YHP-2D_mpl_e - 第51页
KJG-091 1 9 2 1 5 8 6 5 8 3 7 9 4 7 9 6 10 3 Cover W afer LZ AXIS

KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KGP-M174E-00 GUIDE 3, RACK
20 A
Í
39
2
KGP-M174F-00
GUIDE 4, RACK
20 A
Í
40
3
KW6-M1747-00 SPRING
1 A
41
4
KW6-M1750-A0 CYLINDER ASSY
1 B
Í
42
5
KW6-M1750-00 CYLINDER
1 B
Í
43
6
KW6-M1751-00 CYLINDER, SENSOR
2 B
Í
44
7
$SS4-M5A SPEED CONTROLLER
2
/
45
8
KGP-M1745-00 DOOR, RACK
1
/
46
9
KV4-M1767-00 HINGE RACK
2
/
47
10
KW6-M172D-00 SEAL
1 /
48
11
98507-03003 SCREW PAN HEAD
12 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
10
2
Rack
Wafer LZ AXIS

KJG-0911
9
2
1
5
8
6
5
8
3
7
9
4
7
9
6
10
3
Cover
Wafer LZ AXIS

KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
90990-42J030 JOINT
1 /
Í
39
2
90990-42J031 JOINT
1
/
Í
40
3
$UKM4-01 JOINT
1 /
Í
41
4
KL4-M1309-10 HANDLE
1
/
42
5
KG2-M1372-00 PIECE B HINGE
2 /
43
6
K46-M1373-00 SHAFT HINGE
2 /
44
7
K44-M1354-00 MG. CATCH (TL-152-2)
2
/
45
8
91317-03008 BOLT HEX. SOCKET HEAD
4
46
9
91317-04008 BOLT HEX. SOCKET HEAD
8
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
10
3
Cover
Wafer LZ AXIS