DFD6361-Maintenance - 第33页
A-17 Z-axis positio n detection section Photointerrupters (sensor) are provided fo r the upper and lower stroke end limits to detec t the Z-a xis position. NOTICE The machine uses pho tointerru pters to detect an ax is p…
A-16
2-4. Z (Z1 and Z2)-axis Section
Z-axis section component names
The Z-axis section consists of the following components.
FRONT
Z2-axis stepping motor
Linear guide
Z2-axis slider
Z1-axis stepping motor
Z1-axis slider
Linear guide
Ball-bearing leadscrew Ball-bearing leadscrew
Z-axis drive section mechanism
The Z-axis drive section is structured as follows:
Driving source Driven by the stepping motor with the aid of the ball-
bearing leadscrew.
Slide mechanism Employs a linear guide to assure smooth linear motion.
A-17
Z-axis position detection section
Photointerrupters (sensor) are provided for the upper and lower stroke end
limits to detect the Z-axis position.
NOTICE
The machine uses photointerrupters to detect an axis position.
The photointerrupter provides the reference for the axis origin
position. If the axis origin is displaced from its proper position, this
may lead to a failure of the machine. Therefore, if any associated
parts need to be replaced, contact your nearest DISCO Service
Office.
Sensor Name Sensor Position Operation
UP end sensor Origin (1 mm under
the UP end sensor
position, which is
fixed by software)
- Detects the reference position for
operation.
UP stroke end limit - Detects the UP end limit of the Z-
axis maximum stroke.
DOWN end
sensor
DOWN stroke end
limit
- Detects the DOWN end limit of
the Z-axis maximum stroke.
DOWN end sensor
UP end sensor
Slit plate
Z (Z1 and Z2)-axis position sensor
A-18
2-5. θ-axis Section
θ-axis section component names
The θ-axis section consists of the following components.
Center ring
Chuck table
Table base
Waterproof cover
Insulation base
Direct drive motor
Motor base
θ-axis drive section mechanism
The θ-axis drive section is structured as follows:
Drive section Uses a direct-drive motor to drive the chuck table directly
and provides closed-loop control using a rotary encoder.
Position On the top of the X-axis slide base, the direct-drive motor,
insulation base, table base and chuck table are stacked in
the order named.
Rotation angle
The axis provides 60 ° counterclockwise and 320 °
clockwise rotation from the origin. The maximum rotation
angle of this machine is 380 °.
Rotating
operation
Pressing the buttons causes the θ -axis to
rotate through 0.005 °. Therefore, alignment can be
accomplished with ease.