DFD6361-Maintenance - 第323页

D-38 E0665 : W ater le akage det ected. (Spi nner) Error c ode E0665 Message Water leak age detect ed. (Spinne r) W hat wa s detected Water leak age was de tected by the water leakage detector inst alled in t he spinner …

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D-37
E0576 : Pressure of water dropped.
Error code
E0576
Message
Pressure of deionized water dropped.
What was
detected
The supply pressure of deionized water dropped to under the lower limit
defined on the SENSOR THRESHOLD DATA screen [screen 6.6].
During what
operation it
occurred
While the wheel coolant water is supplied.
State after
detection
The wheel coolant water stops. The spindle continues rotation.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
even when the
deionized water
supply pressure is
proper.
The wire of the
pressure sensor is
broken.
Contact your
nearest DISCO
Service Office.
The sensor is
defective.
Replace the sensor.
The setting value of
the lower limit is too
high.
Correct the setting
value.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the deionized water pressure gauge reads 0.3MPa.
(4) Turn ON the wheel coolant water again.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-38
E0665 : Water leakage detected. (Spinner)
Error code
E0665
Message
Water leakage detected. (Spinner)
What was
detected
Water leakage was detected by the water leakage detector installed in the
spinner cleaning section.
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end and the spindle stops.
All axis drive systems come to an immediate stop, and then the machine
waits for system initialization.
Phenomenon Probable causes Remedy Reference
What to do
Poor drainage in
the water case.
The water case is
blocked with waste.
Clean the water
case.
E-3-1
Poor drainage in
the spinner case
Thespinnercaseis
blocked with waste.
Clean the spinner
case.
The error occurs
although no water
leaks.
The water leakage
sensor line is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Turn OFF the machine power.
(3) Clean the water case to remove contamination.
(4) Clean the spinner case to remove contamination.
(5) Wipe water off water leaked under the spinner case, if necessary.
(6) Wait more than one minute after turning OFF the machine power, and
then turn the power back ON.
(7) Effect system initialization.
(8) Operate the spinner cleaning to check for improper water drainage.
(9) Resume the operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-39
E0706 : Z1 cut water flow (BLD F) lower limit
Error code
E0706
Message
Z1 cut water flow (BLD F) lower limit
What was
detected
The flow rate of the Z1-axis wheel coolant water (Blade cooler) drops to
under the predefined flow rate.
This flow rate setting can be made either on a device data or on the
WATER PROGRAM DATA MAINTENANCE screen [screen 5.3.5].
During what
operation it
occurred
At any time while the Z1-axis wheel coolant water is supplied.
State after
detection
The Z1- and Z2-axes retreat to the upper end and the X-axis returns to the
position under the microscope. The Y- and θ - axes reduce speed and stop.
Phenomenon Probable causes Remedy Reference
What to do
The wheel coolant
water flow rate
does not reach the
predefined flow
rate.
The flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Supply pressure has
declined.
Check the bending
or clogging in the
water supply pipe.
The error occurs
even when the
wheel coolant water
flow rate has
already reached the
predefined flow
rate.
The flow rate sensor
in the flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Thelineintheflow
rate sensor is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "BLADE Z1" and "BLADE Z2" on the
<WATER> Page.
(4) Turn ON the wheel coolant water and resumes operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear