DFD6361-Maintenance - 第179页
B-107 Procedur es for re moving the ins pection plate (Continu ed) Step No. Do This 4 Remove the sc rew (M4) of the inspection plate . Inspection plat e Screws (M 4) 5 Take the inspection plate out from the inspection wo…
B-106
Procedures for removing the inspection plate (Continued)
Step No. Do This
3
Hold the part of the inspection cover, as shown below, and then
pull the cover to open it.
Hold this part.
Inspection cover
Inspection plate
B-107
Procedures for removing the inspection plate (Continued)
Step No. Do This
4
Remove the screw (M4) of the inspection plate.
Inspection plate
Screws (M4)
5
Take the inspection plate out from the inspection workpiece door.
Continued in the next section.
B-108
3-7-3. Changing the frame size
Procedures for changing the frame size
Step No. Do This
(Continued from the previous section)
1
Remove the irradiation shield plate.
2
Replace the irradiation shield plate.
Irradiation shield plate
Glass plate
Part Name Part No.
300mm Plate (SUS) MOJMNA22
8" Plate (SUS) MOJMNA23
3
Remove the stopper bolt on the backside of the inspection plate.
Then fit it to the position corresponding with the frame size.
212
2-8-1
Stopper bolt
Front
Backside of the inspection plate