YHP-2D_mpl_e - 第69页
KJG-101 1 15 1 Pallet Assy W afer Pallet 2 1 FLA T 6 FLA T 8
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KW6-M97A0-00 HOUSING 1 ASSY
1 /
39
2
KGP-M97A0-10 HOUSING 2 ASSY
1
/
40
3
KGP-M97A0-20 HOUSING 3 ASSY
1 /
41
4
KW6-M97B0-00 PIN 03 ASSY
1 /
42
5
KW6-M97B0-10 PIN 07 ASSY
1 /
43
6
KW6-M97B0-20 PIN ASSY 3
1 /
44
7
90200-01J250 O-RING
2
A
45
8
46
9
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
3
Ejector Housing & Pin
Wafer Ejector Changer Unit
KJG-1011
15
1
Pallet Assy
Wafer Pallet
21
FLAT 6 FLAT 8
KJG-1011
No. Part No. Part Name Q'ty Remarks Rank Level No. Part No. Part Name Q'ty Remarks Rank Level
1 KJG-M1780-00 PALLET, FLAT6 ASSY 1 /
39
2 KJG-M1780-10 PALLET, FLAT 8 ASSY 1 /
40
3 41
4 42
5 43
6 44
7 45
8
46
9
47
10
48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18 56
19
57
20
58
21 59
22 60
23
61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31
69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
15
1
Pallet Assy
Wafer Pallet