2OM-1150-001_w.pdf - 第150页

异常异常

异常

IDID

ID

ITEM(ITEM(

ITEM(

项目项目

项目

))

)

内容内容

内容

03050000305000

0305000

Table-Table-

Table-

θθ

θ

Driver Driver

Driver

Driver alarm signal was detected.Driver alarm signal was detected.

Driver alarm signal was detected.

(台θServo) (Servo Alarm信号检出。)

03060000306000

0306000

Table-Table-

Table-

θθ

θ

Driver Driver

Driver

Driver Emergency Stop InputDriver Emergency Stop Input

Driver Emergency Stop Input

(台θServo) ( 驱动的紧急停机输入)

03070000307000

0307000

Table-Table-

Table-

θθ

θ

Driver Driver

Driver

Variation counter over flowVariation counter over flow

Variation counter over flow

(台θServo) (偏差Counter的Overflow)

03080000308000

0308000

Table-Table-

Table-

θθ

θ

Driver Driver

Driver

Driver Over-HeatDriver Over-Heat

Driver Over-Heat

(台θServo) (驱动过热)

03090000309000

0309000

Table-Table-

Table-

θθ

θ

Driver Driver

Driver

Operatuon was incompleted, within specified time.Operatuon was incompleted, within specified time.

Operatuon was incompleted, within specified time.

(台θServo) ( 动作没有在规定时间内结束。)

03100000310000

0310000

Table-Table-

Table-

θθ

θ

Interlock Interlock

Interlock

Table-Z Axis is not at transfer height.Table-Z Axis is not at transfer height.

Table-Z Axis is not at transfer height.

(台θInterlock) (台Z 轴不在搬送高度。)

03110000311000

0311000

Table-Table-

Table-

θθ

θ

Interlock Interlock

Interlock

Table-X Axis interlock signal is OFF.Table-X Axis interlock signal is OFF.

Table-X Axis interlock signal is OFF.

(台θInterlock) (台X轴的Interlock信号off。)

03120000312000

0312000

Table-Table-

Table-

θθ

θ

Interlock Interlock

Interlock

P.C.B.stopper was down.P.C.B.stopper was down.

P.C.B.stopper was down.

(台θInterlock) (基板Stopper正在下降。)

03130000313000

0313000

Table-Table-

Table-

θθ

θ

Interlock Interlock

Interlock

Table-Z Axis is not at safety area.Table-Z Axis is not at safety area.

Table-Z Axis is not at safety area.

(台θInterlock) (台Z轴不在Saftey Area。)

03140000314000

0314000

Table-Table-

Table-

θθ

θ

Interlock Interlock

Interlock

P.C.B.warpage protection was down.P.C.B.warpage protection was down.

P.C.B.warpage protection was down.

(台θInterlock) (基板Warpage Protection正在下降。)

03150000315000

0315000

Table-Table-

Table-

θθ

θ

Timing Timing

Timing

Task has not been completed unable to continue.Task has not been completed unable to continue.

Task has not been completed unable to continue.

(台θTiming) ( 想动作时，装置不在停机状态。)

03160000316000

0316000

Table-Table-

Table-

θθ

θ

Data Data

Data

The data was detected outside of the possible range.The data was detected outside of the possible range.

The data was detected outside of the possible range.

(台θ数据)(目的值超出装置的可动范围。)

03170000317000

0317000

Table-Table-

Table-

θθ

θ

Origin Origin

Origin

Zeroing Opn.Not Complete.Zeroing Opn.Not Complete.

Zeroing Opn.Not Complete.

(台θ原点)(还在做原点复位)

04010000401000

0401000

Screen-Y OriginScreen-Y Origin

Screen-Y Origin

Zeroing opn.was incompleted, within specified time.Zeroing opn.was incompleted, within specified time.

Zeroing opn.was incompleted, within specified time.

(屏幕Y原点)(原点复位没有在规定时间内完成。)

04020000402000

0402000

Screen-Y OriginScreen-Y Origin

Screen-Y Origin

Detect lost pulse error.Detect lost pulse error.

Detect lost pulse error.

