DFD6361-Maintenance - 第317页

D-32 E0190 : W ater le akage det ected. (X- axis) Error c ode E0190 Message Water leak age detect ed. (X- axis) W hat wa s detected Water leak age was de tected by the water leakage detector inst alled over the X-ax is. …

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D-31
E0176 : Cover open error.
Error code
E0176
Message
Cover open error.
What was
detected
There was an input on the safety switch of the splash cover or arm section
cover.
During what
operation it
occurred
When the splash cover or arm section cover is opened during axis
initialization which is to be performed as theremedyof the cover opening.
State after
detection
The Z-axis retreats to the upper end and the spindle stops.
The X-, Y-, θ- and spinner-drive systems come to an immediate stop.
The upper arm and lower arm stop after completing one cycle of operation.
Phenomenon Probable causes Remedy Reference
What to do
The error also
occurs while the
cover is closed.
Thesafetyswitchis
defective.
Replace the safety
switch.
Contact your
nearest DISCO
Service Office.
The sensor line is
broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Close the splash cover and arm section cover.
(2) Cancel the alarm.
(3) Effect the system initialization.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-32
E0190 : Water leakage detected. (X-axis)
Error code
E0190
Message
Water leakage detected. (X-axis)
What was
detected
Water leakage was detected by the water leakage detector installed over the
X-axis.
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end and the spindle stops.
All axis drive systems come to an immediate stop, and then the machine
waits for system initialization.
Phenomenon Probable causes Remedy Reference
What to do
Thedrainageinthe
water case is poor.
The wastes strainer
of the drain outlet is
clogged.
Clean the drain
wastes strainer
E-3-1
The bellows are
broken.
The bellows are
bored by
contamination or
other foreign matter.
Replace the
bellows
F-3-1
The error occurs
although no water
leaks.
The water leakage
sensor line is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Turn OFF the machine power.
(3) Any contamination must be removed from the wastes strainer of the
water case.
(4) Check the X-axis slider sensor section for water leaks. Any water leaks
must be wiped off.
(5) Check the bellows. If it is broken, replace it.
(6) Wait more than one minute after turning OFF the machine power, and
then turn the power back ON.
(7) Effect system initialization.
(8) Turn ON the wheel coolant water supply and check for improper water
drainage.
(9) Resume the operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-33
E0556 : Z1-axis spindle cooling water flow error.
Error code
E0556
Message
Z1-axis spindle cooling water flow error.
What was
detected
A signal input was received by the flow rate sensor due to insufficient flow
rate of the Z1-axis spindle coolant water (the rate should normally be 1.0
L/min or higher).
During what
operation it
occurred
At any time.
State after
detection
The Z1- and Z2-axes retreat to the upper end. The spindle stops rotation.
The X-axis returns to a location beneath the microscope. The Y- and θ-axes
decelerate and stop.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
when the flow rate
is lower than 1.0
L/min.
The spindle coolant
supply pressure is too
low.
Check that the
spindle coolant
water piping is not
bent or clogged.
The error occurs
when the flow rate
is 1.0 L/min higher.
The flow rate sensor
is defective.
Replace the sensor.
Contact your
nearest DISCO
Service Office.
The flow rate sensor
lineisbroken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Make sure that the flow rate of the spindle coolant water is 1.0L/min or
higher.
(3) Resume the operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear