PS288_PS388_PS588_981-0424-002D - 第39页
■ Laser Safety ◘ Disposal of Laser Vacuum Filters PS Series Owner’s Manual 1—27 back work required for transportation an d disposal in a manner that meets applicable government (local, stat e, and federal—or equiva lent)…
Introduction ■ Laser Safety
1—26 Data I/O • 981-0424-002
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Serious burn hazard—Direct or diffuse laser radiation can cause
serious burns.
Blindness hazard
—Direct or diffuse laser radiation can damage
eyes.
Disposal of Laser Vacuum Filters
The laser marking system uses a vacuum to remove the smoke and
other by-products of the laser marking process. The smoke fumes
pass through a series of filters designed to remove airborne particles
from the operating environment. Material Safety Data Sheets (MSDS)
for materials being processed should be thoroughly evaluated and
the adequacy of provisions for fume extraction, filtering, and venting
should be carefully considered.
The exact composition of the materials trapped by the filters depends
upon the materials used by the semiconductor manufacturer to create
the device package. Dispose of the filters in accordance with the
facility’s hazardous waste policy and in a manner that meets all appli-
cable government (local, state, and federal—or equivalent) regula-
tions.
Review the following references for further information regarding
exposure criteria:
• ANSI Z136.1-1993, Standards for the Safe Use of Lasers, section 7.3.
• U.S. Government’s Code of Federal Registers: 29 CFR 1910,
subpart Z.
• Threshold Limit Values (TLVs) published by the American Confer-
ence of Environmental Industrial Hygienists (ACEIH).
Determining Hazardous Contents
The company contracted to dispose of your facility’s hazardous waste
may be required to perform a profile of the filter contents to deter-
mine the specific composition of the particulate matter. The manufac-
turer of the semiconductor devices being marked may be able to
provide a profile sheet describing the composition of their packaging
material.
Standard plastic device packages typically contain antimony hydroxide
as a fire retardant, the source of the antimony in the vacuum filters.
Other hazardous materials may also be present depending upon the
type of device packages that are laser marked.
After the initial profile is performed and on record with the company
that disposes of the facility’s hazardous waste, additional testing of
contaminated filters should not be needed unless the contents of the
device packages or type of device packages being marked changes
significantly.
The licensed hazardous waste disposal company can provide the nec-
essary information to label the bags containing the filters and paper-
Analysis of filter con-
tents obtained following
marking a representa-
tive variety of devices
has revealed a sufficient
level of hazardous
materials, such as anti-
mony and other heavy
metals, to require that
the filter be treated as
hazardous waste.
■ Laser Safety ◘ Disposal of Laser Vacuum Filters
PS Series Owner’s Manual 1—27
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work required for transportation and disposal in a manner that meets
applicable government (local, state, and federal—or equivalent) haz-
ardous waste regulations.
Filter Handling and Storage
The procedure for replacing the laser vacuum filters is described in
the Fume Extractor manual and repeated in Laser Marking Filters on
page 4-41.
Introduction ■ Room Considerations
1—28 Data I/O • 981-0424-002
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Room Considerations
When planning the space and environment for a PS Machine installa-
tion, consider ventilation and access for maintenance and repair.
Ventilation
Summary— Regarding ventilation, the minimum room size for any
PS System is 3 x 3 meters x 2.4 meters high (10 x 10 x 8 feet). However,
access space for a some machines require a larger room; see Access
Space below.
The PS System, and its optional components such as a Label or Laser
Marking System, contain mechanical components and electrical sys-
tems that generate heat and extremely low levels of particulate
matter.
The room should have suitable levels of general room heating, venti-
lation, and air conditioning. For an occupied office area, the Amer-
ican Society of Heating, Refrigeration, and Air Conditioning
Engineers, Inc. (ASHRAE) Standard 62-1992 specifies a minimum of
15 cubic feet/minute (CFM) (0.424 cubic meters/minute) of air per
occupant. This level of ventilation is intended to provide the occu-
pants of the room with sufficient air movement to provide a comfort-
able environment.
However, because the PS System generates heat, an additional 85
CFM (2.40 meter
3
/minute) is recommended, bringing the total room
air exchange rate to 100 CFM (2.83 meter
3
/minute). In a room with
dimensions of 10 feet by 10 feet, with an 8 foot ceiling (800 cubic feet
of total interior area), 100 CFM would provide approximately six
room air changes per hour. (Metric room: 3.0 M x 3.0 M x 2.4 M
ceiling equals 22.65 cubic Meters of total interior area).
Based on industrial hygiene monitoring performed during the worst
case operating scenario of a PS System with Laser Marking, this rate
of air movement is sufficient to provide a safe and healthy work envi-
ronment regarding air quality.
Access Space
The PS System should be located in a room with adequate space to
allow easy access to all enclosures. A minimum of one meter (36
inches) of clearance on all sides is required for removal of system
components.
The table below lists recommended, minimum envelope size deter-
mined by the 1 meter access space required on each side:
The air movement is
intended to dissipate
heat, odors, and other
exhalation products
from respiration such as
carbon dioxide and
water vapor.