DFD6361-Maintenance - 第10页

Contents-4 CONTENTS 4. Senso r/Solenoid V alve Check .............................................................. C-27 ÿ 4-1. I/O Check ..................................................................................…

Contents-3

CONTENTS

3-7. Changing the UV Irradiation Unit Frame Size [OptionalAccessory].............B-103ÿ

3-7-1. Shutting off power...............................................................................B-104ÿ

3-7-2. Removing the inspection plate............................................................B-105ÿ

3-7-3. Changing the frame size.....................................................................B-108ÿ

3-7-4. Completion of the frame size change.................................................. B-110ÿ

4. Sensor Adjustment..............................................................................B-111ÿ

4-1. Pressure Sensor........................................................................................... B-112ÿ

4-1-1. Initial setting........................................................................................ B-113ÿ

4-1-2. Pressure setting.................................................................................. B-117ÿ

4-1-3. Zero clearance....................................................................................B-121ÿ

4-2. Air Pressure Sensor Adjustment...................................................................B-122ÿ

4-2-1. Adjusting the air pressure sensor........................................................B-123ÿ

4-2-2. Checking operation of the air pressure sensor....................................B-125ÿ

4-3. Setting a Monitor Value of Clean Air Pressure..............................................B-128ÿ

4-4. Setting a Monitor Value of Deionized Water Pressure..................................B-131ÿ

4-5. Setting a Monitor Value of Vacuum Pressure ...............................................B-134ÿ

5. Adjusting Utilities for Spinner Atomizing Nozzle

[OptionalAccessory]............................................................................B-137

C. ENGINEERING MAINTENANCE

OPERATIONS.....................................................C-1

1. Calling up ENGINEERING MAINTENANCE Screen [Screen 7.0] ..........C-3ÿ

2. Hub Mount/Flange Conditioning............................................................. C-5ÿ

2-1. Movement in Conditioning................................................................................C-6ÿ

2-1-1. Flange conditioning.................................................................................C-7ÿ

2-1-2. Hub mount conditioning..........................................................................C-8ÿ

2-2. Executing Conditioning.....................................................................................C-9ÿ

2-2-1. Replacing the chuck table.....................................................................C-11ÿ

2-2-2. Verifying FLANGE DRESSING screen data..........................................C-12ÿ

2-2-3. Executing conditioning..........................................................................C-15ÿ

2-2-4. Checking the end face accuracy...........................................................C-19ÿ

2-2-5. Completion of conditioning....................................................................C-21ÿ

3. Axis Operation Check........................................................................... C-22ÿ

Contents-4

CONTENTS

4. Sensor/Solenoid Valve Check.............................................................. C-27ÿ

4-1. I/O Check .......................................................................................................C-28ÿ

4-2. Axis Sensor Check .........................................................................................C-38ÿ

5. Customizing Setting ............................................................................. C-42ÿ

5-1. Setting on USER DEFINE DATA Screen [Screen 7.4]....................................C-43ÿ

6. Device Data Maintenance .................................................................... C-50ÿ

6-1. Deleting Device Data......................................................................................C-51ÿ

6-2. Moving Device Data.......................................................................................C-52ÿ

6-3. Deleting Directories........................................................................................C-54ÿ

6-4. Renaming Directories.....................................................................................C-56ÿ

6-5. Changing Values of Device Data....................................................................C-57ÿ

7. Maintenance Scheduler........................................................................ C-64ÿ

7-1. Calling up the MAINTENANCE SCHEDULER Screen...................................C-65ÿ

7-2. Updating LAST MENT DATE..........................................................................C-68ÿ

7-3. Changing DAYS SET......................................................................................C-69ÿ

7-4. Changing the Maintenance ITEM...................................................................C-70ÿ

7-5. Deleting the Maintenance ITEM.....................................................................C-71ÿ

8. Maker Data........................................................................................... C-72ÿ

9. SECS/GEM Setup [User-Specified Specification]................................. C-73ÿ

D. TROUBLESHOOTING........................................D-1

1. Remedies for Problems Invoking No Error Code Indication

- Problems at Power ON - ...................................................................... D-2ÿ

1-1. Main Circuit Breaker Problems.........................................................................D-3ÿ

1-2. Main Power Supply Problems ..........................................................................D-4ÿ

1-3. POWER Lamp (Power-On Lamp) Problems ....................................................D-6ÿ

1-4. Touch Panel Problems......................................................................................D-7ÿ

1-5. Microscope Light Source Problems................................................................D-10ÿ

1-6. EMO Switch Problems....................................................................................D-11ÿ

2. Remedies for Problems Invoking Error Code Indication ....................... D-12ÿ

2-1. Error Code Classification................................................................................D-13ÿ

Contents-5

CONTENTS

2-2. Error Code List...............................................................................................D-14ÿ

2-3. Remedies for Errors Requiring Emergent Stop ..............................................D-21ÿ

2-4. Remedies for Blade/Setup-Related Errors .....................................................D-50ÿ

2-5. Remedies for Valve-Related Errors................................................................D-76ÿ

2-6. Remedies for Alignment-Related Errors.......................................................D-106ÿ

2-7. Remedies for Kerf Check-Related Errors.....................................................D-121ÿ

2-8. Axis-Related Error Remedies.......................................................................D-133ÿ

2-9. Remedies for Other Errors ...........................................................................D-144ÿ

E. MAINTENANCE AND

PERIODIC INSPECTION....................................E-1

1. Maintenance Whose Interval Differs Depending on

the Machine Use Conditions of the Device............................................. E-3ÿ

1-1. Cleaning the Non-Contact Setup Sensor (Detection Surface)

[OptionalAccessory].........................................................................................E-4ÿ

1-1-1. Calling up the NCS SENSOR CLEANING screen [screen 4.8]...............E-6ÿ

1-1-2. Cleaning of the non-contact setup sensor...............................................E-8ÿ

1-1-3. Cleaning the non-contact setup sensor with abrasives

[Optional accessory]............................................................................E-10ÿ

1-1-4. Adjusting the non-contact setup amplifier .............................................E-12ÿ

1-1-5. Completion of cleaning the non-contact setup sensor ..........................E-16ÿ

1-2. Cleaning the Blade Breakage Detector Sensor..............................................E-17ÿ

1-2-1. Removing the blade breakage detector................................................E-18ÿ

1-2-2. Cleaning the blade breakage detector sensor ......................................E-20ÿ

1-2-3. Adjusting the amplifier of blade breakage detector...............................E-23ÿ

1-2-3-1. Moving the Y (Y1, Y2)-axis....................................................................................E-26ÿ

1-2-3-2. Removing the partition (left) ..................................................................................E-27ÿ

1-2-3-3. Adjusting the amplifier of blade breakage detector...............................................E-29ÿ

1-2-4. Completion of cleaning the blade breakage detector sensor................E-30ÿ

1-3. Cleaning the Spindle ......................................................................................E-31ÿ

1-3-1. Removing the blade and flange/hub mount ..........................................E-34ÿ

1-3-2. Removing the wheel cover....................................................................E-35ÿ

1-3-3. Cleaning the spindle main body............................................................E-37ÿ

1-3-4. Completion of spindle cleaning.............................................................E-38ÿ

FYI: Possible problems of the spindle due to stains........................................E-38ÿ

1-4. Cleaning the Touch Panel...............................................................................E-39ÿ