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PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 70 Revision 57, February, 2023 Probe Station A ccessories • RPP210 -V -L-AI • RPP210 -V -R-AI • RPP210 -B-L-AI • RPP210 -B-R-AI RPP 210 - B-SP -A I…

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PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 69
Revision 57, February, 2023 Probe Station Accessories
RF Positioners
STANDARD
RPP210-M/V-L/R-S
Features
• RF and multi-contact/mixed-signal probing
and wafer-level reliability probing
• Use d with Infinity / ACP / |Z| Probe high
performance RF probes
• 3 linear axes with precision ball bearings
• Ena bles use of HF probes or probe wedges
• Magnetic mount on HF platen or alternative
with v acuum mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Compatibility
Ordering Information
* Available by special request. Contact your FormFactor
representative.
RPP210-M/V/B-L/R-AI
Features
• RF and multi-contact/mixed-signal
probing and wafer-level reliability
probing
• Used with Infinity / ACP / |Z| Probe
high performance RF probes
• Rigid probe platform yields repea table
measurements at microwave
frequencies
• Economical conversion for probe stations originally configured for
needle probing
• Accurate X and Y placement and precise probe overtravel with
easily adjusted knobs
• Micrometer set planarity adjustment
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Configured for use on left/right hand side o f platen
• Can be ordered with either:
– Switch type magnetic base with residual holding force
– Vacuum base
– Bolt-down base
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity adjust: ±5°
• Mount: vacuum or magn etic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Configurations
• Use on platen left location as West positioner
• Use on platen front location as South positioner
• Use on platen right location as East pos itio ner
• Use on platen rear location as North positioner
Compatibility
• Summit 11000/12000
Ordering Information
• RPP210-M-L-AI
• RPP210-M-R-AI
Platforms + RF Arms
PM5
PM8
PM300
PM300PS
PA200
PA200 BlueRay
PA300
PA300-MA
EPS150
MPS150
Standard
(z-axis: cw=d own, ccw=up)
Legacy
(z-axis: cw=up, ccw=down)
RPP210-M-L-S RPP210-M-L-S-I*
RPP210-M-R-S RPP210-M-R-S-I*
RPP210-V-L-S RPP210-V-L-S-I*
RPP210-V-R-S RPP210-V-R-S-I*
RPP210-B-L-S –
RPP210-B-R-S –
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 70
Revision 57, February, 2023 Probe Station Accessories
• RPP210-V-L-AI
• RPP210-V-R-AI
• RPP210-B-L-AI
• RPP210-B-R-AI
RPP210-B-SP-AI
Features
• RF and multi-contact/mixed-
signal probing and wafer-level
reliability probing
• Use d with Infinity / ACP / |Z|
Probe high performance RF
probes
• Rigid probe platform yields repeatable measurements at
microwave frequencies
• Economical conversion for probe stations originally configured for
needle probing
• Use with mmWave positioners for 4-port applications
• Accurate X and Y placement and precise probe over travel with
easily adjusted knobs
• Micrometer set planarity ad justment
• Optimized for FormFactor’s MicroChamber
• Captive stages with leadscrew design
• High precision cross-roller beari ngs
• Bolt-down base
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y an d Z (z-axis control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Configurations
• Use on platen in South position only
Compatibility
• Summit 11000/12000
RPP210-B-NP-AI
Features
• RF and multi-contact/mixed-
signal probing and wafer-level
reliability probing
• Used with Infinity / ACP / |Z|
Probe high performance RF
probes
• Rigid probe platform yiel ds
repeatable measurements at micr owave frequencies
• Economical conversion for probe stations originally configured for
needle probing
• Use with mmWave positioners for 4-port applications
• Accurate X and Y placement and precise probe over tr avel with
easily adjusted knobs
• Micrometer set planarity adjustment
• Optimized for FormFactor’s MicroChamber
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Bolt-down base
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity adjust: ±5°
• Mount: vacuum or magn etic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Configurations
• Use on platen in North position only
Compatibility
• Summit 11000/12000
RPP210-L/R-EW-CMC-AI — RF Probe Positioner Left/
Right Magnetic East-West
Features
• RF and multi-contact/mixed-signal
probing and wafer-level reliability
probing
• Used with Infinity / ACP / |Z| Probe high
performance RF probes
• 3 linear axes with precision ball
bearings
• Used to adapt HF probes or probe wedges
Specifications
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 71
Revision 57, February, 2023 Probe Station Accessories
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
RPP210-L/R-NS-CMC-AI — RF Probe Positioner Left/
Right Magnetic North-South
Features
• RF and multi-contact/mixed-signal
probing and wafe r-level reliability
probing
• Use d with Infinity / ACP / |Z| Probe
high performance RF probes
• 3 linear axes with precision ball
bearings
• For adaptation of HF probes or
probe wedge s
• Magnetic fixation on HF platen or alternative with vac uum
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
ADVANCED
RPP304-EW/NS/W-SU-AI
Features
• Precision 4-axis probe
positioner for RF/
microwave probes
• Optimized for Summit
11000/12000-B station
platform
• Rigid design for best
probe placement
• New 1-click positioner quick release co ntrol allows fast setup and
effortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12mm (0.47 in) (z-axis control: cw=down, ccw=up)
• Micrometer screws: 1000 µm (3.9 mils) pitch (25 TPI)
• Micrometer set planarity adjust: ±5°
• Gross X travel:
– 26 mm (1 in) with TopHat
– 68 mm (2.7 in) with no TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6 in)
– Without MicroChamber TopHat: 9 3 mm (3.7 in)
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom location as North/South positioners
(4-port)
Compatibility
• Summit 11000/12000, T200
Ordering Information
• RPP304-NS-SU-AI
• RPP304-EW-SU-AI