DFD6361-Maintenance - 第25页
A-9 2-1. Axis Arrangeme nt Axis arrang ement As shown below, the machine consists of the X-axis section, Y (Y1 and Y2)- axis section, Z (Z1 and Z 2)-axis secti on, θ -axis section, spindle (spindle1 and spindle2)-axis se…
A-8
Summary of this section (Continued)
Section No. Title Contents
2-8 Pre-alignment Section - Component name of the pre-
alignment section
- Mechanism of the pre-alignment
section
2-9 Transport Section - Component name of the transport
section
- Mechanism of the transport section
2-10 Microscope Section - Component name of the microscope
section
- Mechanism of the microscope section
2-11 Spindle-axis Section - Component name of the spindle-axis
section
- Mechanism of the spindle-axis
section
- Piping of the spindle-axis section
- Blade mounting to the spindle section
A-9
2-1. Axis Arrangement
Axis arrangement
As shown below, the machine consists of the X-axis section, Y (Y1 and Y2)-
axis section, Z (Z1 and Z2)-axis section, θ-axis section, spindle (spindle1 and
spindle2)-axis section, spinner section, elevator section, lower arm section,
upper arm section, push-pull arm section, frame centering section, main body
base, electrical system section and main body frame.
- The X-axis consists of the highly straight linear guide, ball-bearing
leadscrew section and θ-axis section located on the leadscrew section. Being
accurately positioned at right angles to the Y-axis, the X-axis moves to the
right and left.
- The Y (Y1 and Y2)-axis mainly consists of the indexing mechanism and
moves forward and rearward.
- The Z (Z1 and Z2)-axis mainly consists of the spindle and its vertical
movement mechanism.
Z1-axis section
Y1-axis section
Z2-axis section
Y2-axis section
Main body frame
Spindle2-axis section
X-axis section
θ-axis section
Main body base
Spindle1-axis section
A-10
Axis arrangement (Continued)
Upper arm section
Spinner section
Lower arm section
Push-pull arm section
Cassette stage
Elevator section
Frame centering section
Inspection Workpiece Door