141-400-57-probestationaccessoriescatalog - 第82页

PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 66 Revision 57, February, 2023 Probe Station A ccessories Compa tibil ity * Platfor ms + Dedi cated Ar ms requ ir e the no n-S ver sions of th e po…

100%1 / 169
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 65
Revision 57, February, 2023 Probe Station Accessories
STANDARD
DPP205-M/V-L/R; DPP205-M/V-L/R-S
Features
• Use d for IV/CV probing and failure analysis
• Use d with PTT and DCP high performance
DC probes
• Accurate X and Y placement and precise
probe over travel with easily adjusted knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller beari ngs
• Configured for use on left/right side of platen
Specifications
• Feature resolution: <2 μm (0.08 mils)
• Fine screw: 0.5 mm (0.02 in) pitch (50 TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis con trol:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Compatibility
* Platforms + Dedicated Arms require the non-S versions of the
positioner.
** Open Platforms + DC Arms require the -S version of the positioner.
Ordering Information
DPP210-M/V-L/R; DPP210-M/V-L/R-S
Features
• Used for IV/CV p robing and failure analysis
• Used with PTT and DCP high p erformance
DC probes
• Accurate X and Y placement and precise
probe overtravel with easily adjusted knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe an d triaxial accessories,
micropositioner configures to s tate-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side o f
platen
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Fine screw: 0.25mm (0 .02 in) pitch (100
TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Platforms +
Dedicated Arms*
Open Platforms +
DC Arms**
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP205-M-L –
DPP205-V-R
DPP205-M-L-S
DPP205-M-R –
DPP205-V-L –
DPP205-V-R –
DPP205-M-L-S DPP205-M-L-S-I*
DPP205-M-R-S DPP205-M-R-S-I*
DPP205-V-L-S DPP205-V-L-S-I*
DPP205-V-R-S DPP205-V-R-S-I*
* Available by special request. Contact your FormFactor
representative.
NOTE: Legacy PH120-complete (107870) replaced by
DPP205-V-L/R-S with 100561 coax arm
Standard
(z-axis: cw=down, ccw=up)
Legacy
(z-axis: cw=u p, ccw=down)
DPP210, magnetic
base, right-hand x-
axis c ontrol
DPP210, vacuum
base, left-hand x-
axis c ontrol
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 66
Revision 57, February, 2023 Probe Station Accessories
Compatibility
* Platforms + Dedicated Arms require the non-S versions of the
positioner.
** Open Platforms + DC Arms require the -S version of the positioner.
Ordering Information
DPP220-M/V-L/R; DPP220-M/V-L/R-S
Features
• Use d for IV/CV probing and failure analysis
• Use d with PTT and DCP high performance
DC probes
• Accurate X and Y placement and precise
probe over travel with easily adjusted
knobs
• Adjustable probe arm mounting plate
• Optimized for FormFactor’s triaxial probing
accessories and MicroChamber
• With probe and triaxial accessories,
micropositioner configures to state-of-the-
art, guarded, low-noise triaxial probing in
minutes
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side o f platen
Specifications
• Feature resolution: 0.5 µm (0.02 mils)
• Fine screw: 0.125 mm (0.005 in) p itch (200 TPI)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Base: magnetic or vacuum
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Compatibility
Ordering Information
Platforms +
Dedicated Arms*
Open Platforms +
DC Arms**
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=u p, ccw=down)
DPP210-M-L –
DPP210-M-R –
DPP210-V-L –
DPP210-V-R –
DPP210-M-L-S DPP210-V-L-S-I*
DPP210-M-R-S DPP210-V-R-S-I*
DPP210-V-L-S DPP210-M-L-S-I*
DPP210-V-R-S DPP210-M-R-S-I*
* Available by special request. Contact your FormFactor
representative.
DPP220, magnetic
base, left-hand x-axis
control
DPP220, vacuum
base, right-hand x-axis
control
Platforms +
Dedicated Arms
Open Platforms +
DC Arms
CM300xi
Elite 300
PA300MA
PM300PS
Summit 11000/12000
Tesla
SUMMIT200
TESLA200
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
• DPP220-M-L
• DPP220-M-R
• DPP220-V-L
• DPP220-V-R
• DPP220-M-L-S
• DPP220-M-R-S
• DPP220-V-L-S
• DPP220-V-R-S
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 67
Revision 57, February, 2023 Probe Station Accessories
High-End Failure Analysis (FA) Positioners
DPP305-M/V-S; DPP305-M/V-PTH
Features
• Use d for high-precision and
high-resolution probing, high-
performance IV/CV probing and
failure analysis, a nd internal
node probing
• Use d with PTT and DCP high
performance DC probes
• Precision ball bearings
Specifications
• Feature resolution: 0.5 μm
(0.02 mils)
• Travel range:
– X/Y: 10 mm (0.4 in)
– Z: 8 mm (0.3 in) (z-axis
control: cw=do wn, ccw=up)
• Z coarse ad justment range: 15
mm (0.6 in)
• Micrometer screws: 500 µm
(19.7 mils) pi tch (50 TPI)
• Footprint (WxD): 75 x 50 mm (3 x 2 in)
• Base: magnetic or vacuum
Compatibility
* Open Platforms + DC Arms require the -S version of the positioner.
** Platforms + Dedicated Arms require th e non-S versions of the
positioner.
Ordering Information
DPP310-M/V-S; DPP310-M/V-PTH
Features
• Used for high-precision and high-
resolution probing, high-
performance IV/CV probing and
failure analysis, and internal no de
probing
• Used with PTT and DCP high
performance DC probes
• Precision ball bearings
Specifications
• Feature resolution: 0.5 μm (0.02 mils)
• Travel range:
– X/Y: 10 mm (0.4 in)
– Z: 8 mm (0.3 in) (z-axis control: cw=down, ccw=up)
• Z coarse adjustment ran ge: 15 mm (0.6 in)
• Micrometer screws: 250 µm (9.8 mils) pitch (100 TPI)
• Footprint (WxD): 75 x 50 mm (3 x 2 in)
• Base: magnetic or vacuum
Compatibility
* Open Platforms + DC Arms require the -S version of the positioner.
** Platforms + Dedicated Arms require the non-S versions of the
positioner.
Ordering Information
Platforms + PTH
Arms
Open Platforms +
DC Arms*
Platforms +
Dedicated Arms**
CM300xi
Elite 300
PA300MA
Summit 11000/12000
SUMMIT200
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
CM300xi
PA300MA
PM300PS
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP305-M-S 900286+130364
DPP305-V-S 900286+100508
DPP305-M-PTH –
DPP305 compatible
with PTH arms
DPP305 compatible with DC
arms, and dedicated arms
DPP305-V-PTH –
Platforms + PTH
Arms
Open Platforms +
DC Arms*
Platforms +
Dedicated Arms**
CM300xi
Elite 300
PA300MA
Summit 11000/12000
Tesla
Power
PM5
PM8
PM300
PA200
PA200 BlueRay
PA300
EPS150
MPS150
CM300xi
PA300MA
PM300PS
Standard
(z-axis: cw=down, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
DPP310-M-S 900315+130364
DPP310-V-S 900315+100508
DPP310-M-PTH –
DPP310-V-PTH –