DFD6361-Maintenance - 第209页

B-137 5. Adjusting Utilities for S pinner Atomizing N ozzle [Optional Accessory] Summary of this sectio n This section describes ho w to adjust the air pressu re of clean ai r and flow r ate of cleanin g water of spinner…

B-136

Procedures for setting a monitor value of vacuum pressure (Continued)

Step No.

Do This

Press the <F6> button on the MACHINE MAINTENANCE screen

[screen 6.0].

- The SENSOR THRESHOLD DATA screen [screen 6.6] is called

up.

[1]

[4]

[2]

[3]

Specify the value of [4].

- As a "lower limit", specify an intermediate value between the

target pressure when a workpiece is placed on the chuck table

and the one when no workpiece is located on the table.

While checking the pressure of [C/T TABLE VACUUM] with a

workpiece placed on the chuck table, enter necessary values to [1],

[2] and [3].

[1]Targetpressure

Enter a target vacuum pressure to reach during vacuum ON. The

smaller this value is, the longer the air will be supplied to the

ejector, which reduces the air-saving effect.

[2] Pressure to resume vacuuming

When the pressure drops to the value defined here, the air supply

to the ejector will be resumed.

If the value of [2] is close to [1], the duration of air supply will

increase, which reduces the air-saving effect.

[3] Lower limit

Enter a threshold to determine whether or not a chuck table is

secured.

Press the <ENTER> button after inputting all the values of [1]

through [4].

- The machine updates the data.

B-137

5. Adjusting Utilities for Spinner Atomizing Nozzle

[Optional Accessory]

Summary of this section

This section describes how to adjust the air pressure of clean air and flow rate

of cleaning water of spinner atomizing nozzle in the machines which

incorporates the atomizing nozzle as an optional accessory.

Safety precautions for utility adjustment of spinner atomizing nozzle

WARNING

- In the digital I/O check procedures, touch panel buttons except for

function buttons are inoperative.

The personnel performing digital I/O checkout must bear this in

mind and exercise due care to ensure safety.

- In the digital I/O check procedures, the operation command for

solenoid valves and etc. can be forcibly turned ON and OFF by the

function buttons. In some cases, therefore, a cylinder may be

invoked to operate.

Ensure that no person other than the maintenance personnel

touches the machine during this procedure.

- If any touch panel control is inadvertently activated during

maintenance or inspection, unexpected machine operation may

cause death or serious injury.

While you don't use the touch panel, press the Disco's logo button

located at the upper left of the screen in order to lock up and

deactivate the touch panel.

CAUTION

When you perform maintenance with the outer cover removed,

observe the following precaution. If you stand the removed outer

cover against the machine, you may receive injury by the cover if it is

toppled by the earthquake or like that.

When you take off the outer cover for maintenance purposes, store it

sufficiently away from the working area.

B-138

Procedures for adjusting utilities of spinner atomizing nozzle

Step No. Do This

Remove the cover [U]. The store it sufficiently away from the

working area.

[U]

LEFT SIDE

Using the I/O CHECK screen, discharge the mixed fluid of clean

air and cleaning water from the spinner atomizing nozzle.

- For I/O CHECK screen;

See the section C-4-1, [I/O Check].