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PN 141-400 www.formfactor.com Positioners and Posit ioner Accesso ries • 72 Revision 57, February, 2023 Probe Station A ccessories • RPP304 -W- SU-AI RPP 304 - EW/ NS -EL -A I Feat ur es • Pr ecision 4-axis probe positio…

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PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 71
Revision 57, February, 2023 Probe Station Accessories
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
RPP210-L/R-NS-CMC-AI — RF Probe Positioner Left/
Right Magnetic North-South
Features
• RF and multi-contact/mixed-signal
probing and wafe r-level reliability
probing
• Use d with Infinity / ACP / |Z| Probe
high performance RF probes
• 3 linear axes with precision ball
bearings
• For adaptation of HF probes or
probe wedge s
• Magnetic fixation on HF platen or alternative with vac uum
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range: 12.5 mm (0.5 in) in X, Y and Z (z-ax is control:
cw=down, ccw=up)
• Fine screws: 0.25 mm (0.01 in) pitch (100 TPI)
• Micrometer set planarity ad just: ±5°
• Mount: vacuum or magnetic
• Footprint (WxD): 90 x 60 mm (3.5 x 2.4 in)
• Positions the probe at the right side of DUT
• Horizontal probe mounting plate can be leveled
• East-West orientation
• Use d with HF platen and MicroAlign
Compatibility
• CM300xi with top chambers
ADVANCED
RPP304-EW/NS/W-SU-AI
Features
• Precision 4-axis probe
positioner for RF/
microwave probes
• Optimized for Summit
11000/12000-B station
platform
• Rigid design for best
probe placement
• New 1-click positioner quick release co ntrol allows fast setup and
effortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12mm (0.47 in) (z-axis control: cw=down, ccw=up)
• Micrometer screws: 1000 µm (3.9 mils) pitch (25 TPI)
• Micrometer set planarity adjust: ±5°
• Gross X travel:
– 26 mm (1 in) with TopHat
– 68 mm (2.7 in) with no TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6 in)
– Without MicroChamber TopHat: 9 3 mm (3.7 in)
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom location as North/South positioners
(4-port)
Compatibility
• Summit 11000/12000, T200
Ordering Information
• RPP304-NS-SU-AI
• RPP304-EW-SU-AI
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 72
Revision 57, February, 2023 Probe Station Accessories
• RPP304-W-SU-AI
RPP304-EW/NS-EL-AI
Features
• Precision 4-axis probe
positioner for RF/microwave
probes
• Optimized for Elite
MicroChamber platform
• Rigid design for optimal probe
placement
• One-click positioner qu ick
release control enables fast setup and effortless gross positioning
of RF probes
• Smooth glide micrometer controls enable accurate probe
placement
• Multi position RF cable clamp and offset probe mounting arm
optimize RF cable connection
• Micrometer set planarity ad justment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12 mm (0.47 in) (z-axis contr ol: cw=down, ccw=up)
• Micrometer screws: 1000 μm ( 39.4 mils) pitch (25 TPI)
• Micrometer set planarity ad just: ±5°
• Gross X travel: 26 mm ( 1 in) with TopHat; 68 mm (2.7 in) with no
TopHat/insert
• 2-port probe tip separation
– With MicroChamber TopHat: 40 mm (1.6 in)
– Without MicroChamber TopHat: 93 mm (3.7 i n)
• Probe mount interface: 3 hole FormFactor standard d esign, with
locating pin
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom loca tion as North/South positioners (4-
port)
Compatibility
• Elite300
Ordering Information
• RPP304-NS-EL-AI
• RPP304-EW-EL-AI
• RPP304-W-EL-AI
RPP304-EW/NS/W-67 — Positioner (North/South)
Features
• Enables probes in north/south
position
• Supplied with Chamber/EMI
seal
Specifications
• Compatible with 67 GHz and
lower RF probes, or DCQ
probes
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 12 mm (0.47 in)
– Z: 12 mm (0.47 in) (z-axis control: cw=down, ccw=up)
