2OM-1150-001_w.pdf - 第157页
异常 异常 异常 异常 异常 ID ID ID ID ID ITEM( ITEM( ITEM( ITEM( ITEM( 项目 项目 项目 项目 项目 ) ) ) ) ) 内容 内容 内容 内容 内容 1 405000 1 405000 1 405000 1 405000 1 405000 Printing Pressure Assign Printing Pressure Assign Printing Pressure Assign …

异常异常
异常异常
异常
IDID
IDID
ID
ITEM(ITEM(
ITEM(ITEM(
ITEM(
项目项目
项目项目
项目
))
))
)
内容内容
内容内容
内容
13050001305000
13050001305000
1305000
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time Over
PCB transfer from inp. conv. was not completed within specified time.PCB transfer from inp. conv. was not completed within specified time.
PCB transfer from inp. conv. was not completed within specified time.PCB transfer from inp. conv. was not completed within specified time.
PCB transfer from inp. conv. was not completed within specified time.
( 基板移栽超时)
(从供给侧传送带的基板移栽没有在所定时间内结束。)
13060001306000
13060001306000
1306000
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time Over
PCB transfer to outp.conv. was not completed within specified time.PCB transfer to outp.conv. was not completed within specified time.
PCB transfer to outp.conv. was not completed within specified time.PCB transfer to outp.conv. was not completed within specified time.
PCB transfer to outp.conv. was not completed within specified time.
( 基板移栽超时)
(向排出侧传送带的基板移栽没有在所定时间内结束。)
13070001307000
13070001307000
1307000
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time Over
PCB was not transfered from outp.conv. within specified time.PCB was not transfered from outp.conv. within specified time.
PCB was not transfered from outp.conv. within specified time.PCB was not transfered from outp.conv. within specified time.
PCB was not transfered from outp.conv. within specified time.
( 基板移栽超时)
(从排出侧传送带的基板移栽没有在所定时间内结束。)
13080001308000
13080001308000
1308000
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time OverPCB Transfer Time Over
PCB Transfer Time Over
PCB transfer to input conv. was not completed within specified time.PCB transfer to input conv. was not completed within specified time.
PCB transfer to input conv. was not completed within specified time.PCB transfer to input conv. was not completed within specified time.
PCB transfer to input conv. was not completed within specified time.
( 基板移栽超时)
(向供给侧传送带的基板移栽没有在所定时间内结束。)
13090001309000
13090001309000
1309000
Input Conveyor InterlockInput Conveyor Interlock
Input Conveyor InterlockInput Conveyor Interlock
Input Conveyor Interlock
(供给侧传送带Interlock) 基板Back-Up轴上升中欲进行传送带搬送。
131 00001 310000
131 00001 310000
131 0000
Output Conveyor InterlockOutput Conveyor Interlock
Output Conveyor InterlockOutput Conveyor Interlock
Output Conveyor Interlock
(排出侧传送带Interlock) 基板Back-Up轴上升中欲进行传送带搬送。
13110001 3 11000
13110001 3 11000
1311000
Output Conveyor InterlockOutput Conveyor Interlock
Output Conveyor InterlockOutput Conveyor Interlock
Output Conveyor Interlock
P.C.B. stopper was running.P.C.B. stopper was running.
P.C.B. stopper was running.P.C.B. stopper was running.
P.C.B. stopper was running.
(排出侧传送带Interlock) (基板Stopper正在下降。)
131 20001 312000
131 20001 312000
131 2000
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer Interlock
Input Conveyor motor was running.Input Conveyor motor was running.
Input Conveyor motor was running.Input Conveyor motor was running.
Input Conveyor motor was running.
(基板移栽Interlock) ( 供给侧传送带马达正在运作。)
131 30001 313000
131 30001 313000
131 3000
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer Interlock
Output conveyor motor was running.Output conveyor motor was running.
Output conveyor motor was running.Output conveyor motor was running.
Output conveyor motor was running.
(基板移栽Interlock) ( 排出侧传送带马达正在运作。)
131 40001 314000
131 40001 314000
131 4000
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer InterlockPCB Transfer Interlock
PCB Transfer Interlock
2 P.C.B. was on table.2 P.C.B. was on table.
2 P.C.B. was on table.2 P.C.B. was on table.
2 P.C.B. was on table.
(基板移栽Interlock) (台上有2张基板。)
131 50001 315000
131 50001 315000
131 5000
Table Stopper InterlockTable Stopper Interlock
Table Stopper InterlockTable Stopper Interlock
Table Stopper Interlock
P.E.C Recog-X Axis was running.P.E.C Recog-X Axis was running.
P.E.C Recog-X Axis was running.P.E.C Recog-X Axis was running.
P.E.C Recog-X Axis was running.
(台部Stopper Interlock) (基板识别X 轴正在运作。)
131 60001 316000
131 60001 316000
131 6000
Table Stopper InterlockTable Stopper Interlock
Table Stopper InterlockTable Stopper Interlock
Table Stopper Interlock
P.E.C Recog-Y Axis was running.P.E.C Recog-Y Axis was running.
P.E.C Recog-Y Axis was running.P.E.C Recog-Y Axis was running.
P.E.C Recog-Y Axis was running.
(台部Stopper Interlock) (基板识别Y 轴正在运作。)
131 70001 317000
131 70001 317000
131 7000
Table Stopper InterlockTable Stopper Interlock
Table Stopper InterlockTable Stopper Interlock
Table Stopper Interlock
P.C.B. was took on table.P.C.B. was took on table.
P.C.B. was took on table.P.C.B. was took on table.
P.C.B. was took on table.
(台部Stopper Interlock) (台上有基板。)
131 80001 318000
131 80001 318000
131 8000
Conveyor Stopper InterlockConveyor Stopper Interlock
Conveyor Stopper InterlockConveyor Stopper Interlock
Conveyor Stopper Interlock
Output conveyor motor was running.Output conveyor motor was running.
Output conveyor motor was running.Output conveyor motor was running.
Output conveyor motor was running.
(传送带Stopper Interlock) ( 排出侧传送带马达正在运作。)
131 90001 319000
131 90001 319000
131 9000
Conveyor Stopper InterlockConveyor Stopper Interlock
Conveyor Stopper InterlockConveyor Stopper Interlock
Conveyor Stopper Interlock
P.C.B. was took on output conveyor.P.C.B. was took on output conveyor.
P.C.B. was took on output conveyor.P.C.B. was took on output conveyor.
P.C.B. was took on output conveyor.
(传送带Stopper Interlock) ( 排出侧传送带上有不恰当基板。)
13200001320000
13200001320000
1320000
Table Block StopperTable Block Stopper
Table Block StopperTable Block Stopper
Table Block Stopper
P.C.B. stopper error.P.C.B. stopper error.
P.C.B. stopper error.P.C.B. stopper error.
P.C.B. stopper error.
(台部Stopper) (基板Stopper没有正常运作。)
13210001 321 000
13210001 321 000
1321000
P.C.B.ClampP.C.B.Clamp
P.C.B.ClampP.C.B.Clamp
P.C.B.Clamp
P.C.B. chuck missed.P.C.B. chuck missed.
P.C.B. chuck missed.P.C.B. chuck missed.
P.C.B. chuck missed.
(基板Chuck) (基板偏离错位。)
13220001322000
13220001322000
1322000
PCB Warpage ProtectionPCB Warpage Protection
PCB Warpage ProtectionPCB Warpage Protection
PCB Warpage Protection
PCB warpage protection error.PCB warpage protection error.
PCB warpage protection error.PCB warpage protection error.
PCB warpage protection error.
(基板Warpage Protection) (基板Warpage Protection异常)
13230001323000
13230001323000
1323000
P.C.B.ClampP.C.B.Clamp
P.C.B.ClampP.C.B.Clamp
P.C.B.Clamp
P.C.B. cramp move error.P.C.B. cramp move error.
P.C.B. cramp move error.P.C.B. cramp move error.
P.C.B. cramp move error.
(基板Chuck) (基板Clamp动作异常)
14010001 401 000
14010001 401 000
1401000
Squeegee Up/Down AxisSqueegee Up/Down Axis
Squeegee Up/Down AxisSqueegee Up/Down Axis
Squeegee Up/Down Axis
Table-Z Axis is not at print pos.Table-Z Axis is not at print pos.
Table-Z Axis is not at print pos.Table-Z Axis is not at print pos.
Table-Z Axis is not at print pos.
(Squeegee上下轴)(台Z 不在印刷位置。)
14020001402000
14020001402000
1402000
Squeegee Up/Down AxisSqueegee Up/Down Axis
Squeegee Up/Down AxisSqueegee Up/Down Axis
Squeegee Up/Down Axis
Squeegee Up/Down cylinder moveing error.Squeegee Up/Down cylinder moveing error.
Squeegee Up/Down cylinder moveing error.Squeegee Up/Down cylinder moveing error.
Squeegee Up/Down cylinder moveing error.
(Squeegee上下轴) (Squeegee上下Cylinder动作异常)
14030001403000
14030001403000
1403000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Front squeegee printing pressure exceeded upper set range.Front squeegee printing pressure exceeded upper set range.
Front squeegee printing pressure exceeded upper set range.Front squeegee printing pressure exceeded upper set range.
Front squeegee printing pressure exceeded upper set range.
(印压设定)(前侧Squeegee的印压超出上限设定范围。)
14040001404000
14040001404000
1404000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Rear squeegee printing pressure exceeded upper set range.Rear squeegee printing pressure exceeded upper set range.
Rear squeegee printing pressure exceeded upper set range.Rear squeegee printing pressure exceeded upper set range.
Rear squeegee printing pressure exceeded upper set range.
(印压设定)(背侧Squeegee的印压超出上限设定范围。)
2.3 2.3
2.3 2.3
2.3
异常异常
异常异常
异常
IDID
IDID
ID
和复原方法和复原方法
和复原方法和复原方法
和复原方法
0008-001 2章 2-17 AFQ01JTRP

异常异常
异常异常
异常
IDID
IDID
ID
ITEM(ITEM(
ITEM(ITEM(
ITEM(
项目项目
项目项目
项目
))
))
)
内容内容
内容内容
内容
14050001405000
14050001405000
1405000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Not printing pressure exceeded upper range.Not printing pressure exceeded upper range.
Not printing pressure exceeded upper range.Not printing pressure exceeded upper range.
Not printing pressure exceeded upper range.
(印压设定)(平常时印压超出上限。)
14060001406000
14060001406000
1406000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Printing pressure exceeded upper range.Printing pressure exceeded upper range.
Printing pressure exceeded upper range.Printing pressure exceeded upper range.
Printing pressure exceeded upper range.
(印压设定)(印刷时的印压大大偏离设定值。(平均值))
14070001407000
14070001407000
1407000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Front squeegee pressure exceeded minimum limit.Front squeegee pressure exceeded minimum limit.
Front squeegee pressure exceeded minimum limit.Front squeegee pressure exceeded minimum limit.
Front squeegee pressure exceeded minimum limit.
(印压设定)(前侧Squeegee的印压超出下限。)
14080001408000
14080001408000
1408000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Rear squeegee pressure exceeded minimum limit.Rear squeegee pressure exceeded minimum limit.
Rear squeegee pressure exceeded minimum limit.Rear squeegee pressure exceeded minimum limit.
Rear squeegee pressure exceeded minimum limit.
(印压设定)(背侧Squeegee的印压超出下限。)
14090001409000
14090001409000
1409000
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure AssignPrinting Pressure Assign
Printing Pressure Assign
Printing pressure exceeded upper range.(Peak)Printing pressure exceeded upper range.(Peak)
Printing pressure exceeded upper range.(Peak)Printing pressure exceeded upper range.(Peak)
Printing pressure exceeded upper range.(Peak)
(印压设定)(印刷时的印压大大偏离设定值。(peak值))
141 00001 410000
141 00001 410000
141 0000
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down Interlock
Squeegee up/down cylinder. Squgeg.Y axis was not at safety area.Squeegee up/down cylinder. Squgeg.Y axis was not at safety area.
Squeegee up/down cylinder. Squgeg.Y axis was not at safety area.Squeegee up/down cylinder. Squgeg.Y axis was not at safety area.
Squeegee up/down cylinder. Squgeg.Y axis was not at safety area.
(Squeegee上下Interlock)
(Squeegee Head Squeegee上下CY Squeegee Y轴不在Safety Area。)
14110001 4 11000
14110001 4 11000
1411000
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down Interlock
Squeegee up/down cylinder. PCB was not exists on table.Squeegee up/down cylinder. PCB was not exists on table.
Squeegee up/down cylinder. PCB was not exists on table.Squeegee up/down cylinder. PCB was not exists on table.
Squeegee up/down cylinder. PCB was not exists on table.
(Squeegee上下Interlock)
(Squeegee Head Squeegee上下CY台部无基板。)
141 20001 412000
141 20001 412000
141 2000
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down InterlockSqueegee Up/Down Interlock
Squeegee Up/Down Interlock
Squeegee up/down cylinder. PCB was not checked.Squeegee up/down cylinder. PCB was not checked.
Squeegee up/down cylinder. PCB was not checked.Squeegee up/down cylinder. PCB was not checked.
Squeegee up/down cylinder. PCB was not checked.
(Squeegee上下Interlock)
(Squeegee Head Squeegee上下CY基板没有被固定。)
15010001 501 000
15010001 501 000
1501000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
[Emergency]button pressed.[Emergency]button pressed.
[Emergency]button pressed.[Emergency]button pressed.
[Emergency]button pressed.
( 负载电源切断)(〖异常停机〗按钮被按。)
15020001502000
15020001502000
1502000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
The air pressure is too low.The air pressure is too low.
The air pressure is too low.The air pressure is too low.
The air pressure is too low.
( 负载电源切断)(检出气压低下。)
15030001503000
15030001503000
1503000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
The safety door is open.The safety door is open.
The safety door is open.The safety door is open.
The safety door is open.
( 负载电源切断)(救傈巩捞 凯啡嚼聪促.)
15040001504000
15040001504000
1504000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
Detected circuit breaker off.Detected circuit breaker off.
Detected circuit breaker off.Detected circuit breaker off.
Detected circuit breaker off.
( 负载电源切断)(检出Circuit Breaker OFF。)
15050001505000
15050001505000
1505000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
Detected all load power moniter off.Detected all load power moniter off.
Detected all load power moniter off.Detected all load power moniter off.
Detected all load power moniter off.
( 负载电源切断)(检出前负载电源马达OFF。)
15060001506000
15060001506000
1506000
Load Power OffLoad Power Off
Load Power OffLoad Power Off
Load Power Off
Detected load power moniter off.Detected load power moniter off.
Detected load power moniter off.Detected load power moniter off.
Detected load power moniter off.
( 负载电源切断)(检出负载电源马达OFF。)
16010001 601 000
16010001 601 000
1601000
Control BoardControl Board
Control BoardControl Board
Control Board
System errorSystem error
System errorSystem error
System error
(控制基板)(系统异常)
16020001602000
16020001602000
1602000
Control BoardControl Board
Control BoardControl Board
Control Board
Control board errorControl board error
Control board errorControl board error
Control board error
(控制基板) (SDS Board异常)
16030001603000
16030001603000
1603000
SensorSensor
SensorSensor
Sensor
Paste detect sensor errorPaste detect sensor error
Paste detect sensor errorPaste detect sensor error
Paste detect sensor error
(传感器) (Paste检出传感器异常。)
16040001604000
16040001604000
1604000
System ErrorSystem Error
System ErrorSystem Error
System Error
Undefined Error.Undefined Error.
Undefined Error.Undefined Error.
Undefined Error.
(系统异常)(发生未定义异常。)
16050001605000
16050001605000
1605000
System ErrorSystem Error
System ErrorSystem Error
System Error
Illegal error code.Illegal error code.
Illegal error code.Illegal error code.
Illegal error code.
(系统异常)(异常代码不合法。)
16060001606000
16060001606000
1606000
System ErrorSystem Error
System ErrorSystem Error
System Error
Internal data error.Internal data error.
Internal data error.Internal data error.
Internal data error.
(系统异常)(内部数据不一致。)
16070001607000
16070001607000
1607000
System ErrorSystem Error
System ErrorSystem Error
System Error
Failed to caliculate position.Failed to caliculate position.
Failed to caliculate position.Failed to caliculate position.
Failed to caliculate position.
(系统异常)(坐标演算失败。)
16080001608000
16080001608000
1608000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Operation Node (1) ErrorOperation Node (1) Error
Operation Node (1) ErrorOperation Node (1) Error
Operation Node (1) Error
(Node异常)(操作台Node(1)异常)
16090001609000
16090001609000
1609000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Relay Secquence Node (2) ErrorRelay Secquence Node (2) Error
Relay Secquence Node (2) ErrorRelay Secquence Node (2) Error
Relay Secquence Node (2) Error
(Node异常) (Relay Sequence部 Node(2)异常)
161 00001 610000
161 00001 610000
161 0000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Inp.&& Outp.Mac.Interface Node (3) ErrorInp.&& Outp.Mac.Interface Node (3) Error
Inp.&& Outp.Mac.Interface Node (3) ErrorInp.&& Outp.Mac.Interface Node (3) Error
Inp.&& Outp.Mac.Interface Node (3) Error
(Node异常)(前后Interface部 Node(3)异常)
2.3 2.3
2.3 2.3
2.3
异常异常
异常异常
异常
IDID
IDID
ID
和复原方法和复原方法
和复原方法和复原方法
和复原方法
0008-001 2章2-18 AFQ01JTRP

异常异常
异常异常
异常
IDID
IDID
ID
项目项目
项目项目
项目
内容内容
内容内容
内容
16110001 6 11000
16110001 6 11000
1611000
Node ErrorNode Error
Node ErrorNode Error
Node Error
P.C.B.Transfer Node (4) ErrorP.C.B.Transfer Node (4) Error
P.C.B.Transfer Node (4) ErrorP.C.B.Transfer Node (4) Error
P.C.B.Transfer Node (4) Error
(Node异常)(基板搬送部 Node(4)异常)
161 20001 612000
161 20001 612000
161 2000
Node ErrorNode Error
Node ErrorNode Error
Node Error
P.C.B.Chuck Node (5) ErrorP.C.B.Chuck Node (5) Error
P.C.B.Chuck Node (5) ErrorP.C.B.Chuck Node (5) Error
P.C.B.Chuck Node (5) Error
(Node异常)(基板Chuck部 Node(5)异常)
161 30001 613000
161 30001 613000
161 3000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Squeegee Head Node (6) ErrorSqueegee Head Node (6) Error
Squeegee Head Node (6) ErrorSqueegee Head Node (6) Error
Squeegee Head Node (6) Error
(Node异常) (Squeegee Head部 Node(6)异常)
161 40001 614000
161 40001 614000
161 4000
Node ErrorNode Error
Node ErrorNode Error
Node Error
P.E.C Recog.Node (7) ErrorP.E.C Recog.Node (7) Error
P.E.C Recog.Node (7) ErrorP.E.C Recog.Node (7) Error
P.E.C Recog.Node (7) Error
(Node异常)(基板识别部 Node(7)异常)
161 50001 615000
161 50001 615000
161 5000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Cleaning Unit Node (8) ErrorCleaning Unit Node (8) Error
Cleaning Unit Node (8) ErrorCleaning Unit Node (8) Error
Cleaning Unit Node (8) Error
(Node异常) (Cleaning单元部 Node(8)异常)
161 60001 616000
161 60001 616000
161 6000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Blower Unit Node (9) ErrorBlower Unit Node (9) Error
Blower Unit Node (9) ErrorBlower Unit Node (9) Error
Blower Unit Node (9) Error
(Node异常) (Blower单元部 Node(9)异常)
161 70001 617000
161 70001 617000
161 7000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Printing pressure control output node errorPrinting pressure control output node error
Printing pressure control output node errorPrinting pressure control output node error
Printing pressure control output node error
(Node异常)(印压控制输出 Node异常)
161 80001 618000
161 80001 618000
161 8000
Node ErrorNode Error
Node ErrorNode Error
Node Error
Printing pressure control input node errorPrinting pressure control input node error
Printing pressure control input node errorPrinting pressure control input node error
Printing pressure control input node error
(Node异常)(印压控制输入 Node异常)
161 90001 619000
161 90001 619000
161 9000
Pattern Program Data ErrorPattern Program Data Error
Pattern Program Data ErrorPattern Program Data Error
Pattern Program Data Error
Illegal pattern program.Illegal pattern program.
Illegal pattern program.Illegal pattern program.
Illegal pattern program.
(NC数据异常) (NC数据不合法。)
17010001 701 000
17010001 701 000
1701000
Squeegee Life LimitSqueegee Life Limit
Squeegee Life LimitSqueegee Life Limit
Squeegee Life Limit
Front squeegee exceeded life limit.Front squeegee exceeded life limit.
Front squeegee exceeded life limit.Front squeegee exceeded life limit.
Front squeegee exceeded life limit.
(Squeegee寿命)(前侧Squeegee的使用次数超过限额。)
17020001702000
17020001702000
1702000
Squeegee Life LimitSqueegee Life Limit
Squeegee Life LimitSqueegee Life Limit
Squeegee Life Limit
Rear squeegee exceeded life limit.Rear squeegee exceeded life limit.
Rear squeegee exceeded life limit.Rear squeegee exceeded life limit.
Rear squeegee exceeded life limit.
(Squeegee寿命)(背侧Squeegee的使用次数超过限额。)
17030001703000
17030001703000
1703000
Paste ShortagePaste Shortage
Paste ShortagePaste Shortage
Paste Shortage
Detected paste shortage.Detected paste shortage.
