DFD6361-Maintenance - 第328页

D-43 E0715 : Z 1 cut water f low (SP) l ower limit Error c ode E0715 Message Z1 cut water flow (SP) low er lim it W hat wa s detected The flow rate of the Z 1-axis wheel coo lant water (Spray ) drops to und er the predef…

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D-42
E0713 : Z2 cut water flow (SHW) lower limit
Error code
E0713
Message
Z2 cut water flow (SHW) lower limit
What was
detected
The flow rate of the Z2-axis wheel coolant water (Shower) drops to under
the predefined flow rate.
This flow rate setting can be made either on a device data or on the
WATER PROGRAM DATA MAINTENANCE screen [screen 5.3.5].
During what
operation it
occurred
At any time while the Z2-axis wheel coolant water is supplied.
State after
detection
The Z1- and Z2-axes retreat to the upper end and the X-axis returns to the
position under the microscope. The Y- and θ - axes reduce speed and stop.
Phenomenon Probable causes Remedy Reference
What to do
The wheel coolant
water flow rate
does not reach the
predefined flow
rate.
The flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Supply pressure has
declined.
Check the bending
or clogging in the
water supply pipe.
The error occurs
even when the
wheel coolant water
flow rate has
already reached the
predefined flow
rate.
The flow rate sensor
in the flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Thelineintheflow
rate sensor is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "SHOWER Z1" and "SHOWER Z2" on
the <WATER> Page.
(4) Turn ON the wheel coolant water and resumes operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-43
E0715 : Z1 cut water flow (SP) lower limit
Error code
E0715
Message
Z1 cut water flow (SP) lower limit
What was
detected
The flow rate of the Z1-axis wheel coolant water (Spray) drops to under the
predefined flow rate.
This flow rate setting can be made either on a device data or on the
WATER PROGRAM DATA MAINTENANCE screen [screen 5.3.5].
During what
operation it
occurred
At any time while the Z1-axis wheel coolant water is supplied.
State after
detection
The Z1- and Z2-axes retreat to the upper end and the X-axis returns to the
position under the microscope. The Y- and θ - axes reduce speed and stop.
Phenomenon Probable causes Remedy Reference
What to do
The wheel coolant
water flow rate
does not reach the
predefined flow
rate.
The flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Supply pressure has
declined.
Check the bending
or clogging in the
water supply pipe.
The error occurs
even when the
wheel coolant water
flow rate has
already reached the
predefined flow
rate.
The flow rate sensor
in the flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Thelineintheflow
rate sensor is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "SPRAY Z1" and "SPRAY Z2" on the
<WATER> Page.
(4) Turn ON the wheel coolant water and resumes operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-44
E0716 : Z2 cut water flow (SP) lower limit
Error code
E0716
Message
Z2 cut water flow (SP) lower limit
What was
detected
The flow rate of the Z2-axis wheel coolant water (Spray) drops to under the
predefined flow rate.
This flow rate setting can be made either on a device data or on the
WATER PROGRAM DATA MAINTENANCE screen [screen 5.3.5].
During what
operation it
occurred
At any time while the Z2-axis wheel coolant water is supplied.
State after
detection
The Z1- and Z2-axes retreat to the upper end and the X-axis returns to the
position under the microscope. The Y- and θ - axes reduce speed and stop.
Phenomenon Probable causes Remedy Reference
What to do
The wheel coolant
water flow rate
does not reach the
predefined flow
rate.
The flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Supply pressure has
declined.
Check the bending
or clogging in the
water supply pipe.
The error occurs
even when the
wheel coolant water
flow rate has
already reached the
predefined flow
rate.
The flow rate sensor
in the flow rate
controller is
defective.
Replace the flow
rate controller.
Contact your
nearest DISCO
Service Office.
Thelineintheflow
rate sensor is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Press the <Sensor> button to call up the SENSOR STATUS screen.
(3) Make sure that the flow rate of "SPRAY Z1" and "SPRAY Z2" on the
<WATER> Page.
(4) Turn ON the wheel coolant water and resumes operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear