DFD6361-Maintenance - 第185页
B-113 Operation flow This setting procedure is required onl y for the air pressure sensor. The adjustment of the air pressure sensor consists of the following ste ps. 4-1-1 Initial se tting 4-1-2 Pressure setting 4-1-3 Z…
B-112
4-1. Pressure Sensor
About pressure sensor
Pressure sensors continuously monitor the pressure of the utilities supplied to
the machine. When it detects irregularities in the pressure, it sounds an alarm
to alert the operators the abnormalities.
In DFD6351 and DFD6361 machines, among the monitored pressures shown
below, only the air pressure is monitored by a predefined threshold of the
pressure sensor. As for other pressures, the machine software controls them by
directly reading the measured value of each pressure sensor.
Setting values of the pressure sensor
The recommended setting value of each pressure sensors are as listed below.
Name Monitoring Setting value Positive/Negative
pressure
AIR Air pressure 0.4MPa Positive
CLEAN AIR Clean air pressure Set by software
Recommended:
0.20MPa
Positive
D.I.WATER Deionized water
pressure
Set by software
Recommended:
0.15MPa
Positive
- Chuck table
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Chuck table
workpiece
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Spinner table
vacuum
Set by software
Recommended:
-40.7 to -53.3 kPa
Negative
- Upper arm
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
- Lower arm
vacuum
Set by software
Recommended:
-66.7 to -73.3 kPa
Negative
B-113
Operation flow
This setting procedure is required only for the air pressure sensor. The
adjustment of the air pressure sensor consists of the following steps.
4-1-1 Initial setting
4-1-2 Pressure setting
4-1-3 Zero clearance
4-1-1. Initial setting
Procedure of initial setting
Step No. Do This
1
Remove the cover [U]. The store it sufficiently away from the
working area.
[U]
LEFT SIDE
B-114
Procedure of initial setting (Continued)
Step No. Do This
2
Check the position of the pressure sensor to be adjusted.
- Every pressure sensor is in the "measurement mode".
- Each pressure sensor reads the current supply pressure of
utilities.
ÿ
Air pressure sensor
Clean air pressure sensor
Deionized water pressure sensor
3
Press the SET button for at least two seconds.
SET button