YHP-2D_mpl_e - 第53页
KJG-091 1 2 1 3 5 4 1 1 1 LX-axis W afer Moving-Axis
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
90990-42J030 JOINT
1 /
Í
39
2
90990-42J031 JOINT
1
/
Í
40
3
$UKM4-01 JOINT
1 /
Í
41
4
KL4-M1309-10 HANDLE
1
/
42
5
KG2-M1372-00 PIECE B HINGE
2 /
43
6
K46-M1373-00 SHAFT HINGE
2 /
44
7
K44-M1354-00 MG. CATCH (TL-152-2)
2
/
45
8
91317-03008 BOLT HEX. SOCKET HEAD
4
46
9
91317-04008 BOLT HEX. SOCKET HEAD
8
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
10
3
Cover
Wafer LZ AXIS
KJG-0911
2
1
3
5
4
11
1
LX-axis
Wafer Moving-Axis
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M7236-00 COUPLING
1 B
Í
39
2
KJG-M2212-A0 SENSOR, LX ORG
1
B
Í
40
3
90K63-311414 AC SERVO MOTOR
1 B
Í
41
4
91312-04014 BOLT HEX. SOCKET HEAD
12 42
5
98980-03008 SCREW BINDING HEAD
1 43
6 44
7
45
8
46
9
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
1
LX-axis
Wafer Moving-Axis