DFD6361-Maintenance - 第314页

D-29 E0020 : H andling cov er sensor er ror. Error c ode E0020 Message Handling cov er sensor erro r. W hat wa s detected There wa s an input on the safe ty switch of the arm section cover. During what operation it occur…

100%1 / 720
D-28
E0019 : Insufficient clean air pressure.
Error code
E0019
Message
Insufficient clean air pressure.
What was
detected
The clean air supply pressure has dropped to below the lower limit defined
on the SENSOR THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end. The spindle stops rotating. The X-axis
returns to a location under the microscope. The Y- and θ-axes decelerate
and stop.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
when the clean air
supply pressure is
lower than the
minimum limit.
The supply pressure
of clean air is too
low.
Check the supply
pressure of clean
air.
Check that the
clean air piping is
not clogged or bent.
The error occurs
when the clean air
supply pressure is
as same as or
higher than the
minimum limit.
The limit setting of
the pressure sensor is
improper.
Correct the setting
of the pressure
sensor to 0.2MPa.
The pressure sensor
is detective
Replace the sensor.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the air pressure gauge reads 0.5MPa.
(4) Effect system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-29
E0020 : Handling cover sensor error.
Error code
E0020
Message
Handling cover sensor error.
What was
detected
There was an input on the safety switch of the arm section cover.
During what
operation it
occurred
While the X-, Y-, Z-, θ -axis, lower arm and upper is operating.
The cover does not open during the spindle rotation.
State after
detection
The Z-axis retreats to the upper end and the spindle stops.
The X-, Y-, θ-, spinner-axis and the lower arm immediately stop.
The upper arm stops after completing one cycle of operation.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
cover is closed.
Thesafetyswitchis
defective.
Replace the safety
switch.
Contact your
nearest DISCO
Service Office.
The sensor line is
broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Close the arm section cover.
(2) Cancel the alarm.
(3) Effect the system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-30
E0175 : Process program error. Re-initialize system.
Error code
E0175
Message
Process program error. Re-initialize system.
What was
detected
The machine did not operate in accordance with the operation commands
specified in the process control table in the device data.
During what
operation it
occurred
While the machine is operated after device data selection.
State after
detection
The Z-axis retreats to the upper end and the spindle stops. The X-, Y- and
θ-axis drive systems come to an immediate stop.
Phenomenon Probable causes Remedy Reference
What to do
Recovery
(1) Cancel the alarm.
(2) Effect system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear