DFD6361-Maintenance - 第32页
A-16 2-4. Z (Z1 and Z2)-axis Section Z-axi s section compon ent names The Z-axis section consists of the following components. FRONT Z2-axis stepp ing m otor Linear gu ide Z2-ax is slider Z1-axis s tepping m otor Z1-ax i…

A-15
Y-axis position detection section (Continued)
[Y1-axis rear end]
Slit plate
Y1-axis rear end sensor
[Y2-axis front end]
Slit plate
Y2-axis front end sensor
[Y1-Y2 axis approach end]
Slit plate
Y1-Y2 axis approach end sensor

A-16
2-4. Z (Z1 and Z2)-axis Section
Z-axis section component names
The Z-axis section consists of the following components.
FRONT
Z2-axis stepping motor
Linear guide
Z2-axis slider
Z1-axis stepping motor
Z1-axis slider
Linear guide
Ball-bearing leadscrew Ball-bearing leadscrew
Z-axis drive section mechanism
The Z-axis drive section is structured as follows:
Driving source Driven by the stepping motor with the aid of the ball-
bearing leadscrew.
Slide mechanism Employs a linear guide to assure smooth linear motion.

A-17
Z-axis position detection section
Photointerrupters (sensor) are provided for the upper and lower stroke end
limits to detect the Z-axis position.
NOTICE
The machine uses photointerrupters to detect an axis position.
The photointerrupter provides the reference for the axis origin
position. If the axis origin is displaced from its proper position, this
may lead to a failure of the machine. Therefore, if any associated
parts need to be replaced, contact your nearest DISCO Service
Office.
Sensor Name Sensor Position Operation
UP end sensor Origin (1 mm under
the UP end sensor
position, which is
fixed by software)
- Detects the reference position for
operation.
UP stroke end limit - Detects the UP end limit of the Z-
axis maximum stroke.
DOWN end
sensor
DOWN stroke end
limit
- Detects the DOWN end limit of
the Z-axis maximum stroke.
DOWN end sensor
UP end sensor
Slit plate
Z (Z1 and Z2)-axis position sensor