YHP-2D_mpl_e - 第4页
12 W afer Hook Section Hook Frame / Clamp .......................................... 12-1 LH AXIS .............................................................. 12-2 13 W afer Lc AXIS Lcx AXIS / Lcy AXIS ................…
Contents
7
Conveyor Unit Section
Main Stopper ........................................................7-1
Clamp Board .........................................................7-2
Sub Stopper..........................................................7-3
Exit Stopper ..........................................................7-4
Push Up ................................................................7-5
Main Conveyor .....................................................7-6
8
Controller Section
Control Box ...........................................................8-1
9
Exterior, etc Section
Exterior, etc ...........................................................9-1
Key Board & Mouse..............................................9-2
10
Wafer LZ AXIS Section
LZ-axis / Elevation ..............................................10-1
Rack ...................................................................10-2
Cover ..................................................................10-3
11
Wafer Moving-Axis Section
LX-axis ................................................................11-1
LY-axis ................................................................11-2
1
Base Section
Base .....................................................................1-1
2
Cover Section
Top Cover .............................................................2-1
Base Cover ...........................................................2-2
3
Moving-axis Section
X-axis ....................................................................3-1
Y-axis ....................................................................3-2
4
Feeder Holder Section
Feeder Holder 8F .................................................4-1
Feeder Holder 20F / Connector Box .....................4-2
Floating Detection.................................................4-3
Feeder Cover, Front / Feeder Stand.....................4-4
5
Head Section
4M Head ...............................................................5-1
6
Nozzle Section
4M Head Nozzle Selection ..................................6-1
Nozzle Changer (OP.) ..........................................6-2
12
Wafer Hook Section
Hook Frame / Clamp ..........................................12-1
LH AXIS ..............................................................12-2
13
Wafer Lc AXIS
Lcx AXIS / Lcy AXIS ...........................................13-1
14
Wafer Ejector Changer Unit
Ejector Unit .........................................................14-1
LU AXIS ..............................................................14-2
Ejector Housing & Pin.........................................14-3
15
Wafer Pallet Section
Pallet Assy ..........................................................15-1
16
Tools
Tools ...................................................................16-1
KJG-0911
15
13
23
22
10
9
12
2
20
18
4
19
19
3
21
5
19
8
17
24
7
6
1
16
11
19
14
26
25
1
1
Base
Base