DFD6361-Maintenance - 第14页

Contents-8 CONTENTS 1-1-4. Completion o f replacing the air clean unit cons umable part s .................F-1 1 ÿ 1-2. Replacing the Halogen Lam p ........................................................................…

Contents-7

CONTENTS

6-2-4. Greasing the X-axis ..............................................................................E-87ÿ

6-2-5. Completion of greasing the X-axis........................................................E-88ÿ

6-3. Greasing the Push-PullAxis...........................................................................E-89ÿ

6-3-1. Preparation of greasing the push-pull axis............................................E-92ÿ

6-3-2. Greasing the push-pull axis ..................................................................E-95ÿ

6-3-3. Completion of greasing the push-pull axis............................................E-96ÿ

6-4. Greasing the Upper Arm Axis.........................................................................E-97ÿ

6-4-1. Preparation of greasing the upper arm axis........................................E-100ÿ

6-4-2. Greasing the upper arm axis...............................................................E-101ÿ

6-4-3. Completion of greasing the upper arm axis ........................................E-104ÿ

6-5. Greasing the LowerArm Axis.......................................................................E-105ÿ

6-5-1. Preparation of greasing the lower arm axis.........................................E-108ÿ

6-5-2. Greasing the lower arm axis ...............................................................E-109ÿ

6-5-3. Completion of greasing the lower arm axis......................................... E-112ÿ

6-6. Greasing the θ-axis SensorAssembly Section............................................. E-113ÿ

6-6-1. Preparation of greasing the θ-axis sensor assembly section.............. E-115ÿ

6-6-2. Greasing the θ-axis sensor assembly section..................................... E-116ÿ

6-6-3. Completion of greasing the θ-axis sensor assembly section............... E-117ÿ

6-7. Greasing the Y-axis...................................................................................... E-118ÿ

6-7-1. Cleaning the central part of the Y-axis ................................................E-120ÿ

6-7-2. Cleaning the front and rear edge of the Y-axis....................................E-122ÿ

6-7-3. Greasing the rear of the Y-axis............................................................E-123ÿ

6-7-4. Completion of greasing the Y-axis.......................................................E-124ÿ

6-8. Greasing the Z-axis......................................................................................E-125ÿ

6-8-1. Preparation of greasing the Z1-axis....................................................E-128ÿ

6-8-2. Greasing the Z1-axis...........................................................................E-130ÿ

6-8-3. Preparation of greasing the Z2-axis....................................................E-131ÿ

6-8-4. Greasing the Z2-axis...........................................................................E-133ÿ

6-8-5. Completion of greasing the Z-axis ......................................................E-134ÿ

F. CONSUMABLE PARTS REPLACEMENT...........F-1

1. Consumables to Be Replaced at 365-Day

(Recommended) Intervals.......................................................................F-2ÿ

1-1. Replacing the Air Clean Unit Consumable Parts.............................................. F-3ÿ

1-1-1. Preparation of replacing the air clean unit consumable parts..................F-6ÿ

1-1-2. Replacing the mist separator element..................................................... F-7ÿ

1-1-3. Replacing the air filter............................................................................. F-9ÿ

Contents-8

CONTENTS

1-1-4. Completion of replacing the air clean unit consumable parts.................F-11ÿ

1-2. Replacing the Halogen Lamp......................................................................... F-12ÿ

1-2-1. Preparation of replacing the halogen lamp ...........................................F-13ÿ

1-2-2. Replacing the halogen lamp .................................................................F-14ÿ

1-3. Replacing the Microscope LED Light .............................................................F-16ÿ

1-4. Replacing the Spindle Carbon Brush..............................................................F-17ÿ

1-4-1. Preparation of replacing the spindle carbon brush................................ F-18ÿ

1-4-1-1. Preparation of replacing the spindle 1 carbon brush.............................................F-18ÿ

1-4-1-2. Preparation of replacing the spindle 2 carbon brush.............................................F-22ÿ

1-4-2. Removing the waterproof cap............................................................... F-23ÿ

1-4-3. Replacing the carbon brush assembly.................................................. F-25ÿ

1-4-4. Completion of replacing the spindle carbon brush................................ F-28ÿ

1-4-4-1. Completion of replacing the spindle 1 carbon brush.............................................F-28ÿ

1-4-4-2. Completion of replacing the spindle 2 carbon brush.............................................F-29ÿ

1-5. Replacing the Spray Tip of the Spinner Section..............................................F-30ÿ

1-5-1. Preparation of replacing the spray tip ...................................................F-31ÿ

1-5-2. Replacing the spray tip .........................................................................F-33ÿ

1-5-3. Completion of replacing the spray tip....................................................F-36ÿ

1-6. Replacing the Pad of the UpperArm Section................................................. F-37ÿ

1-7. Replacing the Pad of the LowerArm Section................................................. F-40ÿ

1-8. Replacing the Y-axis Section Roll Cover ........................................................F-43ÿ

1-8-1. Preparation of replacing the Y-axis section roll cover............................ F-45ÿ

1-8-2. Replacing the Y-axis section roll cover.................................................. F-48ÿ

1-8-3. Completion of replacing the Y-axis section roll cover............................F-51ÿ

2. Consumables to Be Replaced at 700-Day

(Recommended) Intervals.....................................................................F-52ÿ

2-1. Replacing the Spindle Coolant Water Flow Rate Sensor................................ F-53ÿ

2-1-1. Removing the machine outer cover ...................................................... F-54ÿ

2-1-2. Replacing the flow rate sensor.............................................................. F-56ÿ

2-1-3. Completion of replacing the flow rate sensor........................................ F-58ÿ

2-2. Replacing the Solenoid Valve......................................................................... F-60ÿ

2-2-1. Removing the machine outer cover ...................................................... F-61ÿ

2-2-2. Replacing the solenoid valve ................................................................ F-63ÿ

2-2-3. Completion of replacing the solenoid valve...........................................F-66ÿ

3. Consumables to Be Replaced at 1000-Day

(Recommended) Intervals.....................................................................F-67

3-1. Replacing the Bellows....................................................................................F-68ÿ

3-1-1. Preparation of replacing the bellows.....................................................F-69ÿ

Contents-9

CONTENTS

3-1-2. Replacing the bellows........................................................................... F-70ÿ

3-1-3. Completion of replacing the bellows ..................................................... F-73ÿ

3-2. Replacing the Waterproof Cover/O-ring/V-ring for θ-axis................................ F-74ÿ

3-2-1. Removing the chuck table.....................................................................F-75ÿ

3-2-2. Removing the frame clump................................................................... F-76ÿ

3-2-3. Replacing the waterproof cover/O-ring/V-ring....................................... F-80ÿ

3-2-4. Completion of replacing the waterproof cover/O-ring/V-ring .................F-83ÿ

3-3. Replacing the Chuck Table Center Ring.........................................................F-86ÿ

3-4. Replacing the Spinner Table O-ring................................................................F-87ÿ

3-4-1. Removing the spinner table ..................................................................F-88ÿ

3-4-2. Replacing the O-ring.............................................................................F-89ÿ

4. Consumables to Be Replaced at 1800-Day

(Recommended) Intervals.....................................................................F-90

4-1. Replacing the Flowmeter................................................................................F-91ÿ

4-1-1. Removing the machine outer cover ...................................................... F-92ÿ

4-1-2. Replacing the flowmeter .......................................................................F-94ÿ

4-1-3. Completion of replacing the flowmeter.................................................. F-95ÿ

4-2. Replacing the Hard Disk Drive .......................................................................F-96ÿ

5. Consumables Whose Replacement Intervals Differ Depending on

the Machine Use Conditions..................................................................F-97

5-1. Replacing the Consumable Parts of the Spinner High-Pressure Pump..........F-98ÿ

5-1-1. Removing the machine outer cover .................................................... F-101ÿ

5-1-2. Disconnecting piping of the spinner high-pressure pump ................... F-102ÿ

5-1-3. Replacing the consumable parts of

the spinner high-pressure pump..........................................................F-103ÿ

5-1-3-1. Disassembling the spinner high-pressure pump.................................................F-104ÿ

5-1-3-2. Replacing the consumable parts.........................................................................F-106ÿ

5-1-3-3. Assembling the spinner high-pressure pump......................................................F-107ÿ

5-1-4. Completion of replacing the consumable parts of

the spinner high-pressure pump..........................................................F-108ÿ

5-2. Replacing the Fluorescent Lamp..................................................................F-109ÿ

5-2-1. Preparation of replacing the fluorescent lamp......................................F-110ÿ

5-2-2. Replacing the fluorescent lamp............................................................F-112ÿ

5-2-3. Completion of replacing the fluorescent lamp......................................F-113ÿ

5-3. Replacing the UV Irradiation Lamp [Optional Accessory]..............................F-114ÿ

5-3-1. Shutting off power................................................................................F-116ÿ

5-3-2. Preparation of replacing the UV irradiation lamp..................................F-117ÿ

5-3-3. Replacing the UV irradiation lamp........................................................F-118ÿ

5-3-4. Completion of UV irradiation lamp replacement.................................. F-120ÿ