DFD6361-Maintenance - 第331页

D-46 E1032 : Inspectio n cover sensor error . Error c ode E1032 Message Inspection cover sensor e rror. W hat wa s detected Th ere was a n in put to t he co ver switc h of the insp ect ion c over . During what operation …

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D-45
E1027 : Cassette Position Error (Placement)
Error code
E1027
Message
Cassette Position Error (Placement)
What was
detected
There is no input from any of three cassette placement sensors, when the
cassette presence/absence sensor is turned ON.
During what
operation it
occurred
During the full automatic operation and elevator operation.
State after
detection
The elevator operation stops.
Phenomenon Probable causes Remedy Reference
What to do
The error occurs
although the
cassette is placed
properly.
The sensor is
defective.
Replace the sensor.
Recovery
(1) Cancel the alarm, and then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Set the cassette to the elevator again.
(3) Perform the error recovery steps indicated on the screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-46
E1032 : Inspection cover sensor error.
Error code
E1032
Message
Inspection cover sensor error.
What was
detected
There was an input to the cover switch of the inspection cover.
During what
operation it
occurred
While the elevator axis vertically moves.
State after
detection
The elevator axis will immediately stop.
Phenomenon Probable causes Remedy Reference
What to do
The error is issued
even though the
cover is closed.
The cover sensor is
defective.
Replace the
sensor.
Contact your
nearest DISCO
Service Office.
The sensor wiring is
broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm, then the ERROR RECOVERY (HANDLING)
screen is displayed.
(2) Close the inspection workpiece door.
(3) Select "CONTINUE AFTER REMOVING WORKPIECE" from the
recovery screen.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear
D-47
E1033 : Water leakage detected. (θ-axis)
Error code
E1033
Message
Water leakage detected. (
θ-axis)
What was
detected
Water leakage was detected by the water leakage detector installed in the
θ-axis section.
During what
operation it
occurred
At any time.
State after
detection
The Z-axis retreats to the upper end and the spindle stops.
All axis drive systems come to an immediate stop, and then the machine
waits for system initialization.
Phenomenon Probable causes Remedy Reference
What to do
There is water
leakage at the
θ-axis section.
The waterproof cover
or O-ring is broken.
Replace the
waterproof cover
and O-ring of the
θ-axis section.
F-3-2
The error occurs
although no water
leaks.
The wiring of the
water leakage sensor
is broken.
Contact your
nearest DISCO
Service Office.
Recovery
(1) Cancel the alarm.
(2) Turn OFF the machine power.
(3)IfthewaterproofcoverorO-ringoftheθ-axis section is broken, replace
both with the new ones.
(4)Ifthereiswaterleakageattheθ-axis section, wipe off water.
(5) Wait more than one minute after turning OFF the machine power, and
then turn the power back ON.
(6) Effect system initialization.
(7) Turn on the wheel coolant water supply and check whether there is no
water leakage at the θ-axis section.
(8) Resume the operation.
Maintenance level Maintenance personnel level Hazard level
Measuring equipment used Tools Replacement parts Protective gear