DFD6361-Maintenance - 第181页
B-109 Procedures f or cha nging the fra me size (C ontinued) Step No. Do This 4 Remove the guide on the backside of the inspectio n plate. Then fit it to the position corresponding with the frame size. - Make sure that t…
B-108
3-7-3. Changing the frame size
Procedures for changing the frame size
Step No. Do This
(Continued from the previous section)
1
Remove the irradiation shield plate.
2
Replace the irradiation shield plate.
Irradiation shield plate
Glass plate
Part Name Part No.
300mm Plate (SUS) MOJMNA22
8" Plate (SUS) MOJMNA23
3
Remove the stopper bolt on the backside of the inspection plate.
Then fit it to the position corresponding with the frame size.
212
2-8-1
Stopper bolt
Front
Backside of the inspection plate
B-109
Procedures for changing the frame size (Continued)
Step No. Do This
4
Remove the guide on the backside of the inspection plate. Then
fit it to the position corresponding with the frame size.
- Make sure that the guide fits over the two mounting holes
correctly.
212
2-8-1
212
2-8-1
Guide
Front
Backside of the inspection plate
5
Reinstall the inspection plate to its the original position.
6
Attach the screw (M4) of the inspection plate.
7
Close the inspection cover.
8
Close the cassette stage.
9
Tighten the retaining screw of the cassette stage.
Continued in the next section.
B-110
3-7-4. Completion of the frame size change
Procedures for completion of the frame size change
Step No. Do This
(Continued from the previous section)
1
Turn ON the facility power source.
2
Open the circuit breaker lever lock and turn ON the circuit
breaker.
3
Insert the key into the main switch and turn ON the main switch.
- The machine power is turned ON.