• Micrometer screws: 1000 μm (39.4 mils) pitch (25 TPI)
• Micrometer set planarity adjust: ±5°
• Probe mount interface: 3 hole FormFactor standard design, with
locating pin
Compatibility
• CM300xi, SUMMIT200, TESLA200, Elite300
Ordering Information
• RPP304-EW-67
• RPP304-W-67
• RPP304-NS-67
RPP305-EW/NS-EL/SU-AI
Features
• Used for high-performance
RF, m ulti-contact/mixed signal
probing, high-performance
wafer-level reliability probing,
and single-ended broadband/
mm-Wave, THz, source/load-
pull, RF noise probing
• Used with Infinity / ACP / |Z| Probe / T-Wave high performance RF
probes
• Precision 4 axis pr obe positioner for RF/microwave probes
• Optimized for Elite 300 /Summit 12000-B station platform
• Ultra rigid design for best probe placement
• New one-click positioner quick release control allows fast setup
and e ffortless gross positioning of RF probes
• Smooth glide micrometer controls enable accurate probe
placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
PN 141-400 www.formfactor.com Positioners and Positioner Accessories • 73
Revision 57, February, 2023 Probe Station Accessories
• Micrometer set planarity ad justment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 25 mm (1 in),
– Z: 10 mm (0.4 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity ad just: ±5°
• Micrometer screws: 500μm pitch (50 TPI)
• 2-port probe tip separation
– With TopHat: 40 mm (1.6 in)
– Without TopHat: 93 mm (3.7 in)
• Mount: bolt-down
• Footprint (W x D): 1 24 x 124 mm (4.9 x 4.9 in)
Configurations
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom loca tion as North/South positioners
(4-port)
Compatibility
Ordering Information
RPP305-EW/NS-CM-AI
Features
• Use d for high-performance
RF, multi-contact/mixed signal
probing, high-performance
wafer-level reliability probing,
and single-ended broadband/
mm-Wave, THz, s ource/load-
pull, RF noise probing
• Use d with Infinity / ACP / |Z|
Probe / T-Wave high
performance RF probes
• Precision 4 axis probe positioner for RF/microwave probes
• Optimized for CM300xi station platform
• Ultra rigid design for best probe placement
• New one-click positioner quick release control enables fast setup
and e ffortless gross positioning of RF probes
• Smooth glide micrometer controls for accurate probe placement
• Best probe-to-probe separation
• Multi position RF cable clamp and offset probe mounting arm for
optimized RF cable connection
• Micrometer set planarity adjustment
• EMI grounding strap
• Industry standard RF probe mount
Specifications
• Feature resolution: <1 μm (0.04 mils)
• Travel range:
– X/Y: 25 mm (1 in),
– Z: 10 mm (0.4 in) (z-axis control: cw=down, ccw=up)
• Micrometer set planarity adjust: ±5°
• Micrometer screws: 500μm pitch (50 TPI)
• 2-port probe tip separation
– With TopHat: 40 mm (1.6 in)
– Without TopHat: 93 mm (3.7 in)
• Mount: bolt-down
• Footprint (W x D): 124 x 124 mm (4 .9 x 4.9 in)
• Use on platen right/left location as East/West positioner (4-port)
• Use on platen top/bottom location as North/South positioners
(4-port)
Compatibility
• CM300xi with Top Ha t, Elite 300
Ordering Information:
• RPP305-EW-CM-AI
• RPP305-NS-CM-AI
RPP305-EW/NS-CMC-AI — High Performance RF Probe
Positio ner 50 TPI Bolt Down East-West or North-South
Features
• Used for high-
performance RF, multi-
contact/mixed signal
probing, high-
performance wafer-
level reliability probing,
and single-ended
broadband/ mm-
Wave, THz, source/load-pull, RF noise probing
• Used with Infinity / ACP / |Z| Probe / T-Wave high performance RF
probes
• Precision 4 axis pr obe positioner for RF/microwave probes
• Optimized for CM300xi station platform
• Ultra rigid design for best probe placement
Open Platforms +
EL Arms
Open Platforms +
SU Arms
Elite 300 Summit 12000
Tesla200
Elite 300 Summit 12000
RPP305-NS-EL-AI
RPP305-EW-EL-AI
RPP305-NS-SU-AI
RPP305-EW-SU-AI
East-West