DFD6361-Maintenance - 第300页
D-15 Error wi th a code beg inning w ith "E" (C ontinu ed) Error Co de Message E1034 Clean air Pressure of S/T cleanin g water dropped. E1035 Water flow of S/T cleani ng water dropped.
D-14
2-2. Error Code List
Error with a code beginning with "E"
The error with a code beginning with the letter E requires an emergent stop of
the machine.
Please refer to the section 2-3, [Remedies for Errors Requiring Emergent Stop]
regarding the way to handle the error.
Error Code Message
E0002 EM switch pressed.
E0003 Insufficient main air ... Reinitialize.
E0007 UPS has been actuated.
E0008 Z EM is activated.
E0012 Splash cover opened.
E0014 Temperature in the electrical box has increased.
E0015 Water case overflow error.
E0016 Drain tank overflow error.
E0019 Insufficient N
2
(clean air) pressure.
E0020 Handling cover sensor error.
E0175 Process program error. Re-initialize system.
E0176 Cover open error.
E0190 Water leakage detected. (X-axis)
E0556 Z1-axis spindle cooling water flow error.
E0557 Z2-axis spindle cooling water flow error.
E0558 Z1-axis spindle inverter error. Re-start the machine.
E0559 Z2-axis spindle inverter error. Re-start the machine.
E0576 Pressure of water dropped.
E0665 Water leakage detected. (Spinner)
E0706 Z1 cut water flow(BLD F) lower limit
E0707 Z2 cut water flow(BLD F) lower limit
E0712 Z1 cut water flow (SHW) lower limit
E0713 Z2 cut water flow (SHW) lower limit
E0715 Z1 cut water flow (SP) lower limit
E0716 Z2 cut water flow (SP) lower limit
E1027 Cassette position error (Placement)
E1032 Inspection cover sensor error.
E1033
Water leakage detected. (θ-axis)
D-15
Error with a code beginning with "E" (Continued)
Error Code Message
E1034 Clean air Pressure of S/T cleaning water dropped.
E1035 Water flow of S/T cleaning water dropped.
D-16
Error with a code beginning with "B"
The error with a code beginning with the letter B represent blade or setup
errors.
Please refer to the section 2-4, [Remedies for Blade/Setup Related Errors]
regarding the way to handle the error.
Error Code Message
B0023 Spindle continuity error.
B0031 Setup data error.
B0562 Z1-axis at blade exposure limit.
B0563 Z2-axis at blade exposure limit.
B0564 Z1-axis at blade life limit.
B0565 Z2-axis at blade life limit.
B0582 Z1-axis calibrate sensor.
B0583 Z1-axis setup error (error detection.)
B0584 Z1-axis setup error (Z-axis position error.)
B0585 Z1-axis setup error (No detection.)
B0586 Z1-axis non-contact setup reappearance error.
B0587 Z1-axis blade wear check error.
B0588 Z1-axis setup data error.
B0589 Z2-axis calibrate sensor.
B0590 Z2-axis setup error (error detection.)
B0591 Z2-axis setup error (Z-axis position error.)
B0592 Z2-axis setup error (No detection.)
B0593 Z2-axis non-contact setup reappearance error.
B0594 Z2-axis blade wear check error.
B0595 Z2-axis setup data error.
B0660 Blade detective error. (Z1 partial blade breakage)
B0661 Blade detective error. (Z1 total blade breakage)
B0662 Blade detective error. (Z2 partial blade breakage)
B0663 Blade detective error. (Z2 total blade breakage)
B1133 Non-Contact setup check error.(Z1)
B1134 Non-Contact setup check error.(Z2)