DFD6361-Maintenance - 第184页
B-112 4-1. Pressure Sensor About press ure sensor Pressure sensors continuously monitor the pressure of the utilities supplied to the machine. When it det ects irregularities in the pressure, i t sounds an alar m to aler…
B-111
4. Sensor Adjustment
Summary of this section
This section describes the adjustment procedures for the pressure sensor.
Section No. Title Contents
4-1 Pressure Sensor - Description of the pressure
sensor
- Setting value of the pressure
sensor
- Procedures for adjusting the
pressure sensor
4-2 Air Pressure Sensor
Adjustment
- Procedure for adjusting the air
pressure sensor
4-3 Setting a Monitor Value
of clean air Pressure
- Procedure for setting a monitor
value of the clean air pressure
4-4 Setting a Monitor Value
of Deionized Water
Pressure
- Procedure for setting a monitor
value of the deionized water
pressure
4-5 Setting a Monitor Value
of Vacuum Pressure
- Vacuum pressure control
mechanism
- Procedure for setting a monitor
value of the vacuum pressure
B-112
4-1. Pressure Sensor
About pressure sensor
Pressure sensors continuously monitor the pressure of the utilities supplied to
the machine. When it detects irregularities in the pressure, it sounds an alarm
to alert the operators the abnormalities.
In DFD6351 and DFD6361 machines, among the monitored pressures shown
below, only the air pressure is monitored by a predefined threshold of the
pressure sensor. As for other pressures, the machine software controls them by
directly reading the measured value of each pressure sensor.
Setting values of the pressure sensor
The recommended setting value of each pressure sensors are as listed below.
Name Monitoring Setting value Positive/Negative
pressure
AIR Air pressure 0.4MPa Positive
CLEAN AIR Clean air pressure Set by software
Recommended:
0.20MPa
Positive
D.I.WATER Deionized water
pressure
Set by software
Recommended:
0.15MPa
Positive
- Chuck table
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Chuck table
workpiece
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Spinner table
vacuum
Set by software
Recommended:
-40.7 to -53.3 kPa
Negative
- Upper arm
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Lower arm
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
B-113
Operation flow
This setting procedure is required only for the air pressure sensor. The
adjustment of the air pressure sensor consists of the following steps.
4-1-1 Initial setting
4-1-2 Pressure setting
4-1-3 Zero clearance
4-1-1. Initial setting
Procedure of initial setting
Step No. Do This
1
Remove the cover [U]. The store it sufficiently away from the
working area.
[U]
LEFT SIDE