DFD6361-Maintenance - 第245页
C-33 DO list (Co ntinued) Area Displ ayed as Solenoid valve name 2128 Micro Air Blow Micro m icroscope Z 2 clean air blow val ve 2144 Low Arm FRONT Low arm FRONT 2145 Low Arm REAR Low arm REAR 2146 Up Arm Rele ase Up arm…
C-32
DO list (Continued)
Area Displayed as Solenoid valve name
2048 Signal TW RED
Status indicator Red
2049 Signal TW YELLOW
Status indicator Yellow
2050 Signal TW GREEN
Status indicator Green
2051 Signal TW Spare1
Status indicator Spare 1
2052 Signal TW Spare2
Status indicator Spare 2
2053 Alarm Buzzer
Alarm buzzer
2054 Panel Buzzer
Operation panel buzzer
2055 Nozzle Clean Air Dry
Spinner clean air dry valve
2056 Clean Air Curtain
Clean air curtain valve
2057 NCS Clean Air Blow
Noncontact setup clean air blow valve
2058 Atomizer SP Clean Air
Atomizing nozzle clean air
2064 P.P Clamp ON
Push-pull frame clamp
2067 Up Arm Upward
Upper arm upward movement
2068 Up Arm Downward
Upper arm downward movement
2069 Up Arm Rightward
Upper arm rightward movement
2070 Up Arm Leftward
Upper arm leftward movement
2071 L arm U cy UP
Lower arm upper cylinder upward
movement
2072 L arm U cy DOWN
Lower arm upper cylinder downward
movement
2073 L arm L cy UP
Lower arm lower cylinder upward
movement
2074 L arm L cy DOWN
Lower arm lower cylinder downward
movement
2075 Hand-Cov Unlock
Arm section cover unlock valve
2076 Hand-Cov Lock
Arm section cover lock valve
2080 W. Cover CLOSE Z1
Wheel cover Z1 close valve
2081 W. Cover OPEN Z1
Wheel cover Z1 open valve
2082 W. Cover CLOSE Z2
Wheel cover Z2 close valve
2083 W. Cover OPEN Z2
Wheel cover Z2 open valve
2086 Z1 Setup Air Blow
Setup air blow 1 valve
2087 Z2 Setup Air Blow
Setup air blow 2 valve
2088 Micro Air Blow
Micro microscope Z1 clean air blow
valve
2089 Macro Air Blow
Macro microscope Z1 clean air blow
valve
2090 Clean Air Blow
Clean air blow valve (ON after system
initialization)
2093 Ionizer ON
Cassette front ionizer power
2094 Ionizer Spare
Ionizer spare
2095 Ionizer Spare
Ionizer spare
C-33
DO list (Continued)
Area Displayed as Solenoid valve name
2128 Micro Air Blow
Micro microscope Z2 clean air blow
valve
2144 Low Arm FRONT
Low arm FRONT
2145 Low Arm REAR
Low arm REAR
2146 Up Arm Release
Up arm release valve
2147 Low Arm Release
Low arm release valve
C-34
Procedures for I/O check
WARNING
- In the I/O check procedures, touch panel buttons are inoperative.
Even if, for example, you press the <Cut Water> button, the wheel
coolant supply does not shut off.
The personnel performing I/O checkout must bear this in mind and
exercise due care to ensure safety.
- In the I/O check procedures, the operation command for solenoid
valves and etc. can be forcibly turned ON and OFF. In some cases,
therefore, a cylinder may be invoked to operate.
Ensure that no person other than the maintenance personnel
touches the machine during this procedure.
- If any unexpected machine operation is inadvertently invoked, the
maintenance personnel may be injured.
While you don't use the touch panel, press the Disco's logo button
located at the upper left of the screen in order to lock up and
deactivate the touch panel.
Step No. Do This
1
From the ENGINEERING MAINTENANCE screen [screen 7.0],
press the <F3> button.
- The I/O CHECK screen then appears.
2
INPUT area Displays INPUT status.
OUTPUT
area
You can perform OUTPUT operation check by
selecting the solenoid valve.