YHP-2D_mpl_e - 第65页
KJG-091 1 1 2 3 14 2 LU AXIS W afer Ejector Changer Unit
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M9703-00 CYLINDER
1 B
Í
39
2
KJG-M9722-00
CYLINDER
1 B
Í
40
3
KJG-M9724-A0 EJECTOR ASSY, A
1 B
Í
41
4
KJG-M9724-B0 EJECTOR ASSY, B
1 B
Í
42
5
KJG-M9725-A0 SENSOR ASSY, A
1 B
Í
43
6
KJG-M9725-B0 SENSOR ASSY, B
1 B
Í
44
7
91312-04025 BOLT HEX. SOCKET HEAD
2
45
8
91312-05012 BOLT HEX. SOCKET HEAD
8
46
9
$SC4-M5A SPEED CONTROLLER
2
47
10
$UL6M JOINT
2 48
11
$UT6 JOINT
2 49
12
KJG-M9709-00 KNUCKLE JOINT
1 /
Í
50
13
KJG-M9726-A0 SENSOR ASSY, A
1 B
Í
51
14
KJG-M9726-B0 SENSOR ASSY, B
1 B
Í
52
15
$SC4-01A SPEED CONTROLLER
2 /
Í
53
16
KJG-M9703-B0 SENSOR, PIN UP
1 B
Í
54
17
KJG-M9703-C0 SENSOR, PIN DOWN
1 B
Í
55
18
KJG-M9722-B0 SENSOR, PIN A
1
B
Í
56
19
KJG-M9722-C0 SENSOR, PIN B
1
B
Í
57
20
KJG-M9722-20 SENSOR BAND, CYL.
2
/
Í
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
1
Ejector Unit
Wafer Ejector Changer Unit
KJG-0911
1
2
3
14
2
LU AXIS
Wafer Ejector Changer Unit
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M9746-00 BELT
1 B
Í
39
2
KJG-M4880-00
AC SERVO MOTOR ASSY
1 B
Í
40
3
91312-03006 BOLT HEX. SOCKET HEAD
14 41
4 42
5 43
6
44
7
45
8
46
9
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
2
LU AXIS
Wafer Ejector Changer Unit