DFD6361-Maintenance - 第199页
B-127 Procedur es for checkin g operatio n of the air pressur e sensor (C ontinued) Step No. Do This 5 Pull up the regulator knob to unlock it. 6 Rotate the regulator knob counterclockwise to reduce the pressure. Then ve…
B-126
Procedures for checking operation of the air pressure sensor (Continued)
Step No. Do This
(Continued from the previous section)
1
Wear the protective gloves.
2
Verify that the spindle is completely stopped.
3
Remove the outer cover [A] and [B].
FRONT SIDE
[B][A]
4
Store the outer cover sufficiently away from the working area.
B-127
Procedures for checking operation of the air pressure sensor (Continued)
Step No. Do This
5
Pull up the regulator knob to unlock it.
6
Rotate the regulator knob counterclockwise to reduce the
pressure. Then verify that an error occurs with the alarm beeping
at the pressure level which was predetermined with the air
pressure sensor within the internal facilities control cover.
Regulator knob
Unlock
Lock
Reduce the
pressure
7
After verification, while checking the air pressure sensor, rotate
the regulator knob until the air pressure sensor reading reverts to
approximately 0.5MPa.
8
Press down the regulator knob to lock it.
9
Press the <Alarm Clr> button on the touch panel to clear the
alarm.
10
Reinstall the removed cover [A] and [B].
B-128
4-3. Setting a Monitor Value of Clean Air Pressure
Procedures for setting monitor value of clean air pressure
CAUTION
When you perform maintenance with the outer cover removed,
observe the following precaution. If you stand the removed outer
cover against the machine, you may receive injury by the cover if it is
toppled by the earthquake or like that.
When you take off the outer cover for maintenance purposes, store it
sufficiently away from the working area.
Step No. Do This
1
Remove the cover [U]. The store it sufficiently away from the
working area.
[U]
LEFT SIDE