DFD6361-Maintenance - 第174页

B-102 3-6. Co mpletion of Frame Size Ch ange Procedures for com pletion of frame size ch ange Step No. Do Th is (Continued from the previous section) 1 Specify the frame name at the [New frame name] column on the CHANGE …

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B-101
Procedures for changing the frame clamp size (Continued)
Step No. Do This
5
(Continued)
The locations of the frame size positioning holes are as shown
bellow.
for 2-6-1,2-6
for 2-5-1
for 2-8-1
[DFD6351]
for 2-8-1
for 212
[DFD6361]
Table base Table base
Four frame clamps are mounted on the chuck table.
Frame clamps
6
Close the front arm section cover.
Continued in the next section.
B-102
3-6. Completion of Frame Size Change
Procedures for completion of frame size change
Step No. Do This
(Continued from the previous section)
1
Specify the frame name at the [New frame name] column on the
CHANGE FRAME SIZE screen [screen 6.1]
- In the example screen shown below, the new frame name is
"2-12".
Press the <ENTER> button to finalize the data.
ÿ
Select data here
2
When the chuck table replacement is required, replace the chuck
table.
- About the chuck table replacement;
See the section 1 of this chapter, [Chuck Table Replacement].
3
After completion of maintenance, close the arm section cover.
4
Press the <System Initial> button to effect system initialization.
B-103
3-7. Changing the UV Irradiation Unit Frame Size
[Optional Accessory]
Safety precautions for changing the UV irradiation unit frame size
WARNING
- Since the UV irradiation unit has the N
2
purge specification. If the N
2
gas is filled and cause oxygen deficiency, it may lead to critical
condition or death.
To maintain proper oxygen concentration, sufficiently ventilate the
purge section before performing maintenance.
The oxygen concentration lowers while N
2
gasissuppliedor
immediately after stopping its supply. During such periods, do not
position your face near the N
2
gas discharge section.
- If the operation described in this section is performed while the UV
irradiation lamp is illuminated, exposure under the harmful
ultraviolet rays and ozone may cause vision and skin disorders.
Before starting the work, be sure to turn OFF the machine power.
Before operation
Have on hand the following tool.
- 3 mm Allen wrench
Operation flow
The operational procedures are summarized as follows.
3-7-1 Shutting off power
3-7-2 Removing the inspection plate
3-7-3 Changing the frame size
3-7-4 Completion of the frame size change