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PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 65 Revision 57, February, 2023 Probe Station A ccessories S T AND ARD DP P20 5-M /V -L/R; DPP2 05- M/V -L/ R- S Feat ur es • Use d for IV/CV pr obi…

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PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 64
Revision 57, February, 2023 Probe Station Accessories
Positioners and Positioner Accessories
DC Positioners
ENTRY LEVEL
DPP105-M/V-AI-S
Features
• Use d for basic IV probing
• Ideal for applications that require
more than eight positioners
• Use d with PTT DC probe n eedles
• Low cos t probing
• Extremely small footprint
• Probe-tip pressure adjustment
• Single a rm with gold-plated clamping included
• Suitable for probing pads down to 100 x 100 µm (3.9 x 3.9 mils)
Specifications
• Travel range:
– X: 8 mm (0.3 in)
– Y: 6 mm (0.2 in)
– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)
• Feature resolution:5 µm (0.2 mil s)
• Screw resolution:
– X: 3 50 µm (13.8 mils)/rev (70 TPI)
– Y: 500 µm (19.7 mils)/rev (50 TPI)
– Z: 70 µ m (2.8 mils)/rev (350 TPI)
• Base: magnetic or vacuum
• Footprint: 60 x 20 mm (2.4 x 0.8 in)
• The temperature of the cable containing arm must not exceed
200°C. Usually, this is suitable for a 30 0°C wafer temperature in an
open setup with an arm at least 10 mm above the wafer.
Compatibility
Ordering Information
DPP105-M/V-PTH
Features
• Used for basic IV probing
• Ideal for applications that require
more than eight positioners
• Used with PTT DC probe needles
• Low cost probing
• Extremely small f ootprint
• Probe-tip pressure adjustment
• Compatible with PTT needle holders
• Suitable for probing pa ds down to 100 x 100 µm (3.9 x 3.9 mils)
Specifications
• Travel range:
– X: 8 mm (0.3 in)
– Y: 6 mm (0.2 in)
– Z: 25 mm (1 in) (z-axis control: cw=down, ccw=up)
• Feature resolution:5 µm (0.2 mils)
• Screw resolution:
– X: 3 50 µm (13.8 mils)/rev (70 TPI)
– Y: 500 µm (19.7 mils)/rev (50 TPI)
– Z: 70 µm (2.8 mils)/rev (350 TPI)
• Base: magnetic or vacuum
• Footprint: 60 x 20 mm (2.4 x 0.8 in)
Compatibility
Ordering Information
• DPP105-M-PTH
• DPP105-V-PTH
NOTE
Positioner movement ranges specified here may be further limited by specific application setups.
i
Open Platform Bundles
PM5
PM8
PM300
PA200
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP105-M-AI-S 133346
DPP105-V-AI-S 100298
Open Platform +
PTH Arms
Summit 11000/12000
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 65
Revision 57, February, 2023 Probe Station Accessories
STANDARD
DPP205-M/V-L/R; DPP205-M/V-L/R-S
Features
• Use d for IV/CV probing and failure analysis
• Use d with PTT and DCP high performance
DC probes
• Accurate X and Y placement and precise
probe over travel with easily adjusted knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller beari ngs
• Configured for use on left/right side of platen
Specifications
• Feature resolution: <2 μm (0.08 mils)
• Fine screw: 0.5 mm (0.02 in) pitch (50 TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis con trol:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Compatibility
* Platforms + Dedicated Arms require the non-S versions of the
positioner.
** Open Platforms + DC Arms require the -S version of the positioner.
Ordering Information
DPP210-M/V-L/R; DPP210-M/V-L/R-S
Features
• Used for IV/CV p robing and failure analysis
• Used with PTT and DCP high p erformance
DC probes
• Accurate X and Y placement and precise
probe overtravel with easily adjusted knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe an d triaxial accessories,
micropositioner configures to s tate-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side o f
platen
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Fine screw: 0.25mm (0 .02 in) pitch (100
TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Platforms +
Dedicated Arms*
Open Platforms +
DC Arms**
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP205-M-L –
DPP205-V-R
DPP205-M-L-S
DPP205-M-R –
DPP205-V-L –
DPP205-V-R –
DPP205-M-L-S DPP205-M-L-S-I*
DPP205-M-R-S DPP205-M-R-S-I*
DPP205-V-L-S DPP205-V-L-S-I*
DPP205-V-R-S DPP205-V-R-S-I*
* Available by special request. Contact your FormFactor
representative.
NOTE: Legacy PH120-complete (107870) replaced by
DPP205-V-L/R-S with 100561 coax arm
Standard
(z-axis: cw=down, ccw=up)
Legacy
(z-axis: cw=u p, ccw=down)
DPP210, magnetic
base, right-hand x-
axis c ontrol
DPP210, vacuum
base, left-hand x-
axis c ontrol
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 66
Revision 57, February, 2023 Probe Station Accessories
Compatibility
* Platforms + Dedicated Arms require the non-S versions of the
positioner.
** Open Platforms + DC Arms require the -S version of the positioner.
Ordering Information
DPP220-M/V-L/R; DPP220-M/V-L/R-S
Features
• Use d for IV/CV probing and failure analysis
• Use d with PTT and DCP high performance
DC probes
• Accurate X and Y placement and precise
probe over travel with easily adjusted
knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side o f platen
Specifications
• Feature resolution: 0.5 µm (0.02 mils)
• Fine screw: 0.125 mm (0.005 in) p itch (200 TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Compatibility
Ordering Information
Platforms +
Dedicated Arms*
Open Platforms +
DC Arms**
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=u p, ccw=down)
DPP210-M-L –
DPP210-M-R –
DPP210-V-L –
DPP210-V-R –
DPP210-M-L-S DPP210-V-L-S-I*
DPP210-M-R-S DPP210-V-R-S-I*
DPP210-V-L-S DPP210-M-L-S-I*
DPP210-V-R-S DPP210-M-R-S-I*
* Available by special request. Contact your FormFactor
representative.
DPP220, magnetic
base, left-hand x-axis
control
DPP220, vacuum
base, right-hand x-axis
control
Platforms +
Dedicated Arms
Open Platforms +
DC Arms
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
• DPP220-M-L
• DPP220-M-R
• DPP220-V-L
• DPP220-V-R
• DPP220-M-L-S
• DPP220-M-R-S
• DPP220-V-L-S
• DPP220-V-R-S