141-400-57-probestationaccessoriescatalog - 第87页
PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 71 Revision 57, February, 2023 Probe Station A ccessories • Fea ture resolution: <1 μ m ( 0.04 mils) • Travel range: 12.5 mm (0.5 in) in X, Y an…
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 70
Revision 57, February, 2023 Probe Station Accessories
• RPP210-V-L-AI
• RPP210-V-R-AI
• RPP210-B-L-AI
• RPP210-B-R-AI
RPP210-B-SP-AI
Features
• RF and multi-contact/mixed-
signal probing and wafer-level
reliability probing
• Use d with Infinity / ACP / |Z|
Probe high performance RF
probes
• Rigid probe platform yields repeatable measurements at
microwave frequencies
• Economical conversion for probe stations originally configured for
needle probing
• Use with mmWave positioners for 4-port applications
• Accurate X and Y placement and precise probe over travel with
easily adjusted knobs
• Micrometer set planarity ad justment
• Optimized for FormFactor’s MicroChamber
• Captive stages with leadscrew design
• High precision cross-roller beari ngs
• Bolt-down base
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y an d Z (z-axis control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Configurations
• Use on platen in South position only
Compatibility
• Summit 11000/12000
RPP210-B-NP-AI
Features
• RF and multi-contact/mixed-
signal probing and wafer-level
reliability probing
• Used with Infinity / ACP / |Z|
Probe high performance RF
probes
• Rigid probe platform yiel ds
repeatable measurements at micr owave frequencies
• Economical conversion for probe stations originally configured for
needle probing
• Use with mmWave positioners for 4-port applications
• Accurate X and Y placement and precise probe over tr avel with
easily adjusted knobs
• Micrometer set planarity adjustment
• Optimized for FormFactor’s MicroChamber
• Captive stages with leadscrew design
• High precision cross-roller bearings
• Bolt-down base
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-axis control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity adjust: ±5°
• Mount: vacuum or magn etic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
Configurations
• Use on platen in North position only
Compatibility
• Summit 11000/12000
RPP210-L/R-EW-CMC-AI — RF Probe Positioner Left/
Right Magnetic East-West
Features
• RF and multi-contact/mixed-signal
probing and wafer-level reliability
probing
• Used with Infinity / ACP / |Z| Probe high
performance RF probes
• 3 linear axes with precision ball
bearings
• Used to adapt HF probes or probe wedges
Specifications
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 71
Revision 57, February, 2023 Probe Station Accessories
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
RPP210-L/R-NS-CMC-AI — RF Probe Positioner Left/
Right Magnetic North-South
Features
• RF and multi-contact/mixed-signal
probing and wafe r-level reliability
probing
• Use d with Infinity / ACP / |Z| Probe
high performance RF probes
• 3 linear axes with precision ball
bearings
• For adaptation of HF probes or
probe wedge s
• Magnetic fixation on HF platen or alternative with vac uum
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
ADVANCED
RPP304-EW/NS/W-SU-AI
Features
• Precision 4-axis probe
positioner for RF/
microwave probes
• Optimized for Summit
11000/12000-B station
platform
• Rigid design for best
probe placement
• New 1-click positioner quick release co ntrol allows fast setup and
effortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12mm (0.47 in) (z-axis control: cw=down, ccw=up)
• Micrometer screws: 1000 µm (3.9 mils) pitch (25 TPI)
• Micrometer set planarity adjust: ±5°
• Gross X travel:
– 26 mm (1 in) with TopHat
– 68 mm (2.7 in) with no TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6 in)
– Without MicroChamber TopHat: 9 3 mm (3.7 in)
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom location as North/South positioners
(4-port)
Compatibility
• Summit 11000/12000, T200
Ordering Information
• RPP304-NS-SU-AI
• RPP304-EW-SU-AI
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 72
Revision 57, February, 2023 Probe Station Accessories
• RPP304-W-SU-AI
RPP304-EW/NS-EL-AI
Features
• Precision 4-axis probe
positioner for RF/microwave
probes
• Optimized for Elite
MicroChamber platform
• Rigid design for optimal probe
placement
• One-click positioner qu ick
release control enables fast setup and effortless gross positioning
of RF probes
• Smooth glide micrometer controls enable accurate probe
placement
• Multi position RF cable clamp and offset probe mounting arm
optimize RF cable connection
• Micrometer set planarity ad justment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12 mm (0.47 in) (z-axis contr ol: cw=down, ccw=up)
• Micrometer screws: 1000 μm ( 39.4 mils) pitch (25 TPI)
• Micrometer set planarity ad just: ±5°
• Gross X travel: 26 mm ( 1 in) with TopHat; 68 mm (2.7 in) with no
TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6 in)
– Without MicroChamber TopHat: 93 mm (3.7 i n)
• Probe mount interface: 3 hole FormFactor standard d esign, with
locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom loca tion as North/South positioners (4-
port)
Compatibility
• Elite300
Ordering Information
• RPP304-NS-EL-AI
• RPP304-EW-EL-AI
• RPP304-W-EL-AI
RPP304-EW/NS/W-67 — Positioner (North/South)
Features
• Enables probes in north/south
position
• Supplied with Chamber/EMI
seal
Specifications
• Compatible with 67 GHz and
lower RF probes, or DCQ
probes
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12 mm (0.47 in) (z-axis control: cw=down, ccw=up)
• Micrometer screws: 1000 μm (39.4 mils) pitch (25 TPI)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Compatibility
• CM300xi, SUMMIT200, TESLA200, Elite300
Ordering Information
• RPP304-EW-67
• RPP304-W-67
• RPP304-NS-67
RPP305-EW/NS-EL/SU-AI
Features
• Used for high-performance
RF, m ulti-contact/mixed signal
probing, high-performance
wafer-level reliability probing,
and single-ended broadband/
mm-Wave, THz, source/load-
pull, RF noise probing
• Used with Infinity / ACP / |Z| Probe / T-Wave high performance RF
probes
• Precision 4 axis pr obe positioner for RF/microwave probes
• Optimized for Elite 300 /Summit 12000-B station platform
• Ultra rigid design for best probe placement
• New one-click positioner quick release control allows fast setup
and e ffortless gross positioning of RF probes
• Smooth glide micrometer controls enable accurate probe
placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection