DFD6361-Maintenance - 第306页
D-21 2-3. Remedi es for Errors Requiri ng Emergent Stop E0002 : EM switch pr essed. Error c ode E0002 Message EM switch p ressed. W hat wa s detected The signa l input from the E MO switch wa s detected. During what oper…

D-20
Error with a code beginning with "X"
Error codes beginning with the letter X represent axis-related errors.
Please refer to the section 2-8, [Remedies for Axis-Related Errors] regarding
the rule of error code and detailed remedies.
Error Code Message
X•••0
-axis unrecoverable error. Restart the machine.
X•••1
-axis unknown error.(…..Reinitialize.)
X•••2
-axis servo error. Restart the machine.
X•••3
-axis CW end error.(…..Reinitialize.)
X•••4
-axis CCW end error.(…..Reinitialize.)
X•••5
-axis vibration error (near).(…..Reinitialize.)
X•••6
-axis vibration error (far).(…..Reinitialize.)
X•••7
-axis position error.(…..Reinitialize.)
X•••8
-axis scale retry error.(…..Reinitialize.)
Error with a code beginning with "O"
Error codes beginning with the letter O represent errors caused by other
reasons.
Please refer to the section 2-9, [Remedies for Other Errors] regarding the way
to handle the error.
Error Code Message
O0516 Workpiece in cassette.
O0518 Cassette switch turned OFF.
O0519 Remove the workpiece at W/T.
O0520 Remove the workpiece at C/T.
O0522 Remove the workpiece at S/T.
O1028 Remove the workpiece at Upper Arm.
O1029 Remove the workpiece at Lower Arm.
O1036 Inspection cassette switch turned OFF.

D-21
2-3. Remedies for Errors Requiring Emergent Stop
E0002 : EM switch pressed.
Error code
E0002
Message
EM switch pressed.
What was
detected
The signal input from the EMO switch was detected.
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end and the power turns OFF.
The other axis drive systems come to an immediate stop.
(If the error occurs during spindle rotation, the power turns OFF and the
spindle enters the free running state with the covers locked.)
Phenomenon Probable causes Remedy Reference
What to do
EMO operation is
not actuated even
after the EMO
switch is pressed.
The switch is
defective.
Replace the switch.
Contact your
nearest DISCO
Service Office.
The wiring is
shorted.
Contact your
nearest DISCO
Service Office.
The EMO operation
is actuated although
the EMO switch is
OFF.
The switch is
defective.
Replace the switch.
Contact your
nearest DISCO
Service Office.
The wiring is broken. Contact your
nearest DISCO
Service Office.
Recovery
(1) Turn the EMO switch in the direction of the arrow to put it back to the
normal position.
(2) Turn OFF the machine power.
(3) Wait more than one minute and then turn the power back ON.
(4) Effect system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear

D-22
E0003 : Insufficient main air ... Reinitialize.
Error code
E0003
Message
Insufficient main air ... Reinitialize.
What was
detected
The air pressure dropped to below 400 kPa and there was an input on the
pressure sensor.
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end and the spindle stops. The other axis
drive systems come to an immediate stop.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
when the supply air
pressure is lower
than 0.4MPa.
The supply air
pressure is too low.
Correct the air
supply pressure.
Check that the
supply air piping is
not clogged or bent.
The error occurs
when the supply air
pressure is 0.4MPa
or higher.
The pressure sensor
limit setting is
improper.
Set the pressure
sensor to 0.4MPa.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the air pressure gauge reads 0.5MPa.
(4) Effect system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear