P-0192-001.pdf - 第33页
Key No. P AR T No. P AR T NAME Q’ ty REMARKS NOTE 31 MODEL TIM-5200F/R 0307-001 E-1 1 630 122 1984 PLA TE 1 805B--010-510 5 630 056 9070 V ACUUM PUMP 1 M1,#3-040437-2 805E--010-005 5 -10 630 031 8593 AIR LINE EQPT(FIL TE…
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MODEL TIM-5200F/R
0307-001
真空ポンプ部 VACUUM PUMP SECTION
Fig. E-1 真空ポンプ Vacuum Pump
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58
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56
1
63
62
61
68
67
66
6
5-20
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14
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5-10 5-11
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Key No. PART No. PART NAME Q’ty REMARKS
NOTE
31
MODEL TIM-5200F/R
0307-001
E-1
1 630 122 1984 PLATE 1 805B--010-510
5 630 056 9070 VACUUM PUMP 1 M1,#3-040437-2 805E--010-005
5 -10 630 031 8593 AIR LINE EQPT(FILTER) 1 #3-037940
5 -11 630 012 1230 AIR LINE EQPT(FLT ELEM) 1 #XB401379743 4-410A302-4
5 -20 630 055 2171 VACUUM PARTS 1 #4-400A302-1
6 630 003 6787 MECH PARTS(RUBBER DAMPER) 4 805E--010-006
8 630 034 9290 PIPE FITTINGS 1 805E--010-008
9 630 058 4752 PIPE FITTINGS 1 805E--010-009
10 630 058 4738 PIPE FITTINGS 1 805E--010-010
11 630 055 3437 NAME PLATE,PARTS 1 805E--010-011
12 630 001 0220 WASHER 2 805E--010-012
13 630 003 8224 PIPE FITTINGS 4 805E--010-013
14 630 003 8231 PIPE FITTINGS 1 805E--010-014
15 630 003 8248 PIPE FITTINGS 1 805E--010-015
16 630 003 8088 PIPE FITTINGS 1
17 630 003 8187 PIPE FITTINGS 1
18 630 003 7845 PIPE FITTINGS 1
19 630 003 8187 PIPE FITTINGS 1
20 630 003 8033 PIPE FITTINGS 1
21 630 003 7388 PIPE FITTINGS 1
56 411 141 4503 WASHER V 8X17X1.6 4 FW8
57 411 141 3100 WASHER SPR 8 4 SW8
58 411 141 0901 NUT HEX 8 4 M8
61 411 141 4305 WASHER V 6X12.5X1.6 8 FW6
62 411 141 3001 WASHER SPR 6 8 SW6
63 630 000 7879 BOLT,HEX-SCT 8 M6X12
66 411 141 4107 WASHER V 5X10X1 4 FW5
67 411 141 6705 WASHER SPR 5 4 SW5
68 630 000 7749 BOLT,HEX-SCT 4 M5X10
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MODEL TIM-5200F/R
0307-001
ノズルストッカ部 NOZZLE STOCKER SECTION
Fig. F-1 ノズルスッカ Nozzle Stocker
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67
66
80
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14
77
76
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73
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71
73
72
71
74
72
71
16
16
24
1
18
78
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80
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73
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78
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76
77
7
78
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73
10
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12
2
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11
2
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66
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VACUUM NOZZLE
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