Detected paste shortage.Detected paste shortage.
Detected paste shortage.
(Paste断料)(检出Paste断料。)
17040001704000
17040001704000
1704000
Paste ShortagePaste Shortage
Paste ShortagePaste Shortage
Paste Shortage
Detected paste dispensor shortage.Detected paste dispensor shortage.
Detected paste dispensor shortage.Detected paste dispensor shortage.
Detected paste dispensor shortage.
(Paste断料)(检出Dispenser的Paste断料。)
17050001705000
17050001705000
1705000
Cleaning UnitCleaning Unit
Cleaning UnitCleaning Unit
Cleaning Unit
Detected cleaning paper shortage.Detected cleaning paper shortage.
Detected cleaning paper shortage.Detected cleaning paper shortage.
Detected cleaning paper shortage.
(Cleaning单元)(检出Paper断料。)
18010001 801 000
18010001 801 000
1801000
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
(基板识别第1点)
18010011801001
18010011801001
1801001
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera ID] exceeds the range of setting.',0[Camera ID] exceeds the range of setting.',0
[Camera ID] exceeds the range of setting.',0[Camera ID] exceeds the range of setting.',0
[Camera ID] exceeds the range of setting.',0
(基板识别第1点) ([Camera ID]数据超出设定范围。)
18010021 801 002
18010021 801 002
1801002
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera Offset X] exceeds the range of setting.[Camera Offset X] exceeds the range of setting.
[Camera Offset X] exceeds the range of setting.[Camera Offset X] exceeds the range of setting.
[Camera Offset X] exceeds the range of setting.
(基板识别第1点) ([Camera Offset X]数据超出设定范围。)
18010031 801 003
18010031 801 003
1801003
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera Gain] exceeds the range of setting.[Camera Gain] exceeds the range of setting.
[Camera Gain] exceeds the range of setting.[Camera Gain] exceeds the range of setting.
[Camera Gain] exceeds the range of setting.
(基板识别第1点) ([Camera Gain]数据超出设定范围。)
18010041 801 004
18010041 801 004
1801004
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera Level] exceeds the range of setting.[Camera Level] exceeds the range of setting.
[Camera Level] exceeds the range of setting.[Camera Level] exceeds the range of setting.
[Camera Level] exceeds the range of setting.
(基板识别第1点) ([Camera Level]数据超出设定范围。)
18010051 801 005
18010051 801 005
1801005
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera Mag.X] exceeds the range of setting.[Camera Mag.X] exceeds the range of setting.
[Camera Mag.X] exceeds the range of setting.[Camera Mag.X] exceeds the range of setting.
[Camera Mag.X] exceeds the range of setting.
(基板识别第1点) ([Camera倍率X]数据超出设定范围。)
18010061 801 006
18010061 801 006
1801006
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Camera Mag.Y] exceeds the range of setting.[Camera Mag.Y] exceeds the range of setting.
[Camera Mag.Y] exceeds the range of setting.[Camera Mag.Y] exceeds the range of setting.
[Camera Mag.Y] exceeds the range of setting.
(基板识别第1点) ([Camera倍率Y]数据超出设定范围。)
18010071 801 007
18010071 801 007
1801007
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Gain,Level] exceeds the range of setting.[Gain,Level] exceeds the range of setting.
[Gain,Level] exceeds the range of setting.[Gain,Level] exceeds the range of setting.
[Gain,Level] exceeds the range of setting.
(基板识别第1点) ([Gain, Level显示]数据超出设定范围。)
18010081 801 008
18010081 801 008
1801008
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Mark] exceeds the range of setting.[Mark] exceeds the range of setting.
[Mark] exceeds the range of setting.[Mark] exceeds the range of setting.
[Mark] exceeds the range of setting.
(基板识别第1点)([标记] 数据超出设定范围。)
18010091 801 009
18010091 801 009
1801009
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1P.E.C.Recog.#1
P.E.C.Recog.#1
[Mark Code] exceeds the range of setting.[Mark Code] exceeds the range of setting.
[Mark Code] exceeds the range of setting.[Mark Code] exceeds the range of setting.
[Mark Code] exceeds the range of setting.
(基板识别第1点)([标记代码]数据超出设定范围。)
2.3 2.3
2.3 2.3
2.3
异常异常
异常异常
异常
IDID
IDID
ID
和复原方法和复原方法
和复原方法和复原方法
和复原方法
0008-001 2章2-19 AFQ01JTRP