DFD6361-Maintenance - 第302页
D-17 Error wi th a code beg inning w ith "V" Error codes be ginning with the let ter V represent v alve-related errors. Please re fer to the s ection 2-5, [R emedies for Val ve-Related E rrors] re garding the w…
D-16
Error with a code beginning with "B"
The error with a code beginning with the letter B represent blade or setup
errors.
Please refer to the section 2-4, [Remedies for Blade/Setup Related Errors]
regarding the way to handle the error.
Error Code Message
B0023 Spindle continuity error.
B0031 Setup data error.
B0562 Z1-axis at blade exposure limit.
B0563 Z2-axis at blade exposure limit.
B0564 Z1-axis at blade life limit.
B0565 Z2-axis at blade life limit.
B0582 Z1-axis calibrate sensor.
B0583 Z1-axis setup error (error detection.)
B0584 Z1-axis setup error (Z-axis position error.)
B0585 Z1-axis setup error (No detection.)
B0586 Z1-axis non-contact setup reappearance error.
B0587 Z1-axis blade wear check error.
B0588 Z1-axis setup data error.
B0589 Z2-axis calibrate sensor.
B0590 Z2-axis setup error (error detection.)
B0591 Z2-axis setup error (Z-axis position error.)
B0592 Z2-axis setup error (No detection.)
B0593 Z2-axis non-contact setup reappearance error.
B0594 Z2-axis blade wear check error.
B0595 Z2-axis setup data error.
B0660 Blade detective error. (Z1 partial blade breakage)
B0661 Blade detective error. (Z1 total blade breakage)
B0662 Blade detective error. (Z2 partial blade breakage)
B0663 Blade detective error. (Z2 total blade breakage)
B1133 Non-Contact setup check error.(Z1)
B1134 Non-Contact setup check error.(Z2)
D-17
Error with a code beginning with "V"
Error codes beginning with the letter V represent valve-related errors.
Please refer to the section 2-5, [Remedies for Valve-Related Errors] regarding
the way to handle the error.
Error Code Message
V0035 Cut data is illegal.
V0502 No workpiece in cassette.
V0503 Finger clamp error.
V0512 Workpiece vacuum error.
V0513 Spinner table vacuum error.
V0514 Spinner table up error.
V0515 Spinner table down error.
V0517 Spindle rpm error.
V0570 Pressure of S/T high pressure water dropped.
V0615 Error occurs in UV lamp.
V0624 Pressure of S/T high pressure water risen.
V1014 Up error (Lower arm Upper cylinder)
V1015 Down error (Lower arm Upper cylinder)
V1016 Up error (Lower arm Lower cylinder)
V1017 Down error (Lower arm Lower cylinder)
V1018 Upper Arm front end error.
V1019 Upper Arm rear end error.
V1020 Upper Arm up error.
V1021 Upper Arm down error.
V1022 Lower Arm front end error.
V1023 Lower Arm rear end error.
V1024 Upper Arm vacuum error.
V1025 Lower Arm vacuum error.
V1037 Remove the workpiece at UV Stage.
V1038 UV Glass plate close error.
V1039 UV Glass plate open error.
V1240 Can't Close Wheel Cover (Z1).
V1241 Can't Close Wheel Cover (Z2).
V1244 Can't Open Wheel Cover (Z1).
V1245 Can't Open Wheel Cover (Z2).
D-18
Error with a code beginning with "A"
Error codes beginning with the letter A represent alignment-related errors.
Please refer to the section 2-6, [Remedies for Alignment-Related Errors]
regarding the way to handle the error.
Error Code Message
A0531 Not found macro target.
A0532 Not found micro target.
A0533 Alignment time limit over.
A0534 Not found index check target.
A0535 Index check Y position error. (Y)
A0536 Index check X position error. (X)
A0537 Angle between channels error.
A0538 Theta adjustment retry over.
A0539 This work has been cut.
A0541 ANGLE: Slice level error.
A0542 ANGLE: Chip number is not enough.
A0543 ANGLE: Retry over.
A0551 The work thickness is thicker.
A0552 Focus maintenance has not been done.
A1164 Y axes will get near too much.