YHP-2D_mpl_e - 第57页
KJG-091 1 8 7 8 8 1 6 5 8 8 8 3 4 8 2 9 10 12 1 1 12 12 1 Hook Frame / Clamp W afer Hook
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M2615-00 VALVE
1 B
Í
39
2
KJG-M2616-A0 SENSOR, LEY ORG
1
B
Í
40
3
KJG-M7236-00 COUPLING
1 B
Í
41
4
90K63-311615 AC SERVO MOTOR
1 B
Í
42
5
91312-03030 BOLT HEX. SOCKET HEAD
2 43
6
91312-04012 BOLT HEX. SOCKET HEAD
6 44
7
98980-03012 SCREW, BINDING HEAD
1
45
8
$TS8-01 JOINT
1
46
9
KG2-M8582-40 VALVE
1
spare
B
Í
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
11
2
LY-axis
Wafer Moving-Axis
KJG-0911
8
7
8
8
1
6
5
8
8
8
3
4
8
2
9
10
12
11
12
12
1
Hook Frame / Clamp
Wafer Hook
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M1830-A0 SENSOR, PLT F
1 B
Í
39
2
KJG-M1830-B0 SENSOR, PLT C1
1
B
Í
40
3
KJG-M1830-C0 SENSOR, PLT C2
1 B
Í
41
4
KJG-M1830-D0 SENSOR, PLT R
1 B
Í
42
5
KJG-M1830-E0 SENSOR, PLT CHK 6
1 B
Í
43
6
KJG-M1830-F0 SENSOR, PLT CHK 8
1 B
Í
44
7
KJG-M1831-00 COVER, CABLE
1
/
Í
45
8
91312-03006 BOLT HEX. SOCKET HEAD
15
46
9
92902-03200 WASHER, PLAIN
3
47
10
KJG-M1899-00 CYLINDER
1 B
Í
48
11
KJG-M9709-00 KNUCKLE JOINT
1 B
Í
49
12
$SC4-M5 SPEED CONTROLLER
2 /
Í
50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
12
1
Hook Frame / Clamp
Wafer Hook