DFD6361-Maintenance - 第23页
A-7 2. Axis Section Summary of this sectio n This section desc ribes the structure and function of eac h axis. Section No. Titl e Contents 2- 1 A xis A rr ang eme nt - Axis ar rang emen t o f t he m ac hine 2-2 X-axis Se…
A-6
Structure of the top machine outer covers
To remove the top machine outer covers, unscrew the mounting screws.
[V]
TOP SIDE
Mounting screws
A-7
2. Axis Section
Summary of this section
This section describes the structure and function of each axis.
Section No. Title Contents
2-1 Axis Arrangement - Axis arrangement of the machine
2-2 X-axis Section - Component name of the X-axis
section
- Drive section mechanism of the X-
axis section
- Axis position detection sensor of the
X-axis section
2-3 Y (Y1 and Y2)-axis
Section
- Component name of the Y (Y1 and
Y2)-axis section
- Drive section mechanism of the Y
(Y1 and Y2)-axis section
- Axis position detection sensor of the
Y (Y1 and Y2)-axis section
2-4 Z (Z1 and Z2)-axis
Section
- Component name of the Z (Z1 and
Z2)-axis section
- Drive section mechanism of the Z
(Z1 and Z2)-axis section
- Axis position detection sensor of the
Z (Z1 and Z2)-axis section
2-5
θ -axis Section
- Component name of the θ axis
section
- Drive section mechanism of the
θ-axis section
- Axis position detection sensor of the
θ-axis section
2-6 Spinner Section - Component name of the spinner
section
- Mechanism of the spinner section
2-7 Elevator Section - Component name of the elevator
section
- Drive section mechanism of the
elevator section
- Cassette setting position
- Inspection cassette setting position
- Components of UV irradiation unit
A-8
Summary of this section (Continued)
Section No. Title Contents
2-8 Pre-alignment Section - Component name of the pre-
alignment section
- Mechanism of the pre-alignment
section
2-9 Transport Section - Component name of the transport
section
- Mechanism of the transport section
2-10 Microscope Section - Component name of the microscope
section
- Mechanism of the microscope section
2-11 Spindle-axis Section - Component name of the spindle-axis
section
- Mechanism of the spindle-axis
section
- Piping of the spindle-axis section
- Blade mounting to the spindle section