DFD6361-Maintenance - 第3页

Hazard level The safety precautions set forth in this document a re classified into DANGER, WARN I NG and C AUTION catego ries which rep resent three de gree of hazards latent in the mac hine. These cate gories are defin…

READ CAREFULLY BEFORE USING THIS

MANUAL

Introduction

This machine is a dicing saw to cut materials such as silicon wafers and glass

substrates (referred collectively as "workpiece" hereafter).

The machine contains rotary sections with parts that operate at high speed;

high-voltage sections with danger of causing electric shock; drive sections

where the workers' physical parts and/or clothing may get caught.

If N

gas is used in placed of clean air, the machine also has a N

gas ejection

section that might have adverse effect on the human body.

Failure to handle this machine properly may lead to serious injury or death.

Read before using the machine

Before using the machine, read this manual thoroughly and follow strictly all

the instructions set forth in this manual.

To assure safety during work associated to operation and maintenance of this

machine, it is important for every worker to know where the potential safety

hazards lie in this machine. Although it is difficult for Disco to foresee each

and every potential safety hazard, various precautionary notes and warnings

have been included in this manual and the separate Safety Manual to identify

and provide preventive knowledge against all foreseeable hazards. Strict

observance of all these precautions and other relevant instructions set forth in

this manual and the separate Safety Manual is thus essential for increased

safety assurance.

The safety features of the machine may be seriously affected, in case this

machine is modified without gaining the prior consent from Disco or repaired

in a manner not stated in this manual.

Therefore, never attempt to modify or repair this machine in a manner not

approved by Disco.

Extent of responsibility

- Disco is not responsible for any accident due to any of the following events.

- When equipment of another manufacturer is added to the machine

- When the machine or part of the machine is transported, reused, resold or

modified

- When supplied parts or parts designed by users are mounted on the

machine

- It is possible that we are not able to carry out repair or maintenance work for

reasons of safety and health care of our service or repair personnel, if the

machine user refuses to disclose the names and contents of processing

materials being used and/or processing piping, for reasons of confidentiality

or trade secret protection.

Hazard level

The safety precautions set forth in this document are classified into DANGER,

WARNING and CAUTION categories which represent three degree of

hazards latent in the machine. These categories are defined as detailed below

in accordance with the seriousness and probability level of the hazard. In

addition to the above three safety precaution levels, CAUTION without the

safety alert symbol ( ) and NOTICE are used to give safety usage

instructions to the user.

Before using the machine, be sure to read and understand all the associated

safety precautions set forth in the manual.

Hazard levels are classified as follows:

DANGER

If you cannot avoid the incident in question, a critical

situation in which either critical injury or death is very

likely to result.

This symbol is used for the incident in which the injury

is critical and there is high probability of occurrence.

WARNING

If you cannot avoid the incident in question, a serious

situation in which either critical injury or death may

result.

This symbol is used for the incident in which the injury

is serious but there is not high probability of

occurrence.

CAUTION

If you cannot avoid the incident in question, a medium

or slight injury may result.

This symbol is used for the incident in which the injury

is slight and there is not high probability of occurrence.

CAUTION

If you cannot avoid the incident in question, an accident

of property damage may occur.

NOTICE

Indicates the safe way of using the machine as well as

precautions to avoid accidents resulting in damage to

property.

Safety label

Safety labels are affixed to the potentially hazardous sections of this machine.

Before using this machine, verify the label positions and thoroughly

understand the precautions and warning indicated by the safety labels.

Label Hazard Level Meaning of Label

Rotary Blade

Label

WARNING

It is possible that your hands and

fingers may be cut by the rotating

blade.

Observe the following precautions

for at least 15 seconds until the

spindle comes to a complete stop:

- Do not place your hands or fingers

near the blade or flange.

- Ensure that the cover is kept closed.

Spinner Label

CAUTION

It is possible that your hands and

fingers may be cut by the rotating

spinner or that serious injury may be

caused by scattered workpiece.

While the power is ON, do not

position your hands or fingers near

the spinner.

Driving Section

Label

CAUTION

It is possible that yours hands and

fingers may be caught and injured by

the driving section.

While the power is ON, ensure that

the cover is kept closed.

Electrical Shock

Hazard Label

WARNING

Use care to avoid possible electrical

shock hazard.

General Label

WARNING

General caution/warning/danger

label.