YHP-2D_mpl_e - 第5页

KJG-091 1 15 13 23 22 10 9 12 2 20 18 4 19 19 3 21 5 19 8 17 24 7 6 1 16 1 1 19 14 26 25 1 1 Base Base

100%1 / 73
12
Wafer Hook Section
Hook Frame / Clamp ..........................................12-1
LH AXIS ..............................................................12-2
13
Wafer Lc AXIS
Lcx AXIS / Lcy AXIS ...........................................13-1
14
Wafer Ejector Changer Unit
Ejector Unit .........................................................14-1
LU AXIS ..............................................................14-2
Ejector Housing & Pin.........................................14-3
15
Wafer Pallet Section
Pallet Assy ..........................................................15-1
16
Tools
Tools ...................................................................16-1
KJG-0911
15
13
23
22
10
9
12
2
20
18
4
19
19
3
21
5
19
8
17
24
7
6
1
16
11
19
14
26
25
1
1
Base
Base
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KGA-M1180-00 LEVELING BOLT ASSY
4 /
39
2
KM0-M8582-00
VALVE : 040M12AJ1-7
1 B
Í
40
3
KGK-M111A-00 BRACKET, GAUGE
1 /
41
4
KG7-M8596-00 PRESSURE GAUGE
1 /
Í
42
5
KG7-M8504-00 REGULATOR (R300-03)
1 /
Í
43
6
KGK-M1325-00 BRACKET 5
2 /
44
7
KGK-M1141-00 MANIFOLD
1
/
45
8
K40-M8598-00 PLUG 1
1
/
Í
46
9
KG7-M8501-00 AIR FILTER
1
/
47
10
KG7-M8503-00 MODULE ADAPTER
1 /
48
11
KG7-M8502-00 MIST FILTER
1 /
49
12
90990-42J006 JOINT
1 /
Í
50
13
90990-42J008 JOINT
1 /
Í
51
14
KV7-M1125-00 PLATE, CLAMP
1 /
52
15
91312-06016 BOLT HEX. SOCKET HEAD
9 53
16
$TSS4-01 JOINT
3 /
54
17
$TSH8-01 JOINT
1 /
Í
55
18
KG2-M8582-40 VALVE (SPARE)
1
B
56
19
$SL12-03 JOINT
4
/
Í
57
20
$TL8-01 JOINT
1
/
58
21
$KM-11
MUFFLER
1 /
59
22
KG7-M8502-40 MIST FILTER ELEMENT
1 E
60
23
KG7-M8501-40 AIR FILTER ELEMENT
1 E
61
24
KGK-M0105-00 MANIFOLD SUB F ASSY
1 /
62
25
KJG-M36A0-00 BRACKET, DUMP BOX
1 /
63
26
91312-05014 BOLT HEX. SOCKET HEAD
2 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
1
1
Base
Base