DFD6361-Maintenance - 第244页
C-32 DO list (Co ntinued) Area Displ ayed as Solenoid valve name 2048 Signal TW RED Stat us i ndi cator Red 2049 Signal TW YELLOW Stat us i ndica tor Y el low 2050 Signal TW GREEN Stat us i ndi cator Gree n 2051 Signal T…
C-31
DO list
Area Displayed as Solenoid valve name
0000 Shutdown Request
Shutdown request signal
2000 Power OFF
Safety relay OFF
2001 Driver Power OFF
Driver power OFF
2002 Spindle EM-STOP
Spindle emergency stop
2003 Hnd. -PMD EM-STOP
Handling PMD emergency stop
2004 UV LAMP ON/OFF
UV lamp valve
2005 UV N2 ON/OFF
UV clean air valve
2012 UV PLATE
UV glass plate up/down valve
2016 Cut Water Z1
Wheel coolant water 1 valve
2017 Cut Water Z2
Wheel coolant water 2 valve
2018 Water Curtain
Water curtain valve
2019 Drain Water Z1
Wheel coolant water 1 drain
2020 Drain Water Z2
Wheel coolant water 2 drain
2021 SP Clean Water
Spinner nozzle cleaning water valve
2022 NCS Water
Noncontact setup water valve
2023 Nozzle Alcohol
Spinner rinse (alcohol) valve
2024 C/T work Vacuum
Chuck table workpiece vacuum valve
2025 C/T work Air Blow
Chuck table workpiece air blow valve
2026 C/T table Air Blow
Chuck table air blow valve
2027 S/T work Air Blow
Spinnertableairblowvalve
2028 Hi-PUMP Release
High-pressure pump release valve
2031 Hi-Pres. PUMP
High-pressure pump
2032 C/T Vac. ON
Chuck table vacuum ON
2034 S/T Vac. ON
Spinner table vacuum ON
2035 S/T Vac. OFF
Spinner table vacuum OFF
2036 Up Arm Vac-ON
Upper arm vacuum ON
2037 Up Arm Vac-OFF
Upper arm vacuum OFF
2038 Low Arm Vac-ON
Lower arm vacuum ON
2039 Low Arm Vac-OFF
Lower arm vacuum OFF
2040 S/T UP/DOWN
Spinner table UP/DOWN
2041 C/T Clmp Open
Chuck table frame clamp open valve
2042 C/T Clmp Close
Chuck table frame clamp close valve
2043 NCS Cover CLOSE Z1
Noncontact setup cover Z1 close valve
2044 NCS Cover OPEN Z1
Noncontact setup cover Z1 open valve
2045 NCS Cover CLOSE Z2
Noncontact setup cover Z2 close valve
2046 NCS Cover OPEN Z2
Noncontact setup cover Z2 open valve
2047 Hi-Pres. Air
High-pressure pump air valve
C-32
DO list (Continued)
Area Displayed as Solenoid valve name
2048 Signal TW RED
Status indicator Red
2049 Signal TW YELLOW
Status indicator Yellow
2050 Signal TW GREEN
Status indicator Green
2051 Signal TW Spare1
Status indicator Spare 1
2052 Signal TW Spare2
Status indicator Spare 2
2053 Alarm Buzzer
Alarm buzzer
2054 Panel Buzzer
Operation panel buzzer
2055 Nozzle Clean Air Dry
Spinner clean air dry valve
2056 Clean Air Curtain
Clean air curtain valve
2057 NCS Clean Air Blow
Noncontact setup clean air blow valve
2058 Atomizer SP Clean Air
Atomizing nozzle clean air
2064 P.P Clamp ON
Push-pull frame clamp
2067 Up Arm Upward
Upper arm upward movement
2068 Up Arm Downward
Upper arm downward movement
2069 Up Arm Rightward
Upper arm rightward movement
2070 Up Arm Leftward
Upper arm leftward movement
2071 L arm U cy UP
Lower arm upper cylinder upward
movement
2072 L arm U cy DOWN
Lower arm upper cylinder downward
movement
2073 L arm L cy UP
Lower arm lower cylinder upward
movement
2074 L arm L cy DOWN
Lower arm lower cylinder downward
movement
2075 Hand-Cov Unlock
Arm section cover unlock valve
2076 Hand-Cov Lock
Arm section cover lock valve
2080 W. Cover CLOSE Z1
Wheel cover Z1 close valve
2081 W. Cover OPEN Z1
Wheel cover Z1 open valve
2082 W. Cover CLOSE Z2
Wheel cover Z2 close valve
2083 W. Cover OPEN Z2
Wheel cover Z2 open valve
2086 Z1 Setup Air Blow
Setup air blow 1 valve
2087 Z2 Setup Air Blow
Setup air blow 2 valve
2088 Micro Air Blow
Micro microscope Z1 clean air blow
valve
2089 Macro Air Blow
Macro microscope Z1 clean air blow
valve
2090 Clean Air Blow
Clean air blow valve (ON after system
initialization)
2093 Ionizer ON
Cassette front ionizer power
2094 Ionizer Spare
Ionizer spare
2095 Ionizer Spare
Ionizer spare
C-33
DO list (Continued)
Area Displayed as Solenoid valve name
2128 Micro Air Blow
Micro microscope Z2 clean air blow
valve
2144 Low Arm FRONT
Low arm FRONT
2145 Low Arm REAR
Low arm REAR
2146 Up Arm Release
Up arm release valve
2147 Low Arm Release
Low arm release valve