YHP-2D_mpl_e - 第66页

KJG-091 1 Rev . :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering. Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。 No. Part No. Part Name Q’ty Remarks Rev . Rank Level No. Par…

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KJG-0911
1
2
3
14
2
LU AXIS
Wafer Ejector Changer Unit
KJG-0911
Rev. :It is the parts which a change was in in the past. Please be careful at the time of the parts ordering.
Rev.: 過去に変更が入った部品を示します。部品発注時は注意してください。
No. Part No. Part Name Q’ty Remarks Rev. Rank Level No. Part No. Part Name Q’ty Remarks Rev. Rank Level
1
KJG-M9746-00 BELT
1 B
Í
39
2
KJG-M4880-00
AC SERVO MOTOR ASSY
1 B
Í
40
3
91312-03006 BOLT HEX. SOCKET HEAD
14 41
4 42
5 43
6
44
7
45
8
46
9
47
10 48
11 49
12 50
13 51
14 52
15 53
16 54
17 55
18
56
19
57
20
58
21
59
22 60
23 61
24 62
25 63
26 64
27 65
28 66
29 67
30 68
31 69
32 70
33 71
34 72
35 73
36 74
37 75
38 76
14
2
LU AXIS
Wafer Ejector Changer Unit
KJG-0911
4
1
5
2
6
7 7 7
3
14
3
Ejector Housing & Pin
Wafer Ejector Changer Unit