(屏幕Y原点)(检出失调。)

04030000403000

0403000

Screen-Y OverrunScreen-Y Overrun

Screen-Y Overrun

(+)Limit error has beed detected.(+)Limit error has beed detected.

(+)Limit error has beed detected.

(屏幕Y Overrun) (Plus(+) overrun检出。)

04040000404000

0404000

Screen-Y OverrunScreen-Y Overrun

Screen-Y Overrun

(-)Limit error has beed detected.(-)Limit error has beed detected.

(-)Limit error has beed detected.

(屏幕Y Overrun) (Minus(-) overrun检出。)

04050000405000

0405000

Screen-Y DriverScreen-Y Driver

Screen-Y Driver

Driver alarm signal was detected.Driver alarm signal was detected.

Driver alarm signal was detected.

(屏幕Y Servo) (Servo Alarm信号检出。)

04060000406000

0406000

Screen-Y DriverScreen-Y Driver

Screen-Y Driver

Driver Emergency Stop InputDriver Emergency Stop Input

Driver Emergency Stop Input

(屏幕Y Servo) ( 驱动的紧急停机输入)

04070000407000

0407000

Screen-Y DriverScreen-Y Driver

Screen-Y Driver

Variation counter over flowVariation counter over flow

Variation counter over flow

(屏幕Y Servo) (偏差Counter的Overflow)

04080000408000

0408000

Screen-Y DriverScreen-Y Driver

Screen-Y Driver

Driver Over-HeatDriver Over-Heat

Driver Over-Heat

(屏幕Y Servo) (驱动过热)

04090000409000

0409000

Screen-Y DriverScreen-Y Driver

Screen-Y Driver

Operatuon was incompleted, within specified time.Operatuon was incompleted, within specified time.

Operatuon was incompleted, within specified time.

(屏幕Y Servo) ( 动作没有在规定时间内结束。)

2.3 2.3

2.3

异常异常

异常

IDID

ID

和复原方法和复原方法

和复原方法

0008-001 2章2-10 AFQ01JTRP

异常异常

异常

IDID

ID

ITEM( ITEM(

ITEM(

项目项目

项目

))

)

内容内容

内容

04100000410000

0410000

Screen-Y InterlockScreen-Y Interlock

Screen-Y Interlock

Cleaning nozzle is up.Cleaning nozzle is up.

Cleaning nozzle is up.

(屏幕Y Interlock) (Cleaning吸嘴正在上升。)

04110000411000

0411000

Screen-Y InterlockScreen-Y Interlock

Screen-Y Interlock

Table-Z Axis is not at safety area.Table-Z Axis is not at safety area.

Table-Z Axis is not at safety area.

(屏幕Y Interlock) (台Z轴不在Saftey Area。)

04120000412000

0412000

Screen-Y InterlockScreen-Y Interlock

Screen-Y Interlock

Front squeegee was down.Front squeegee was down.

Front squeegee was down.

(屏幕Y Interlock) (前侧Squeegee正在下降。)

04130000413000

0413000

Screen-Y InterlockScreen-Y Interlock

Screen-Y Interlock

Rear squeegee was down.Rear squeegee was down.

Rear squeegee was down.

(屏幕Y Interlock) (背侧Squeegee正在下降。)

04140000414000

0414000

Screen-Y TimingScreen-Y Timing

Screen-Y Timing

Task has not been completed unable to continue.Task has not been completed unable to continue.

Task has not been completed unable to continue.

(屏幕Y Timing) ( 想动作时，装置不在停机状态。)

04150000415000

0415000

Screen-Y DataScreen-Y Data

Screen-Y Data

The data was detected outside of the possible range.The data was detected outside of the possible range.

The data was detected outside of the possible range.

(屏幕Y数据)(目的值超出装置的可动范围。)

04160000416000

0416000

Screen-Y OriginScreen-Y Origin

Screen-Y Origin

Zeroing Opn.Not Complete.Zeroing Opn.Not Complete.

Zeroing Opn.Not Complete.

(屏幕Y原点)(还在做原点复位)

05010000501000

0501000

Squeegee Drv.OriginSqueegee Drv.Origin

Squeegee Drv.Origin

Zeroing opn.was incompleted, within specified time.Zeroing opn.was incompleted, within specified time.

Zeroing opn.was incompleted, within specified time.

(Squeegee驱动原点)(原点复位没有在规定时间内完成。)

05020000502000

0502000

Squeegee Drv.OriginSqueegee Drv.Origin

Squeegee Drv.Origin

Detect lost pulse error.Detect lost pulse error.

Detect lost pulse error.

(Squeegee驱动原点) (检出失调。)

05170000517000

0517000

Squeegee Drv.OriginSqueegee Drv.Origin

Squeegee Drv.Origin

Zeroing Opn. Not Complete.Zeroing Opn. Not Complete.

Zeroing Opn. Not Complete.

(Squeegee驱动原点)(还在做原点复位)

05030000503000

0503000

Squeegee Drv.OverrunSqueegee Drv.Overrun

Squeegee Drv.Overrun

(+)Limit error has beed detected.(+)Limit error has beed detected.

(+)Limit error has beed detected.

(Squeegee驱动Overrun) (Plus(+) Overrun检出。)

05040000504000

0504000

Squeegee Drv.OverrunSqueegee Drv.Overrun

Squeegee Drv.Overrun

(-)Limit error has beed detected.(-)Limit error has beed detected.

(-)Limit error has beed detected.

(Squeegee驱动Overrun) (Minus(-) Overrun检出。)

05050000505000

0505000

Squeegee Drv.DriverSqueegee Drv.Driver

Squeegee Drv.Driver

Driver alarm signal was detected.Driver alarm signal was detected.

Driver alarm signal was detected.

(Squeegee驱动Servo) (Servo Alarm信号检出。)

05060000506000

0506000

Squeegee Drv.DriverSqueegee Drv.Driver

Squeegee Drv.Driver

Driver Emergency Stop InputDriver Emergency Stop Input

Driver Emergency Stop Input

(Squeegee驱动Servo) ( 驱动的紧急停机输入)

05070000507000

0507000

Squeegee Drv.DriverSqueegee Drv.Driver

Squeegee Drv.Driver

Variation counter over flowVariation counter over flow

Variation counter over flow

(Squeegee驱动Servo) (偏差Counter的Overflow)

05080000508000

0508000

Squeegee Drv.DriverSqueegee Drv.Driver

Squeegee Drv.Driver

Driver Over-HeatDriver Over-Heat

Driver Over-Heat

(Squeegee驱动Servo) (驱动过热)

05090000509000

0509000

Squeegee Drv.DriverSqueegee Drv.Driver

Squeegee Drv.Driver

Operatuon was incompleted, within specified time.Operatuon was incompleted, within specified time.

Operatuon was incompleted, within specified time.

(Squeegee驱动Servo) ( 动作没有在规定时间内结束。)

05100000510000

0510000

Squeegee Drv.InterlockSqueegee Drv.Interlock

Squeegee Drv.Interlock

Screen is not at print pos.Screen is not at print pos.

Screen is not at print pos.

(Squeegee驱动Interlock) ( 屏幕不在印刷位置。)

05110000511000

0511000

Squeegee Drv.InterlockSqueegee Drv.Interlock

Squeegee Drv.Interlock

Squeegee is out of screen frame.Squeegee is out of screen frame.

Squeegee is out of screen frame.

(Squeegee驱动Interlock) (屏幕轮廓外有Squeegee。)

0512000 Squeegee Drv.Interlock0512000 Squeegee Drv.Interlock

0512000 Squeegee Drv.Interlock

Screen Recog-X Axis feedback value is indefinite.Screen Recog-X Axis feedback value is indefinite.

Screen Recog-X Axis feedback value is indefinite.

(Squeegee驱动Interlock) (屏幕识别X 轴位置不恰当。)

05130000513000

0513000

Squeegee Drv.InterlockSqueegee Drv.Interlock

Squeegee Drv.Interlock

Front squeegee was down.Front squeegee was down.

Front squeegee was down.

(Squeegee驱动Interlock) (前侧Squeegee正在下降。)

05140000514000

0514000

Squeegee Drv.InterlockSqueegee Drv.Interlock

Squeegee Drv.Interlock

Rear squeegee was down.Rear squeegee was down.

Rear squeegee was down.

(Squeegee驱动Interlock) (背侧Squeegee正在下降。)

05150000515000

0515000

Squeegee Drv.TimingSqueegee Drv.Timing

Squeegee Drv.Timing

Task has not been completed unable to continue.Task has not been completed unable to continue.

Task has not been completed unable to continue.

(Squeegee驱动Timing) ( 想动作时，装置不在停机状态。)

2.3 2.3

2.3

异常异常

异常

IDID

ID

和复原方法和复原方法

和复原方法

0008-001 2章2-11 AFQ01JTRP

异常异常

异常

IDID

ID

ITEM(ITEM(

ITEM(

项目项目

项目

))

)

内容内容

内容

05160000516000

0516000

Squeegee Drv.DataSqueegee Drv.Data

Squeegee Drv.Data

The data was detected outside of the possible range.The data was detected outside of the possible range.

The data was detected outside of the possible range.

(Squeegee驱动数据)(目的值超出装置的可动范围。)

06010000601000

0601000

P.E.C.Recog.Camera X OriginP.E.C.Recog.Camera X Origin

P.E.C.Recog.Camera X Origin

Zeroing opn. was incompleted, within specified time.Zeroing opn. was incompleted, within specified time.

Zeroing opn. was incompleted, within specified time.

(基板识别Camera X原点)(原点复位没有在规定时间内完成。)

06020000602000

0602000

P.E.C.Recog.Camera X OriginP.E.C.Recog.Camera X Origin

P.E.C.Recog.Camera X Origin

Detect lost pulse error.Detect lost pulse error.

Detect lost pulse error.

(基板识别Camera X原点)(检出失调。)

06030000603000

0603000

P.E.C.Recog.Camera X OverrunP.E.C.Recog.Camera X Overrun

P.E.C.Recog.Camera X Overrun

(+)Limit error has beed detected.(+)Limit error has beed detected.

(+)Limit error has beed detected.

(Overrun) (Plus(+) Overrun检出。)

06040000604000

0604000

P.E.C.Recog.Camera X OverrunP.E.C.Recog.Camera X Overrun

P.E.C.Recog.Camera X Overrun

(-)Limit error has beed detected.(-)Limit error has beed detected.

(-)Limit error has beed detected.

(Overrun) (Minus(-) Overrun检出。)

06050000605000

0605000

P.E.C.Recog.Camera X DriverP.E.C.Recog.Camera X Driver

P.E.C.Recog.Camera X Driver

Driver alarm signal was detected.Driver alarm signal was detected.

Driver alarm signal was detected.

(基板识别Camera X Servo) (Servo Alarm信号检出。)

06060000606000

0606000

P.E.C.Recog.Camera X DriverP.E.C.Recog.Camera X Driver

P.E.C.Recog.Camera X Driver

Driver Emergency Stop InputDriver Emergency Stop Input

Driver Emergency Stop Input

(基板识别Camera X Servo) ( 驱动的紧急停机输入)

06070000607000

0607000

P.E.C.Recog.Camera X DriverP.E.C.Recog.Camera X Driver

P.E.C.Recog.Camera X Driver

Variation counter over flowVariation counter over flow

Variation counter over flow

(基板识别Camera X Servo) (偏差Counter的Overflow)

06080000608000

0608000

P.E.C.Recog.Camera X DriverP.E.C.Recog.Camera X Driver

P.E.C.Recog.Camera X Driver

Driver Over-HeatDriver Over-Heat

Driver Over-Heat

(基板识别Camera X Servo) (驱动过热)

06090000609000

0609000

P.E.C.Recog.Camera X DriverP.E.C.Recog.Camera X Driver

P.E.C.Recog.Camera X Driver

Operatuon was incompleted, within specified time.Operatuon was incompleted, within specified time.

Operatuon was incompleted, within specified time.

(基板识别Camera X Servo) ( 动作没有在规定时间内结束。)

06100000610000

0610000

P.E.C.Recog.Camera XP.E.C.Recog.Camera X

P.E.C.Recog.Camera X

Table-Z Axis is not at origin.Table-Z Axis is not at origin.

Table-Z Axis is not at origin.

InterlockInterlock

Interlock(基板识别Camera X) (台Z轴不在原点。)

06110000611000

0611000

P.E.C.Recog.Camera XP.E.C.Recog.Camera X

P.E.C.Recog.Camera X

P.C.B.stopper was down.P.C.B.stopper was down.

P.C.B.stopper was down.

InterlockInterlock

Interlock(基板识别Camera X) (基板Stopper正在下降。)

06120000612000

0612000

P.E.C.Recog.Camera XP.E.C.Recog.Camera X

P.E.C.Recog.Camera X

P.C.B.warpage protection was down.P.C.B.warpage protection was down.

P.C.B.warpage protection was down.

InterlockInterlock

Interlock(基板识别Camera X) (基板Warpage Protection正在下降。)

06130000613000

0613000

P.E.C.Recog.Camera XP.E.C.Recog.Camera X

P.E.C.Recog.Camera X

Cleaning nozzle is up.Cleaning nozzle is up.

Cleaning nozzle is up.

InterlockInterlock

Interlock(基板识别Camera X) (Cleaning吸嘴正在上升。)

06140000614000

0614000

P.E.C.Recog.Camera XP.E.C.Recog.Camera X

P.E.C.Recog.Camera X

P.C.B.was took on table.P.C.B.was took on table.

P.C.B.was took on table.

InterlockInterlock

Interlock(基板识别Camera X) (台上有基板。)

06150000615000

0615000

P.E.C.Recog.Camera X TimingP.E.C.Recog.Camera X Timing

P.E.C.Recog.Camera X Timing

Task has not been completed unable to continue.Task has not been completed unable to continue.

Task has not been completed unable to continue.

(基板识别Camera X Timing) ( 想动作时，装置不在停机状态。)

06160000616000

0616000

P.E.C.Recog.Camera X DataP.E.C.Recog.Camera X Data

P.E.C.Recog.Camera X Data

The data was detected outside of the possible range.The data was detected outside of the possible range.

The data was detected outside of the possible range.

(基板识别Camera X数据)(目的值超出装置的可动范围。)

06170000617000

0617000

P.E.C.Recog.Camera X OriginP.E.C.Recog.Camera X Origin

P.E.C.Recog.Camera X Origin

Zeroing Opn. Not Complete.Zeroing Opn. Not Complete.

Zeroing Opn. Not Complete.

(基板识别Camera X原点)(还在做原点复位)

07010000701000

0701000

P.E.C.Recog.Camera P.E.C.Recog.Camera

P.E.C.Recog.Camera

YY

Y

Origin Origin

Origin

Zeroing opn. was incompleted, within specified time.Zeroing opn. was incompleted, within specified time.

Zeroing opn. was incompleted, within specified time.

(基板识别Camera Y原点)(原点复位没有在规定时间内完成。)

07020000702000

0702000

P.E.C.Recog.Camera P.E.C.Recog.Camera

P.E.C.Recog.Camera

YY

Y

Origin Origin

Origin

Detect lost pulse error.Detect lost pulse error.

Detect lost pulse error.

(基板识别Camera Y原点)(检出失调。)

07030000703000

0703000

P.E.C.Recog.Camera Y OverrunP.E.C.Recog.Camera Y Overrun

P.E.C.Recog.Camera Y Overrun

(+)Limit error has beed detected.(+)Limit error has beed detected.

(+)Limit error has beed detected.

(基板识别Camera Y Overrun) (Plus(+) overrun检出。)

07040000704000

0704000

P.E.C.Recog.Camera Y OverrunP.E.C.Recog.Camera Y Overrun

P.E.C.Recog.Camera Y Overrun

(-)Limit error has beed detected.(-)Limit error has beed detected.

(-)Limit error has beed detected.

(基板识别Camera Y Overrun) (Minus(-) overrun检出。)

2.3 2.3

2.3

异常异常

异常

IDID

ID

和复原方法和复原方法

和复原方法

0008-001 2章2-12 AFQ01JTRP