380 mm

(13.8 x 15 in) each

• Max. load : 30 k g (66 lb)

Compatibility

• PA200 Bl ueRay, PA200 DS BlueRay

• Cannot be combined with shield enclosures

138390 — SE1000 to VIT700/701 Adapter

Features

• Connects the SE1000 to the

700 series pro be station tables

• By using the VIT701, vibrations

of the ShieldEnclosure are

isolated from the probe station

Compatibility

• PA200 Bl ueRay, PA200 DS

BlueRay

• Not compatible with BlueRay loader module

138651 — Pneumatic Switch Terminal

Features

• Terminal is moun ted to BlueRay platen

• Used for switching cal-site vacuum supply

Compatibility

• PA200 BlueRay (not compatible with the

BlueRay DS)

139985 — Adaptation Integrating Sphere 4 in Motorized

Features

• Integrating sphere holder for PA200

BlueRay DS

• Motorized/programmable sphere

adjustment

• Mount for integrating sphere 102 mm

(4 in) LabSphere (sphere not part of

this item)

• Other spheres can be adapted on request

• Can be combined with automatic loader

Specifications

• Movement range X/Y: 25 mm (1 in)

• Movement range Z: 25 mm (1 in)

Compatibility

• PA200 BlueRay

PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 64

Revision 57, February, 2023 Probe Station Accessories

Positioners and Positioner Accessories

DC Positioners

ENTRY LEVEL

DPP105-M/V-AI-S

Features

• Use d for basic IV probing

• Ideal for applications that require

more than eight positioners

• Use d with PTT DC probe n eedles

• Low cos t probing

• Extremely small footprint

• Probe-tip pressure adjustment

• Single a rm with gold-plated clamping included

• Suitable for probing pads down to 100 x 100 µm (3.9 x 3.9 mils)

Specifications

• Travel range:

– X: 8 mm (0.3 in)

– Y: 6 mm (0.2 in)

– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)

• Feature resolution:5 µm (0.2 mil s)

• Screw resolution:

– X: 3 50 µm (13.8 mils)/rev (70 TPI)

– Y: 500 µm (19.7 mils)/rev (50 TPI)

– Z: 70 µ m (2.8 mils)/rev (350 TPI)

• Base: magnetic or vacuum

• Footprint: 60 x 20 mm (2.4 x 0.8 in)

• The temperature of the cable containing arm must not exceed

200°C. Usually, this is suitable for a 30 0°C wafer temperature in an

open setup with an arm at least 10 mm above the wafer.

Compatibility

Ordering Information

DPP105-M/V-PTH

Features

• Used for basic IV probing

• Ideal for applications that require

more than eight positioners

• Used with PTT DC probe needles

• Low cost probing

• Extremely small f ootprint

• Probe-tip pressure adjustment

• Compatible with PTT needle holders

• Suitable for probing pa ds down to 100 x 100 µm (3.9 x 3.9 mils)

Specifications

• Travel range:

– X: 8 mm (0.3 in)

– Y: 6 mm (0.2 in)

– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)

• Feature resolution:5 µm (0.2 mils)

• Screw resolution:

– X: 3 50 µm (13.8 mils)/rev (70 TPI)

– Y: 500 µm (19.7 mils)/rev (50 TPI)

– Z: 70 µm (2.8 mils)/rev (350 TPI)

• Base: magnetic or vacuum

• Footprint: 60 x 20 mm (2.4 x 0.8 in)

Compatibility

Ordering Information

• DPP105-M-PTH

• DPP105-V-PTH

NOTE

Positioner movement ranges specified here may be further limited by specific application setups.

Open Platform Bundles

PM5

PM8

PM300

PA200

PA300

EPS150

MPS150

Standard

(z-axis: cw=d own, ccw=up)

Legacy

(z-axis: cw=up, ccw=down)

DPP105-M-AI-S 133346

DPP105-V-AI-S 100298

Open Platform +

PTH Arms

Summit 11000/12000

PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 65

Revision 57, February, 2023 Probe Station Accessories

STANDARD

DPP205-M/V-L/R; DPP205-M/V-L/R-S

Features

• Use d for IV/CV probing and failure analysis

• Use d with PTT and DCP high performance

DC probes

• Accurate X and Y placement and precise

probe over travel with easily adjusted knobs

• Adjustable probe arm mounting plate

• Optimized for FormFactor’s triaxial probing

accessories and MicroChamber

• With probe and triaxial accessories,

micropositioner configures to state-of-the-

art, guarded, low-noise triaxial probing in

minutes

• Captive stages with leadscrew design

• High precision cross-roller beari ngs

• Configured for use on left/right side of platen

Specifications

• Feature resolution: <2 μm (0.08 mils)

• Fine screw: 0.5 mm (0.02 in) pitch (50 TPI)

• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis con trol:

cw=down, ccw=up)

• Base: magnetic or vacuum

• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)

Compatibility

* Platforms + Dedicated Arms require the non-S versions of the

positioner.

** Open Platforms + DC Arms require the -S version of the positioner.

Ordering Information

DPP210-M/V-L/R; DPP210-M/V-L/R-S

Features

• Used for IV/CV p robing and failure analysis

• Used with PTT and DCP high p erformance

DC probes

• Accurate X and Y placement and precise

probe overtravel with easily adjusted knobs

• Adjustable probe arm mounting plate

• Optimized for FormFactor’s triaxial probing

accessories and MicroChamber

• With probe an d triaxial accessories,

micropositioner configures to s tate-of-the-

art, guarded, low-noise triaxial probing in

minutes

• Captive stages with leadscrew design

• High precision cross-roller bearings

• Configured for use on left/right hand side o f

platen

Specifications

• Feature resolution: <1 μm (0.04 mils)

• Fine screw: 0.25mm (0 .02 in) pitch (100

TPI)

• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:

cw=down, ccw=up)

• Base: magnetic or vacuum

• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)

Platforms +

Dedicated Arms*

Open Platforms +

DC Arms**

CM300xi

Elite 300

PA300MA

PM300PS

Summit 11000/12000

Tesla

SUMMIT200

TESLA200

Power

PM5

PM8

PM300

PA200

PA200 BlueRay

PA300

EPS150

MPS150

Standard

(z-axis: cw=d own, ccw=up)

Legacy

(z-axis: cw=up, ccw=down)

DPP205-M-L –

DPP205-V-R

DPP205-M-L-S

DPP205-M-R –

DPP205-V-L –

DPP205-V-R –

DPP205-M-L-S DPP205-M-L-S-I*

DPP205-M-R-S DPP205-M-R-S-I*

DPP205-V-L-S DPP205-V-L-S-I*

DPP205-V-R-S DPP205-V-R-S-I*

* Available by special request. Contact your FormFactor

representative.

NOTE: Legacy PH120-complete (107870) replaced by

DPP205-V-L/R-S with 100561 coax arm

Standard

(z-axis: cw=down, ccw=up)

Legacy

(z-axis: cw=u p, ccw=down)

DPP210, magnetic

base, right-hand x-

axis c ontrol

DPP210, vacuum

base, left-hand x-

axis c ontrol